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公开(公告)号：DE2310117A1
公开(公告)日：1973-09-06
申请号：DE2310117
申请日：1973-03-01
Applicant: IBM
Inventor： MADER SIEGFRIED REINHARD DR , MATTHEWS JOHN WAUCHOPE
IPC: C30B25/18 , C30B13/34 , C30B15/36 , H01L21/205 , H01L21/208 , B01J17/22
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