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公开(公告)号：DE3681697D1
公开(公告)日：1991-10-31
申请号：DE3681697
申请日：1986-11-25
Applicant: IBM
Inventor： ANSCHEL MORRIS , GOODRICH LAWRENCE DUANE , HETRICK BARTON MAITLAND
IPC: H01L21/30 , G03F7/30 , G03F7/32 , H01L21/027 , G03F7/26
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