CLOSED-LOOP POSITION CONTROL OF MEMS MICROMIRRORS

    公开(公告)号:EP4009312A1

    公开(公告)日:2022-06-08

    申请号:EP21208720.9

    申请日:2021-11-17

    Abstract: Disclosed herein is a control system (10) for a projection system (17), including a first subtractor (12) receiving an input drive signal (INPUT) and a feedback signal (FBK) and generating a first difference signal (DIFF1) therefrom, the feedback signal being indicative of position of a quasi-static micromirror (19b) of the projection system. A type-2 compensator (15a) receives the first difference signal (DIFF1) and generates therefrom a first output signal (OUT1). A derivative based controller (15b) receives the feedback signal (FBK) and generates therefrom a second output signal (OUT2) . A second subtractor (16) receives the first (OUT1) and second (OUT2) output signals and generates a second difference signal (DIFF2) therefrom. The second difference signal serves to control a mirror driver (19a) of the projection system. A higher order resonance equalization circuit (20) receives a pre-output signal from an analog front end (19c) of the projection system that is indicative of position of the quasi-static micromirror (19b), and generates the feedback signal (FBK) therefrom.

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