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9 records (took 0.023 seconds)

    1.
    发明专利
    未知

    公开(公告)号：DE69105447T2

    公开(公告)日：1995-07-13

    申请号：DE69105447

    申请日：1991-09-16

    Applicant: SEXTANT AVIONIQUE

    Inventor： THOMAS ISABELLE ,  LEFORT PIERRE OLIVIER

    IPC: G01P15/08 ,  G01P15/097 ,  G01P15/10 ,  G01P15/18

    Abstract: The invention relates to a micro-accelerometer with resonators which is sensitive to accelerations in a first direction, comprising, between two support plates, an etched interposed plate in order to comprise: a rectangular frame (10) whose sides extend along the first direction (x) and a second direction (y) perpendicular to the first, these directions being orthogonal to a third direction (z); a seismic mass (11) internal to the frame; two suspension bars (S1, S2) extending between the frame and the mass along the second direction, on either side of the mass, these bars having the same thickness as the mass and the frame along the third direction and a small width along the first direction; two resonator-forming elements (R1, R2) extending between the frame and the mass and having a small thickness along the third direction.

    2.
    发明专利
    未知

    公开(公告)号：DE69104430T2

    公开(公告)日：1995-05-24

    申请号：DE69104430

    申请日：1991-07-16

    Applicant: SEXTANT AVIONIQUE

    Inventor： THOMAS ISABELLE ,  LEFORT PIERRE OLIVIER

    IPC: G01L19/00 ,  G01L9/00 ,  H01L29/84

    Abstract: The present invention relates to a micro-pressure-sensor comprising, between two plates of insulating material: a lower silicon plate (3) forming a base plate; a middle silicon plate (2) constituting a membrane (11) surrounded by a frame (12), a first part (15) of a stud being formed in an off-centre location of the membrane; and an upper silicon plate (1) comprising a frame (17) corresponding to that of the middle plate, a second part (16) of the stud and a silicon leaf (18) constituting a resonator linking the top of the stud to an upper region of the frame. A measurement gap (13) is formed between the membrane and the lower plate, this gap comprising an access (14, 28), and the two insulating plates (4, 5) interacting with the periphery of the three silicon plates assembled so as to define a closed housing. … …

    3.
    发明专利
    未知

    公开(公告)号：DE69105447D1

    公开(公告)日：1995-01-12

    申请号：DE69105447

    申请日：1991-09-16

    Applicant: SEXTANT AVIONIQUE

    Inventor： THOMAS ISABELLE ,  LEFORT PIERRE OLIVIER

    IPC: G01P15/08 ,  G01P15/097 ,  G01P15/10 ,  G01P15/18

    Abstract: The invention relates to a micro-accelerometer with resonators which is sensitive to accelerations in a first direction, comprising, between two support plates, an etched interposed plate in order to comprise: a rectangular frame (10) whose sides extend along the first direction (x) and a second direction (y) perpendicular to the first, these directions being orthogonal to a third direction (z); a seismic mass (11) internal to the frame; two suspension bars (S1, S2) extending between the frame and the mass along the second direction, on either side of the mass, these bars having the same thickness as the mass and the frame along the third direction and a small width along the first direction; two resonator-forming elements (R1, R2) extending between the frame and the mass and having a small thickness along the third direction.

    7.
    发明专利
    未知

    公开(公告)号：FR2687783B1

    公开(公告)日：1994-05-20

    申请号：FR9202189

    申请日：1992-02-20

    Applicant: SEXTANT AVIONIQUE

    Inventor： THOMAS ISABELLE ,  LEFORT PIERRE OLIVIER

    IPC: G01L9/00 ,  G01L9/12 ,  G01L23/12 ,  G01D5/24 ,  H01L21/302 ,  H01L49/00

    Abstract: The present invention relates to a pressure microsensor consisting of a stack of three silicon wafers in contact, by their periphery, with the interposition of an insulating layer to define an internal cavity. The lower wafer (2) comprises a thinned region (21) forming a diaphragm, on the side of its inner face. The central wafer (1) comprises a peripheral region (11) forming a frame which is solidly attached to the upper and lower wafers by means of a silicon oxide layer (24, 25), a first contact area (13) mounted on the thinned region of the lower wafer, a second contact area (14) mounted on a thick region of the lower wafer, and a silicon reed (blade) (15) forming a resonator arranged between the upper faces of the first and second contact areas opposite the upper wafer (3). A first electrode (32) is connected to the upper wafer, a second electrode (33) to the frame and a third electrode (31) to the second contact area. … …

    9.
    发明专利
    未知

    公开(公告)号：DE69104430D1

    公开(公告)日：1994-11-10

    申请号：DE69104430

    申请日：1991-07-16

    Applicant: SEXTANT AVIONIQUE

    Inventor： THOMAS ISABELLE ,  LEFORT PIERRE OLIVIER

    IPC: G01L19/00 ,  G01L9/00 ,  H01L29/84

    Abstract: The present invention relates to a micro-pressure-sensor comprising, between two plates of insulating material: a lower silicon plate (3) forming a base plate; a middle silicon plate (2) constituting a membrane (11) surrounded by a frame (12), a first part (15) of a stud being formed in an off-centre location of the membrane; and an upper silicon plate (1) comprising a frame (17) corresponding to that of the middle plate, a second part (16) of the stud and a silicon leaf (18) constituting a resonator linking the top of the stud to an upper region of the frame. A measurement gap (13) is formed between the membrane and the lower plate, this gap comprising an access (14, 28), and the two insulating plates (4, 5) interacting with the periphery of the three silicon plates assembled so as to define a closed housing. … …

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