公开(公告)号：EP4002424A1

公开(公告)日：2022-05-25

申请号：EP21208217.6

申请日：2021-11-15

Applicant: Korea Basic Science Institute

Inventor： LEE, Sang Ju ,  CHOI, Myoung Choul ,  CHOI, Chang Min ,  HONG, Aram ,  BAEK, Ji Young

IPC: H01J49/14

Abstract: A mixed gas cluster ion beam generator may include a nozzle chamber to contain a first mixed gas which is a mixed gas that is a mix of a first gas and a second gas, a cluster nozzle to spray gas received from the nozzle chamber in a cluster form, an ionizer to ionize a gas cluster sprayed by the cluster nozzle, and an ion accelerator to emit an ion beam to the outside by accelerating the gas cluster ionized by the ionizer by generating a potential difference to the ionized gas cluster.