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公开(公告)号：DE2228141A1
公开(公告)日：1973-01-11
申请号：DE2228141
申请日：1972-06-09
Applicant: IBM
Inventor： JENSEN DONALD FREDERICK , LAGERGREN RICHARD EDWARD , LENTZ ROBERT CHARLES , REIDENBACH JOHN RALPH , ROCHESTER MINN , SCHAFFER ROBERT RUDOLPH
IPC: G06K7/02 , H01L23/29 , H01L23/522
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