公开(公告)号：US20150276478A1

公开(公告)日：2015-10-01

申请号：US14267758

申请日：2014-05-01

Applicant: IMEC

Inventor： Bert Geelen ,  Andy Lambrechts ,  Klaas Tack

IPC: G01J3/26 ,  G01J3/28 ,  G01J3/02

CPC classification number: G01J3/26 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0235 ,  G01J3/0256 ,  G01J3/0259 ,  G01J3/2823 ,  G01J2003/2826

Abstract: A spectral camera for producing a spectral output is disclosed. The spectral camera has an objective lens for producing an image, a mosaic of filters for passing different bands of the optical spectrum, and a sensor array arranged to detect pixels of the image at the different bands passed by the filters, wherein for each of the pixels, the sensor array has a cluster of sensor elements for detecting the different bands, and the mosaic has a corresponding cluster of filters of different bands, integrated on the sensor element so that the image can be detected simultaneously at the different bands. Further, the filters are first order Fabry-Perot filters, which can give any desired passband to give high spectral definition. Cross talk can be reduced since there is no longer a parasitic cavity.

Abstract translation: 公开了一种用于产生光谱输出的光谱相机。 光谱相机具有用于产生图像的物镜，用于通过光谱的不同频带的滤波器的马赛克;以及传感器阵列，其布置成检测由滤色器通过的不同频带处的图像的像素，其中对于每个 传感器阵列具有用于检测不同频带的传感器元件簇，并且马赛克具有集成在传感器元件上的不同频带的相应的滤波器簇，使得可以在不同频带处同时检测图像。 此外，滤波器是第一级法布里 - 珀罗滤波器，其可以给出任何期望的通带以提供高光谱定义。 可以减少串扰，因为不再有寄生腔。

公开(公告)号：US09848135B2

公开(公告)日：2017-12-19

申请号：US14267781

申请日：2014-05-01

Applicant: IMEC

Inventor： Bert Geelen ,  Andy Lambrechts ,  Klaas Tack

IPC: G06K9/32 ,  H04N5/33 ,  G01J3/02 ,  G01J3/28 ,  H04N5/265 ,  H04N17/00

CPC classification number: H04N5/332 ,  G01J3/0208 ,  G01J3/0256 ,  G01J3/0259 ,  G01J3/2823 ,  G01J2003/2826 ,  H04N5/265 ,  H04N17/002

Abstract: A spectral camera for producing a spectral output is disclosed. The spectral camera has an objective lens for producing an image, an array of mirrors, an array of filters for passing a different passband of the optical spectrum for different ones of the optical channels arranged so as to project multiple of the optical channels onto different parts of the same focal plane, and a sensor array at the focal plane to detect the filtered image copies simultaneously. By using mirrors, there may be less optical degradation and the trade off of cost with optical quality can be better. By projecting the optical channels onto different parts of the same focal plane a single sensor or coplanar multiple sensors can to be used to detect the different optical channels simultaneously which promotes simpler alignment and manufacturing.

公开(公告)号：US20140267878A1

公开(公告)日：2014-09-18

申请号：US14267776

申请日：2014-05-01

Applicant: IMEC

Inventor： Bert Geelen ,  Andy Lambrechts ,  Klaas Tack

IPC: G01J3/28

CPC classification number: G01J3/2803 ,  G01J3/0208 ,  G01J3/0229 ,  G01J3/0235 ,  G01J3/0264 ,  G01J3/2823 ,  G01J3/513 ,  Y10T29/49826

Abstract: A spectral camera having an objective lens, an array of lenses for producing optical copies of segments of the image, an array of filters for the different optical channels and having an interleaved spatial pattern, and a sensor array to detect the copies of the image segments is disclosed. Further, detected segment copies of spatially adjacent optical channels have different passbands and represent overlapping segments of the image, and detected segment copies of the same passband on spatially non-adjacent optical channels represent adjacent segments of the image which fit together. Having segments of the image copied can help enable better optical quality for a given cost. Having an interleaved pattern of the filter bands with overlapping segments enables each point of the image to be sensed at different bands to obtain the spectral output for many bands simultaneously to provide better temporal resolution.

