公开(公告)号：JPH08105830A

公开(公告)日：1996-04-23

申请号：JP26842794

申请日：1994-10-06

Applicant: TOA ELECTRONICS

Inventor： SASAKURA MITSURU ,  UMEMOTO MASAO ,  UJIHIRA YUSUKE ,  KOYANO KIYOSHI

IPC: G01N5/02

Abstract: PURPOSE: To accurately measure humidity with good linearity and high sensitivity by eliminating a memory effect by a constitution wherein a polymer containing a nigrosine and a cellulose is used as a humidity-sensitive film. CONSTITUTION: A quartz vibration humidity sensor 1 is so constituted that electrodes 4 of gold or the like are vaporized on both faces of an AT-cut type quartz vibrator and a humidity-sensitive film 6 is formed on that. A polymer containing a cellulose as a hydrophilic compound and a nigrosine as a hydrophobic compound is used for the humidity-sensitive film 6. The nigrosine is of the hydrophilic compound used as a pigment represented by a specific chemical formula. The cellulose can be one represented by a specific chemical formula or its derivative, e.g. a fatty acid cellulose triester such as cellulose acetate, a mixture compound or an ethyl cellulose is used. The film having the ethyl cellulose and nigrosine causes a good result.