公开(公告)号：EP3809476A1

公开(公告)日：2021-04-21

申请号：EP20200134.3

申请日：2020-10-05

Applicant: STMicroelectronics S.r.l.

Inventor： SEGHIZZI, Luca ,  VERCESI, Federico ,  PEDRINI, Claudia

IPC: H01L41/08 ,  B06B1/06 ,  B41J2/14 ,  B81B3/00 ,  F04B43/04 ,  H01L41/09 ,  H01L41/113 ,  H01L41/31 ,  H04R17/00

Abstract: A transducer (1; 20'; 20") comprising: a supporting body (8); a suspended structure (2; 22), mechanically coupled to the supporting body (8), having a first and a second surface (2a, 2b; 22a, 22b) opposite to one another along an axis (Z), and configured to oscillate in an oscillation direction having at least one component parallel to said axis (Z); a first piezoelectric transducer (4), which extends over the first surface (2a; 22a) of the suspended structure (2; 22); and a second piezoelectric transducer (6), which extends over the second surface (2b; 22b) of the suspended structure (2; 22).