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公开(公告)号：US11933968B2
公开(公告)日：2024-03-19
申请号：US17964672
申请日：2022-10-12
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' Boni , Roberto Carminati , Massimiliano Merli
CPC classification number: G02B26/0858 , G02B26/101 , G03B21/008 , H02N2/028
Abstract: A microelectromechanical (MEMS) structure includes a fixed frame internally defining a cavity, and a mobile mass suspended in the cavity and movable with a first resonant rotational mode about a first rotation axis and with a second resonant rotational mode about a second rotation axis orthogonal to the first. A pair of supporting elements extends in the cavity, is rigidly coupled to the fixed frame, and is elastically deformable to cause rotation of the mobile mass about the first rotation axis. A pair of elastic-coupling elements is elastically coupled between the mobile mass and the first pair of supporting elements. Each of the elastic-coupling elements includes a first and second elastic portions, the first elastic portion being compliant to torsion about the second rotation axis. The second elastic portion is compliant to bending outside of a horizontal plane of main extension of the MEMS structure.
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公开(公告)号：US11655140B2
公开(公告)日：2023-05-23
申请号：US17126929
申请日：2020-12-18
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' Boni , Roberto Carminati , Massimiliano Merli
CPC classification number: B81B3/0072 , B81B3/0021 , G02B26/0858 , G03B21/008 , H01L41/09 , H04N9/3152 , B81B2201/042
Abstract: A micro-electro-mechanical device is formed by a fixed structure having a cavity. A tiltable structure is elastically suspended over the cavity and has a main extension in a tiltable plane and is rotatable about a rotation axis parallel to the tiltable plane. A piezoelectric actuation structure includes first and second driving arms carrying respective piezoelectric material regions and extending on opposite sides of the rotation axis. The first and the second driving arms are rigidly coupled to the fixed structure and are elastically coupled to the tiltable structure. During operation, a stop structure limits movements of the tiltable structure with respect to the actuation structure along a planar direction perpendicular to the rotation axis. The stop structure has a first planar stop element formed between the first driving arm and the tiltable structure and a second planar stop element formed between the second driving arm and the tiltable structure.
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公开(公告)号：US12222492B2
公开(公告)日：2025-02-11
申请号：US17487166
申请日：2021-09-28
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' Boni , Roberto Carminati , Massimiliano Merli
Abstract: A microelectromechanical device includes a fixed structure having a frame defining a cavity, a tiltable structure elastically suspended above the cavity with main extension in a horizontal plane, a piezoelectrically driven actuation structure which can be biased to cause a desired rotation of the tiltable structure about a first and second rotation axes, and a supporting structure integral with the fixed structure and extending in the cavity starting from the frame. Lever elements are elastically coupled to the tiltable structure at a first end by elastic suspension elements and to the supporting structure at a second end by elastic connecting elements which define a lever rotation axis. The lever elements are elastically coupled to the actuation structure so that their biasing causes the desired rotation of the tiltable structure about the first and second rotation axes.
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4.发明授权公开(公告)号：US12209008B2
公开(公告)日：2025-01-28
申请号：US17752016
申请日：2022-05-24
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' Boni , Gabriele Gattere , Manuel Riani , Roberto Carminati
IPC: B81B3/00
Abstract: A MEMS actuator includes a mobile mass suspended over a substrate in a first direction and extending in a plane that defines a second direction and a third direction perpendicular thereto. Elastic elements arranged between the substrate and the mobile mass have a first compliance in a direction parallel to the first direction that is lower than a second compliance in a direction parallel to the second direction. Piezoelectric actuation structures have a portion fixed with respect to the substrate and a portion that deforms in the first direction in response to an actuation voltage. Movement-transformation structures coupled to the piezoelectric actuation structures include an elastic movement-conversion structure arranged between the piezoelectric actuation structures and the mobile mass. The elastic movement-conversion structure is compliant in a plane formed by the first and second directions and has first and second principal axes of inertia transverse to the first and second directions.
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公开(公告)号：US11933966B2
公开(公告)日：2024-03-19
申请号：US17715639
申请日：2022-04-07
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto Carminati , Nicolo' Boni , Massimiliano Merli
CPC classification number: G02B26/0858 , B81B3/0021 , B81B2201/042
Abstract: Disclosed herein is a method of making a microelectromechanical (MEMS) device. The method includes, in a single structural layer, affixing a tiltable structure to an anchorage portion with first and second supporting arms extending between the anchorage portion and opposite sides of the tiltable structure, and forming first and second resonant piezoelectric actuation structures extending between a constraint portion of the first supporting arm and the anchorage portion, on opposite sides of the first supporting arm. The method further includes coupling a handling wafer underneath the structural layer to define a cavity therebetween, and forming a passivation layer over the structural layer, the passivation layer having contact openings defined therein for routing metal regions for electrical coupling to respective electrical contact pads, the electrical contact pads being electrically connected to the first and second resonant piezoelectric actuation structures.
