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公开(公告)号：IT1164529B
公开(公告)日：1987-04-15
申请号：IT2774679
申请日：1979-11-30
Applicant: IBM
Inventor： HODGSON RODNEY TREVOR , HOVEL HAROLD JOHN , MAC PHERSON WOODALL JERRY
IPC: H01L31/04 , H01L31/055
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