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公开(公告)号:JPS5242782A
公开(公告)日:1977-04-02
申请号:JP9882076
申请日:1976-08-20
Applicant: IBM
Inventor: EDOWAADO ESU WAJIDA
IPC: G01J3/42 , G01J3/02 , G01J3/04 , G01J3/28 , G01J3/30 , G01J3/457 , G01N21/27 , G01N21/31