公开(公告)号：EP3741566A1

公开(公告)日：2020-11-25

申请号：EP20176121.0

申请日：2020-05-22

Applicant: STMicroelectronics S.r.l.

Inventor： GIUSTI, Domenico ,  COLECCHIA, Andrea Nicola ,  SANTORUVO, Gaetano

IPC: B41J2/02 ,  B41J2/14 ,  B41J2/16 ,  B41J2/025 ,  B41J2/03 ,  B41J2/11

Abstract: A microfluidic device for continuous ejection of fluids, including: a semiconductor body (3) that laterally delimits the chambers (4; 904; 1004); an intermediate structure (5), which forms the membranes (15), each of which delimits a corresponding chamber at the top; and a nozzle body (200), which overlies the intermediate structure. The device includes, for each chamber: a corresponding piezoelectric actuator (20); a supply channel (40), which traverses the intermediate structure and communicates with the chamber; and a nozzle (240), which traverses the nozzle body and communicates with the supply channel. Each actuator can be controlled so as to operate i) in a resting condition such that the pressure of a fluid within the corresponding chamber is equal to a value such that the fluid passes through the supply channel and is ejected from the nozzle in the form of a continuous stream, and ii) in an active condition, where it causes a deformation of the corresponding membrane and a consequent variation of the pressure of the fluid, causing a temporary interruption of the continuous stream.