公开(公告)号：US20190235000A1

公开(公告)日：2019-08-01

申请号：US16332349

申请日：2016-10-27

Applicant: Korea Research Institute of Standards and Science

Inventor： Young-Pyo HONG ,  Hyunji KOO ,  No-Weon KANG ,  Dong-Joon LEE

IPC: G01R27/28 ,  G01R29/08 ,  G01R31/319 ,  H01L23/498 ,  G01R31/28

Abstract: An electromagnetic wave impedance measuring apparatus includes a network analyzer, configured to measure scattering parameters according to a frequency, including a first port and a second port; and a multilayer substrate, connected to the first port and the second port by a coaxial cable, having a via connecting conductive layers to each other and including three or more conductive layers including at least an uppermost layer, a lowermost layer, and an intermediate layer. The multilayer substrate includes a test sample disposed between the uppermost layer and the lowermost layer; a through calibration standard disposed between the uppermost layer and the lowermost layer; a reflect calibration standard disposed between the uppermost layer and the lowermost layer; and a line calibration standard disposed between the uppermost layer and the lowermost layer. Each of the test sample, the through calibration standard, the reflect calibration standard, and the line calibration standard is connected by a first error box, having the via, and a second error box having the via of the same structure as the via of the first error box.