公开(公告)号：EP4223691A1

公开(公告)日：2023-08-09

申请号：EP23153332.4

申请日：2023-01-25

Applicant: STMicroelectronics S.r.l.

Inventor： OPRENI, Andrea ,  ZEGA, Valentina ,  FRANGI, Attilio ,  GATTERE, Gabriele ,  RIANI, Manuel

IPC: B81B3/00

Abstract: MEMS actuator (20) including: a substrate (21); a first and a second semiconductive layer (31,32); a frame (27) including transverse regions (62) formed by the second semiconductive layer (32), elongated parallel to a first direction (X) and offset along a second direction (Y), the frame (27) being movable parallel to the second direction (Y). The MEMS actuator (20) includes, for each transverse region (62): corresponding front rotor regions (65), which are fixed to the transverse region (62) and are suspended above the substrate (21); a first and a second stator region (70,72), which are formed by the first semiconductive layer (31) in such a way that, when the frame (27) is in rest position, the transverse region (62) is laterally offset with respect to the first and the second stator regions (70,72) and a first front rotor region (65') partially faces the first stator region (70), and in such a way that, during a translation of the frame (27) along the second direction (Y), the first and/or a second front rotor region (65', 65") at least partially face the second stator region (72), when the transverse region (62) begins to superimpose on the first stator region (70).

公开(公告)号：EP4152010A1

公开(公告)日：2023-03-22

申请号：EP22195322.7

申请日：2022-09-13

Applicant: STMicroelectronics S.r.l.

Inventor： ZEGA, Valentina ,  GATTERE, Gabriele ,  FRANGI, Attilio ,  OPRENI, Andrea ,  RIANI, Manuel

IPC: G01P15/097 ,  G01P15/08

Abstract: A detection structure (1) for a vertical-axis resonant accelerometer (32) is provided with: an inertial mass (2), suspended above a substrate (8) and having a window (5) provided therewithin and traversing it throughout a thickness thereof, the inertial mass (2) being coupled to a main anchorage (4), arranged in the window and integral with the substrate, through a first and a second anchoring elastic element (6a, 6b) of a torsional type and defining a rotation axis (A) of the inertial mass, such that they allow the inertial mass an inertial movement of rotation in response to an external acceleration (a ext ) acting along a vertical axis (z); and at least a first resonator element (10a), having longitudinal extension, coupled between the first elastic element and a first constraint element (12a) arranged in the window. The first constraint element is suspended above the substrate, to which it is fixedly coupled through a first auxiliary anchoring element (14a) which extends below the first resonator element with longitudinal extension and is integrally coupled between the first constraint element and the main anchorage (4).