公开(公告)号：US10128077B2

公开(公告)日：2018-11-13

申请号：US15576687

申请日：2016-01-06

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Bok Lae Cho ,  In Young Park

IPC: H01J37/06 ,  H01J37/065 ,  H01J37/26

Abstract: The present invention relates to an electron gun for facilitating position adjustment, and an electron microscope including the same, the electron gun improving a vacuum structure so as to easily move a filament block or an electron tip of an electron gun without having bellows for maintaining a vacuum when the center axis of the filament block or the electron tip of the electron gun is mechanically misaligned with the center axis of a anode and a focusing lens.