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Patent Agency Ranking
公开(公告)号：US11327295B2
公开(公告)日：2022-05-10
申请号：US16830920
申请日：2020-03-26
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto Carminati , Nicolo' Boni , Massimiliano Merli
Abstract: A MEMS device is formed in a die of semiconductor material having a cavity defined therein and having an anchorage portion. A tiltable structure is elastically suspended over the cavity and has a main extension in a horizontal plane. First and second supporting arms extend between the anchorage portion and opposite sides of the tiltable structure. First and second resonant piezoelectric actuation structures are intended to be biased to thereby cause rotation of the tiltable structure about a rotation axis. The first supporting arm is formed by first and second torsion springs, which are rigid to movements out of the horizontal plane and compliant to torsion about the rotation axis and are coupled together at a constraint region. The first and second resonant piezoelectric actuation structures extend between the anchorage portion and the constraint structure, on first and second sides of the first supporting arm.
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公开(公告)号：US12084341B2
公开(公告)日：2024-09-10
申请号：US17499297
申请日：2021-10-12
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' Boni , Lorenzo Vinciguerra , Roberto Carminati , Massimiliano Merli
CPC classification number: B81B3/0072 , B81C1/00182 , B81C1/00198 , B81B2203/033 , B81C2201/019
Abstract: A MEMS device is formed by a body of semiconductor material which defines a support structure. A pass-through cavity in the body is surrounded by the support structure. A movable structure is suspended in the pass-through cavity. An elastic structure extends in the pass-through cavity between the support structure and the movable structure. The elastic structure has a first and second portions and is subject, in use, to mechanical stress. The MEMS device is further formed by a metal region, which extends on the first portion of the elastic structure, and by a buried cavity in the elastic structure. The buried cavity extends between the first and the second portions of the elastic structure.
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公开(公告)号：US12043540B2
公开(公告)日：2024-07-23
申请号：US18134381
申请日：2023-04-13
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' Boni , Roberto Carminati , Massimiliano Merli
CPC classification number: B81B3/0072 , B81B3/0021 , G02B26/0858 , G03B21/008 , H04N9/3152 , H10N30/20 , B81B2201/042
Abstract: This disclosure pertains to a microelectromechanical systems (MEMS) device with a tiltable structure, a fixed supporting structure, and an actuation structure with driving arms connected to the tiltable structure by elastic decoupling elements. Described herein, particularly, is a planar stop structure between the driving arms and the tiltable structure, which functions to limit movement in the tiltable plane. This stop structure includes a first projection/abutment surface pair formed by a projection extending from a driving arm and an abutment surface formed by a recess in the tiltable structure. The projection and abutment surface are adjacent and spaced apart in the device's rest condition.
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公开(公告)号：US11953813B2
公开(公告)日：2024-04-09
申请号：US18134671
申请日：2023-04-14
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' Boni , Roberto Carminati , Massimiliano Merli
CPC classification number: G03B21/008 , B81B3/0021 , G02B26/0858 , G02B26/105 , G03B21/28 , B81B2201/032 , B81B2201/042 , B81B2203/0118 , B81B2203/0315 , B81B2203/04 , B81B2203/058
Abstract: Disclosed herein is a microelectromechanical device that features a fixed structure defining a cavity, a tiltable structure elastically suspended within the cavity, and a piezoelectrically driven actuation structure that rotates the tiltable structure about a first rotation axis. The actuation structure includes driving arms with piezoelectric material, elastically coupled to the tiltable structure by decoupling elastic elements that are stiff to out-of-plane movements but compliant to torsional movements. The tiltable structure is elastically coupled to the fixed structure at the first rotation axis using elastic suspension elements, while the fixed structure forms a frame surrounding the cavity with supporting elements. A lever mechanism is coupled between a supporting element and a driving arm.
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10.发明授权公开(公告)号：US11353694B2
公开(公告)日：2022-06-07
申请号：US17121961
申请日：2020-12-15
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' Boni , Roberto Carminati , Massimiliano Merli
Abstract: A microelectromechanical mirror device has a fixed structure defining a cavity. A tiltable structure carrying a reflecting surface is elastically suspended above the cavity with a main extension in a horizontal plane. Elastic elements are coupled to the tiltable structure and at least one first pair of driving arms, which carry respective regions of piezoelectric material, are biasable to cause rotation of the tiltable structure about at least one first axis of rotation parallel to a first horizontal axis of the horizontal plane. The driving arms are elastically coupled to the tiltable structure on opposite sides of the first axis of rotation and are interposed between the tiltable structure and the fixed structure. The driving arms have a thickness, along an orthogonal axis transverse to the horizontal plane, smaller than a thickness of at least some of the elastic elements coupled to the tiltable structure.
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