公开(公告)号：EP4269949A2

公开(公告)日：2023-11-01

申请号：EP23162780.3

申请日：2023-03-20

Applicant: STMicroelectronics Inc. ,  STMicroelectronics S.r.l.

Inventor： HU, Yamu ,  SAHOO, Naren K ,  NALLAMOTHU, Pavan ,  FANG, Deyou ,  MCCLURE, David ,  GARBARINO, Marco

IPC: G01C25/00

Abstract: At start-up of a microelectromechanical system (MEMS) gyroscope, the drive signal is inhibited, and the phase, frequency and amplitude of any residual mechanical oscillation is sensed and processed to determine a process path for start-up. In the event that the sensed frequency of the residual mechanical oscillation is a spurious mode frequency and a quality factor of the residual mechanical oscillation is sufficient, an anti-phase signal is applied as the MEMS gyroscope drive signal in order to implement an active dampening of the residual mechanical oscillation. A kicking phase can then be performed to initiate oscillation. Also, in the event that the sensed frequency of the residual mechanical oscillation is a resonant mode frequency with sufficient drive energy, a quadrature phase signal with phase lock loop frequency control and amplitude controlled by the drive energy is applied as the MEMS gyroscope drive signal in order to induce controlled oscillation.

公开(公告)号：EP4269949A3

公开(公告)日：2024-04-10

申请号：EP23162780.3

申请日：2023-03-20

Applicant: STMicroelectronics Inc. ,  STMicroelectronics S.r.l.

Inventor： HU, Yamu ,  SAHOO, Naren K ,  NALLAMOTHU, Pavan ,  FANG, Deyou ,  MCCLURE, David ,  GARBARINO, Marco

IPC: G01C25/00

Abstract: At start-up of a microelectromechanical system (MEMS) gyroscope, the drive signal is inhibited, and the phase, frequency and amplitude of any residual mechanical oscillation is sensed and processed to determine a process path for start-up. In the event that the sensed frequency of the residual mechanical oscillation is a spurious mode frequency and a quality factor of the residual mechanical oscillation is sufficient, an anti-phase signal is applied as the MEMS gyroscope drive signal in order to implement an active dampening of the residual mechanical oscillation. A kicking phase can then be performed to initiate oscillation. Also, in the event that the sensed frequency of the residual mechanical oscillation is a resonant mode frequency with sufficient drive energy, a quadrature phase signal with phase lock loop frequency control and amplitude controlled by the drive energy is applied as the MEMS gyroscope drive signal in order to induce controlled oscillation.

公开(公告)号：EP4170356A1

公开(公告)日：2023-04-26

申请号：EP22200494.7

申请日：2022-10-10

Applicant: STMicroelectronics S.r.l. ,  STMicroelectronics Inc.

Inventor： GARBARINO, Marco ,  CHOI, Davy ,  RIZZINI, Francesco ,  HU, Yamu

IPC: G01P21/00 ,  G01P15/125 ,  G01P15/18 ,  G01P15/08

Abstract: A microelectromechanical system (MEMS) accelerometer sensor (12x, 12y, 12z) has a mobile mass and a sensing capacitor. To self-test the sensor, a test signal having a variably controlled excitation voltage and a fixed pulse width is applied to the sensing capacitor. The leading and trailing edges of the test signal are aligned to coincide with reset phases of a sensing circuit (32-36) coupled to the sensing capacitor. The variably controlled excitation voltage of the test signal is configured to cause an electrostatic force which produces a desired physical displacement of the mobile mass. During a read phase of the sensing circuit, a variation in capacitance of sensing capacitor due to the actual physical displacement of the mobile mass is sensed for comparison to the desired physical displacement.

公开(公告)号：EP3185416B1

公开(公告)日：2020-01-01

申请号：EP16175666.3

申请日：2016-06-22

Applicant: STMicroelectronics S.r.l.

Inventor： NICOLLINI, Germano ,  GARBARINO, Marco

IPC: H03F3/70 ,  H03F3/45 ,  G01C19/5776 ,  H03K5/1536

公开(公告)号：EP4400808A1

公开(公告)日：2024-07-17

申请号：EP24150665.8

申请日：2024-01-08

Applicant: STMicroelectronics S.r.l.

Inventor： GATTERE, Gabriele ,  GARBARINO, Marco

IPC: G01C19/5726 ,  G01C19/5776

CPC classification number: G01C19/5726 ,  G01C19/5776

Abstract: Driving circuit for a driving resonator stage (4) of a MEMS gyroscope (1) including at least a first and a second electrode (31,32) and a movable mass (20), the driving circuit (3A,3B) including: a synchronization stage (16) which receives an electrical position signal (sPOS1) indicative of the position of the movable mass (20) and generates a reference signal (sLOCK') phase- and frequency-locked with the electrical position signal (sPOSl); a driving stage (2) which generates, on the basis of the reference signal (sLOCK'), a first and a second driving signal (D1,D2), which are applied to the first and, respectively, the second electrodes (31,32), so that the movable mass (20) is subject to a first and a second electrostatic force which cause the movable mass (20) to oscillate. Each of the first and the second driving signals (Dl,D2) comprises, for each period of the reference signal (sLOCK'), a corresponding pulse, the pulses of the first and the second driving signals (Dl,D2) being temporally alternated and having a same duration (α*T0), the ratio (α) between the duration and the period (T0) of the reference signal (sLOCK') falling in the range [0.3-0.37] or in the range [0.63-0.7].

公开(公告)号：EP3185416A1

公开(公告)日：2017-06-28

申请号：EP16175666.3

申请日：2016-06-22

Applicant: STMicroelectronics S.r.l.

Inventor： NICOLLINI, Germano ,  GARBARINO, Marco

IPC: H03F3/70 ,  G01C19/5726 ,  H03F3/45

Abstract: An electronic circuit for amplifying signals with two components in phase quadrature, which includes: a feedback amplifier (2) with a feedback capacitor (C r1 ); a switch (RESET1) that drives charging and discharging of the feedback capacitor (C r1 ) ; an additional capacitor (C RES1 ) ; and a coupling circuit (RD1, RD2), which alternatively connects the additional capacitor (C RES1 ) in parallel to the feedback capacitor (C r1 ) or else decouples the additional capacitor (C RES1 ) from the feedback capacitor (C r1 ). The switch (RESET1) opens at a first instant (t 2 ), where a first one of the two components assumes a first zero value; the coupling circuit decouples the additional capacitor (C RES1 ) from the feedback capacitor (C r1 ) in a way synchronous with a second instant (t 3 ), where the first component assumes a second zero value.

Abstract translation: 一种用于以相位正交的两个分量来放大信号的电子电路，其包括：具有反馈电容器（Cr1）的反馈放大器（2）; 驱动反馈电容器（Cr1）的充电和放电的开关（RESET1）; 一个额外的电容器（CRES1）; 和耦合电路（RD1，RD2），其交替地将附加电容器（CRES1）并联连接至反馈电容器（Cr1），或者将附加电容器（CRES1）与反馈电容器（Cr1）去耦合。 开关（RESET1）在第一时刻（t2）打开，其中两个分量中的第一个分量呈现第一零值; 耦合电路以与第二时刻（t3）同步的方式将附加电容器（CRES1）与反馈电容器（Cr1）分离，其中第一分量呈现第二零值。