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    Microelectromechanical device having an oscillating mass, and method for controlling a microelectromechanical device having an oscillating mass
    3.
    发明公开
    Microelectromechanical device having an oscillating mass, and method for controlling a microelectromechanical device having an oscillating mass 有权
    有用于控制微机电装置具有振动质量的振动的质量和方法的微电子机械设备

    公开(公告)号：EP2336717A1

    公开(公告)日：2011-06-22

    申请号：EP10195871.8

    申请日：2010-12-20

    Applicant: STMicroelectronics Srl

    Inventor： Rizzo Piazza Roncoroni, Alessandra Maria ,  Caminada, Carlo ,  Prandi, Luciano

    IPC: G01C19/56 ,  H03L3/00 ,  H03L7/099

    CPC classification number: H03B5/30 ,  G01C19/56 ,  H03L3/00

    Abstract: A microelectromechanical device includes a body (2a), a movable mass (2b), elastically connected to the body (6; 106) and movable in accordance with a degree of freedom, and a driving device (6), coupled to the movable mass (2b) and configured to maintain the movable mass (2b) in oscillation at a steady working frequency ( ω D ) in a normal operating mode. The microelectromechanical device moreover includes a start-up device (7, 8, 10), which is activatable in a start-up operating mode and is configured to compare a current oscillation frequency ( ω A ) of a first signal (CK A ) correlated to oscillation of the movable mass (2b) with a reference frequency ( ω R ), and for deciding, on the basis of the comparison between the current oscillation frequency ( ω A ) and the reference frequency ( ω R ), whether to supply to the movable mass (2b) a forcing signal packet (V F ) so as to transfer energy to the movable mass (2b).

    Abstract translation: 一种微机电装置，包括本体（2a）中，可动质量块（2b）弹性地连接到所述主体（6; 106）和可移动的雅舞蹈的自由度，以及驱动装置（6）联接到所述可移动质量 （2b）和配置成用于维持振荡运动质量块（2b）的在正常操作模式中的稳定工作频率（E D）。 所述微机电装置更上方包括启动装置（7,8，10），所有这些是在起动操作模式激活，并且被配置来比较相关联的当前振荡频率的第一信号的（E A）（CK A） 到可动质量块（2b）与参考频率（E R）的振荡，并且用于决定，在当前振荡频率（E A）和参考频率（E R）是否提供给之间的比较的基础上 运动质量块（2b）的一个加力信号包（V F），从而能转移到可动质量块（2b）。

    Microelectromechanical gyroscope with calibrated synchronization of actuation and method for actuating a microelectromechanical gyroscope
    6.
    发明公开
    Microelectromechanical gyroscope with calibrated synchronization of actuation and method for actuating a microelectromechanical gyroscope 有权
    微机电陀螺仪与校准致动同步和操作微机电陀螺仪的方法

    公开(公告)号：EP2360448A1

    公开(公告)日：2011-08-24

    申请号：EP11154596.8

    申请日：2011-02-15

    Applicant: STMicroelectronics Srl

    Inventor： Prandi, Luciano ,  Caminada, Carlo ,  Rizzo Piazza Roncoroni, Alessandra Maria

    IPC: G01C19/56

    CPC classification number: G01C19/56 ,  G01C19/5726 ,  G01C19/5762

    Abstract: A gyroscope includes a body (6), a driving mass (7), which is mobile according to a driving axis (X), and a sensing mass (8), which is driven by the driving mass (7) and is mobile according to a sensing axis (Y), in response to rotations of the body (6). A driving device (3) forms a microelectromechanical control loop (18) with the body (6) and the driving mass (7) and maintains the driving mass (7) in oscillation with a driving frequency (ω D ). The driving device (3) comprises a frequency detector (25), which supplies a clock signal (CK N ) at the frequency of oscillation of the driving mass (7), and a synchronization stage (29), which applies a calibrated phase shift (Δϕ) to the clock signal (CK N ) so as to compensate a phase shift caused by components (20, 21, 22) of the loop (18) that are set between the driving mass (7) and the control node (25a).

    Abstract translation: 陀螺仪包括一本体（6），驱动质量块（7），其是移动雅丁到驱动轴线（X），和感测质量块（8），其由驱动质量块（7）驱动并且是移动雅丁 到感测轴（Y），响应于所述主体的旋转（6）。 的驱动装置（3）形成微机电控制回路（18）与主体（6）和所述驱动质量块（7）和在振荡用的驱动频率（E D）保持驱动质量块（7）。 驱动装置（3）包括一个频率检测器（25），其在所述驱动质量块（7），和一个同步级（29）的振荡频率提供一个时钟信号（CK N）施加一校准的相移 （“O），以该时钟信号（CK N），以便补偿（18）没有被驱动质量块之间设定的回路（7）和所述控制结点的相移由部件引起的（20，21，22）（ 25A）。

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