公开(公告)号：EP4187258A1

公开(公告)日：2023-05-31

申请号：EP22206006.3

申请日：2022-11-08

Applicant: STMicroelectronics S.r.l.

Inventor： GATTERE, Gabriele ,  RIZZINI, Francesco ,  DALL'OGLIO, Cristian

IPC: G01P15/125 ,  G01P15/08

Abstract: A microelectromechanical sensor device has a detection structure (10), having: a substrate (13), with a top surface (13a); an inertial mass (12), suspended above the top surface (13a) of the substrate (13) and elastically coupled to a rotor anchor (15) so as to perform an inertial movement relative to the substrate (13) as a function of a quantity to be detected; and stator electrodes (18a, 18b), integrally coupled to the substrate (13) at respective stator anchors (19a, 19b) and capacitively coupled to the inertial mass (12) so as to generate a differential capacitive variation in response to, and indicative of, the quantity to be detected. In particular, the inertial mass (12) performs, as the inertial movement, a translation movement along a vertical axis (z) orthogonal to the top surface (13a) of the substrate (13); and the stator electrodes (18a, 18b) are arranged in a suspended manner above the top surface (13a) of the substrate (13).