公开(公告)号：DE3477848D1

公开(公告)日：1989-05-24

申请号：DE3477848

申请日：1984-10-11

Applicant: IBM

Inventor： BEDNORZ JOHANNES GEORG ,  HOLLIS RALPH LEROY ,  LANZ MARTIN ,  POHL WOLFGANG DIETER ,  YEACK-SCRANTON CELIA ELIZABETH

IPC: H01J37/20 ,  B23Q1/36 ,  G02B21/00 ,  G02B21/26 ,  G03F7/20 ,  G12B1/00 ,  H01L41/09

Abstract: The positioner comprises a fixed frame (1) from which extends a first pair of parallel piezoelectric benders ("bimorphs") (2, 3) which carry an intermediate frame (4). Actuation of the bimorphs (2, 3) causes lateral translation of the intermediate frame (4) with respect to the fixed frame with the bimorphs (2, 3) forming the flexible sides of a parallelogram.Attached to the intermediate frame (4) is a second pair of bimorphs (12, 13) which extend in a direction orthogonal to the direction of the first pair of bimorphs (2, 3) thus permitting a support frame (14) to exercise a deflection in a direction orthogonal with respect to the movement of the intermediate frame (4).The bimorphs used consist of one or two piezoelectric elements carrying two or more electrodes on either side the proper actuation of which causes the benders to bend with parallel end surfaces at all times.

公开(公告)号：DE3265993D1

公开(公告)日：1985-10-10

申请号：DE3265993

申请日：1982-05-05

Applicant: IBM

Inventor： HAMMER ROBERT ,  HOLLIS RALPH LEROY

IPC: H01R13/02 ,  H01R13/33