Abstract translation: 具有物镜的光谱相机，用于产生图像的片段的光学副本的透镜阵列，用于不同光学信道的滤光器阵列并具有交错的空间图案，以及用于检测图像片段的副本的传感器阵列 被披露。 此外，空间相邻光通道的检测到的片段副本具有不同的通带并且表示图像的重叠片段，并且在空间上不相邻的光学通道上检测到相同通带的片段副本表示装配在一起的图像的相邻片段。 复制图像的片段有助于为给定成本提供更好的光学质量。 具有重叠片段的滤波器带的交错图案使得能够在不同频带处感测图像的每个点，以同时获得许多频带的频谱输出以提供更好的时间分辨率。

公开(公告)号：US12125861B2

公开(公告)日：2024-10-22

申请号：US17177190

申请日：2021-02-16

Applicant: IMEC VZW

Inventor： Nick Spooren ,  Bert Geelen

IPC: H01L27/146

CPC classification number: H01L27/14621 ,  H01L27/14623 ,  H01L27/14627 ,  H01L27/14643

Abstract: The present invention relates to a spectral sensor. The spectral sensor comprising: a light detecting element; a microlens; and an interference filter arranged between the light detecting element and the microlens, and configured to transmit light in one or more spectral bands; wherein the microlens has an effective focal length (F) exceeding a distance (D) between the microlens and the light detecting element. The microlens may be configured such that light refracted by the microlens, to be transmitted through the interference filter, converges towards a position (P) behind the light detecting element. The present invention further relates to an image sensor comprising a plurality of spectral sensors.

公开(公告)号：US11244977B2

公开(公告)日：2022-02-08

申请号：US15846584

申请日：2017-12-19

Applicant: IMEC VZW

Inventor： Nicolaas Tack ,  Bert Geelen ,  Bart Vereecke

IPC: H01L27/146 ,  G01J3/02 ,  G01J3/28 ,  G01J3/26 ,  G01J1/42

Abstract: An imaging sensor comprises: an array of light-detecting elements, wherein each light-detecting element in the array of light-detecting elements is arranged in the imaging sensor so as to detect a respective wavelength interval, wherein the respective wavelength interval differs for different light-detecting elements; a pattern arranged on the array of light-detecting elements, wherein the pattern defines a plurality of transparent areas, each transparent area being associated with a corresponding light-detecting element in the array of light-detecting elements, wherein a size of a transparent area among the plurality of transparent areas is dependent of the corresponding light-detecting element with which the transparent area is associated.

公开(公告)号：US09772229B2

公开(公告)日：2017-09-26

申请号：US14267746

申请日：2014-05-01

Applicant: IMEC

Inventor： Bert Geelen ,  Andy Lambrechts ,  Klaas Tack

IPC: H04N9/07 ,  H04N5/225 ,  H04N3/14 ,  G01J3/28 ,  G01J3/02 ,  H04N9/04

CPC classification number: G01J3/2823 ,  G01J3/0208 ,  G01J3/0256 ,  G01J3/0259 ,  G01J2003/2826 ,  H04N9/045

Abstract: A spectral camera for producing a spectral output is disclosed. The spectral camera has an objective lens for producing an image, an optical duplicator, an array of filters, and a sensor array arranged to detect the filtered image copies simultaneously on different parts of the sensor array. Further, a field stop defines an outline of the image copies projected on the sensor array. The filters are integrated on the sensor array, which has a planar structure without perpendicular physical barriers for preventing cross talk between each of the adjacent optical channels. The field stop enables adjacent image copies to fit together without gaps for such barriers. The integrated filters mean there is no parasitic cavity causing crosstalk between the adjacent image copies. This means there is no longer a need for barriers between adjacent projected image copies, and thus sensor area can be better utilized.

公开(公告)号：US20190067344A1

公开(公告)日：2019-02-28

申请号：US16101080

申请日：2018-08-10

Applicant: IMEC VZW

Inventor： Bert Geelen

IPC: H01L27/146 ,  H01L31/0216 ,  G01J3/28

Abstract: Example embodiments relate to image sensors and imaging apparatuses. One embodiment includes an image sensor for acquiring an image of an object. The image sensor includes an array of photo-sensitive areas formed on a substrate. Each photo-sensitive area is a continuous area within the substrate and is configured to detect incident light. The image sensor also includes an array of interference filters. Each inference filter is configured to selectively transmit a wavelength band. The array of interference filters is monolithically integrated on the array of photo-sensitive areas. A plurality of the interference filers is associated with a single photo-sensitive area of the array of photo-sensitive areas. Each interference filter in the plurality of interference filters is configured to selectively transmit a unique wavelength band to the photo-sensitive area and each interference filter in the plurality of interference filters is associated with a respective portion of the single photo-sensitive area.

