Abstract:
A shaped photosensitive glass composition comprising silica, K2O, Na2O, Ag2O, B2O3, Al2O3, Li2O, and CeO2 with a high anisotropic-etch ratio formed by a novel construction method. Furthermore, such shaped glass structures can be used to form a negative mold for casting the shape in other materials. Structures of the photosensitive glass composition may include micro-channels, micro-optics, microposts, or arrays of hollow micro-needles.
Abstract translation:包含二氧化硅,K 2 O,Na 2 O,Ag 2 O,B 2 O 3,Al 2 O 3,Li 2 O和CeO 2的成形感光性玻璃组合物,通过新的构造方法形成的各向异性蚀刻率高。 此外,这种成形的玻璃结构可用于形成用于在其它材料中铸造形状的阴模。 感光玻璃组合物的结构可以包括微通道,微光学,微孔或中空微针阵列。
Abstract:
A method of fabrication and device made by preparing a photosensitive glass substrate comprising at least silica, lithium oxide, aluminum oxide, and cerium oxide, masking a design layout comprising one or more holes to form one or more electrical conduction paths on the photosensitive glass substrate, exposing at least one portion of the photosensitive glass substrate to an activating energy source, exposing the photosensitive glass substrate to a heating phase of at least ten minutes above its glass transition temperature, cooling the photosensitive glass substrate to transform at least part of the exposed glass to a crystalline material to form a glass-crystalline substrate and etching the glass-crystalline substrate with an etchant solution to form one or more angled channels that are then coated.