MEMS MIRROR DRIVEN BY DUAL PULSE DRIVE SIGNAL

    公开(公告)号:US20190101744A1

    公开(公告)日:2019-04-04

    申请号:US15722444

    申请日:2017-10-02

    Abstract: Described herein is a device including mirror control circuitry for controlling a movable mirror. The mirror control circuitry includes drive circuitry for providing a drive signal to the movable mirror, and a processor. The processor cause the drive circuitry to generate the drive signal so as to have pulses with leading edges occurring an offset period of time after a maximum opening angle of the movable mirror and trailing edges occurring an offset period of time before a zero crossing of the movable mirror. The processor may sample a mirror sense signal from the movable mirror at times at which a derivative of capacitance of the movable mirror with respect to time is zero, and then perform an action based upon the samples.

    MEMS mirror driven by dual pulse drive signal

    公开(公告)号:US11681140B2

    公开(公告)日:2023-06-20

    申请号:US16855301

    申请日:2020-04-22

    CPC classification number: G02B26/0833

    Abstract: Mirror control circuitry operates to control a movable mirror. The mirror control circuitry includes drive circuitry for providing a drive signal to the movable mirror, and a processor. The processor causes the drive circuitry to generate the drive signal so as to have pulses with leading edges occurring an offset period of time after a maximum opening angle of the movable mirror and trailing edges occurring an offset period of time before a zero crossing of the movable mirror. The processor may sample a mirror sense signal from the movable mirror at times at which a derivative of capacitance of the movable mirror with respect to time is zero, and then perform an action based upon the samples.

    MEMS mirror driven by dual pulse drive signal

    公开(公告)号:US10684465B2

    公开(公告)日:2020-06-16

    申请号:US15722444

    申请日:2017-10-02

    Abstract: Described herein is a device including mirror control circuitry for controlling a movable mirror. The mirror control circuitry includes drive circuitry for providing a drive signal to the movable mirror, and a processor. The processor cause the drive circuitry to generate the drive signal so as to have pulses with leading edges occurring an offset period of time after a maximum opening angle of the movable mirror and trailing edges occurring an offset period of time before a zero crossing of the movable mirror. The processor may sample a mirror sense signal from the movable mirror at times at which a derivative of capacitance of the movable mirror with respect to time is zero, and then perform an action based upon the samples.

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