公开(公告)号：US09857222B2

公开(公告)日：2018-01-02

申请号：US14267758

申请日：2014-05-01

Applicant: IMEC

Inventor： Bert Geelen ,  Andy Lambrechts ,  Klaas Tack

IPC: G01J3/26 ,  G01J3/02 ,  G01J3/28

CPC classification number: G01J3/26 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0235 ,  G01J3/0256 ,  G01J3/0259 ,  G01J3/2823 ,  G01J2003/2826

Abstract: A spectral camera for producing a spectral output is disclosed. The spectral camera has an objective lens for producing an image, a mosaic of filters for passing different bands of the optical spectrum, and a sensor array arranged to detect pixels of the image at the different bands passed by the filters, wherein for each of the pixels, the sensor array has a cluster of sensor elements for detecting the different bands, and the mosaic has a corresponding cluster of filters of different bands, integrated on the sensor element so that the image can be detected simultaneously at the different bands. Further, the filters are first order Fabry-Perot filters, which can give any desired passband to give high spectral definition. Cross talk can be reduced since there is no longer a parasitic cavity.

公开(公告)号：US20140267849A1

公开(公告)日：2014-09-18

申请号：US14267746

申请日：2014-05-01

Applicant: IMEC

Inventor： Bert Geelen ,  Andy Lambrechts ,  Klaas Tack

IPC: G01J3/28 ,  H04N9/04

CPC classification number: G01J3/2823 ,  G01J3/0208 ,  G01J3/0256 ,  G01J3/0259 ,  G01J2003/2826 ,  H04N9/045

Abstract: A spectral camera for producing a spectral output is disclosed. The spectral camera has an objective lens for producing an image, an optical duplicator, an array of filters, and a sensor array arranged to detect the filtered image copies simultaneously on different parts of the sensor array. Further, a field stop defines an outline of the image copies projected on the sensor array. The filters are integrated on the sensor array, which has a planar structure without perpendicular physical barriers for preventing cross talk between each of the adjacent optical channels. The field stop enables adjacent image copies to fit together without gaps for such barriers. The integrated filters mean there is no parasitic cavity causing crosstalk between the adjacent image copies. This means there is no longer a need for barriers between adjacent projected image copies, and thus sensor area can be better utilized.

Abstract translation: 公开了一种用于产生光谱输出的光谱相机。 光谱相机具有用于产生图像的物镜，光学复制器，滤光器阵列和布置成在传感器阵列的不同部分上同时检测滤波图像拷贝的传感器阵列。 此外，场停止定义投影在传感器阵列上的图像副本的轮廓。 滤波器集成在传感器阵列上，该传感器阵列具有平面结构，而没有垂直的物理屏障，用于防止每个相邻光通道之间的串扰。 现场停止功能使相邻的图像副本可以组合在一起，无间隙地用于这种屏障。 集成滤波器意味着没有引起相邻图像副本之间串扰的寄生腔。 这意味着不再需要相邻投影图像副本之间的屏障，因此可以更好地利用传感器区域。

公开(公告)号：US09366573B2

公开(公告)日：2016-06-14

申请号：US14267776

申请日：2014-05-01

Applicant: IMEC

Inventor： Bert Geelen ,  Andy Lambrechts ,  Klaas Tack

IPC: H04N9/07 ,  H04N9/04 ,  G01J3/28 ,  G01J3/51 ,  G01J3/02

CPC classification number: G01J3/2803 ,  G01J3/0208 ,  G01J3/0229 ,  G01J3/0235 ,  G01J3/0264 ,  G01J3/2823 ,  G01J3/513 ,  Y10T29/49826

Abstract: A spectral camera having an objective lens, an array of lenses for producing optical copies of segments of the image, an array of filters for the different optical channels and having an interleaved spatial pattern, and a sensor array to detect the copies of the image segments is disclosed. Further, detected segment copies of spatially adjacent optical channels have different passbands and represent overlapping segments of the image, and detected segment copies of the same passband on spatially non-adjacent optical channels represent adjacent segments of the image which fit together. Having segments of the image copied can help enable better optical quality for a given cost. Having an interleaved pattern of the filter bands with overlapping segments enables each point of the image to be sensed at different bands to obtain the spectral output for many bands simultaneously to provide better temporal resolution.

Abstract translation: 具有物镜的光谱相机，用于产生图像的片段的光学副本的透镜阵列，用于不同光学信道的滤光器阵列并具有交错的空间图案，以及用于检测图像片段的副本的传感器阵列 被披露。 此外，空间相邻光通道的检测到的片段副本具有不同的通带并且表示图像的重叠片段，并且在空间上不相邻的光学通道上检测到相同通带的片段副本表示装配在一起的图像的相邻片段。 复制图像的片段有助于为给定成本提供更好的光学质量。 具有重叠片段的滤波器带的交错图案使得能够在不同频带处感测图像的每个点，以同时获得许多频带的频谱输出以提供更好的时间分辨率。