公开(公告)号：WO2010121121A2

公开(公告)日：2010-10-21

申请号：PCT/US2010031380

申请日：2010-04-16

Applicant: SI WARE SYSTEMS ,  MEDHAT MOSTAFA ,  NADA YASSEEN ,  MORTADA BASSEM ,  SAADANY BASSAM A

Inventor： MEDHAT MOSTAFA ,  NADA YASSEEN ,  MORTADA BASSEM ,  SAADANY BASSAM A

IPC: B81B3/00

CPC classification number: B81B3/0051 ,  B81B3/0037 ,  B81B2201/033 ,  B81B2203/0136 ,  B81B2203/051 ,  H02N1/008 ,  Y10T74/20558

Abstract: An electrostatic comb drive actuator for a MEMS device includes a flexure spring assembly and first and second comb drive assemblies, each coupled to the flexure spring assembly on opposing sides thereof. Each of the first and second comb assemblies includes fixed comb drive fingers and moveable comb drive fingers coupled to the flexure spring assembly and extending towards the fixed comb drive fingers. The comb drive fingers are divided equally between the first and second comb drive assemblies and placed symmetrically about a symmetry axis of the flexure spring assembly. When electrically energized, the moveable comb drive fingers of both the first and second comb drive assemblies simultaneously move towards the fixed comb drive fingers of the first and second comb drive assemblies.

Abstract translation: 用于MEMS器件的静电梳驱动致动器包括挠曲弹簧组件和第一和第二梳子驱动组件，每个组合驱动组件在其相对侧上与挠曲弹簧组件相连。 第一和第二梳组件中的每一个包括固定梳状驱动指状物和可移动梳状驱动指状物，其联接到挠性弹簧组件并朝向固定梳状驱动指状物延伸。 梳齿驱动指状物在第一和第二梳状驱动组件之间被均等分配，并且围绕挠性弹簧组件的对称轴对称地放置。 当通电时，第一和第二梳状驱动组件的可移动梳状驱动指状物同时朝向第一和第二梳状驱动组件的固定梳状驱动指状物移动。

公开(公告)号：SG175240A1

公开(公告)日：2011-11-28

申请号：SG2011075314

申请日：2010-04-16

Applicant: SI WARE SYSTEMS

Inventor： MEDHAT MOSTAFA ,  NADA YASSEEN ,  MORTADA BASSEM ,  SAADANY BASSAM A

Abstract: An electrostatic comb drive actuator for a MEMS device includes a flexure spring assembly and first and second comb drive assemblies, each coupled to the flexure spring assembly on opposing sides thereof. Each of the first and second comb assemblies includes fixed comb drive fingers and moveable comb drive fingers coupled to the flexure spring assembly and extending towards the fixed comb drive fingers. The comb drive fingers are divided equally between the first and second comb drive assemblies and placed symmetrically about a symmetry axis of the flexure spring assembly. When electrically energized, the moveable comb drive fingers of both the first and second comb drive assemblies simultaneously move towards the fixed comb drive fingers of the first and second comb drive assemblies.