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1.发明公开
公开(公告)号：EP3019442A4
公开(公告)日：2017-01-25
申请号：EP14822259
申请日：2014-07-04
Applicant: MOTION ENGINE INC
Inventor： BOYSEL ROBERT MARK , ROSS LOUIS
CPC classification number: B81B7/007 , B81B2207/095 , B81B2207/096 , B81C1/00301 , H01L2224/94
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2.发明公开MEMS MOTION SENSOR AND METHOD OF MANUFACTURING 审中-公开MEMS-BEWEGUNGSSENSOR UND VERFAHREN ZUR HERSTELLUNG
公开(公告)号：EP3028007A4
公开(公告)日：2017-07-12
申请号：EP14831791
申请日：2014-08-01
Applicant: MOTION ENGINE INC
Inventor： BOYSEL ROBERT MARK , ROSS LOUIS
IPC: G01C19/5769 , B81B7/00 , G01P15/14 , G01P15/18
CPC classification number: G01C19/56 , G01C19/5769 , H01L2224/94
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