公开(公告)号：WO2015095861A1

公开(公告)日：2015-06-25

申请号：PCT/US2014/071839

申请日：2014-12-22

Applicant: ZOLO TECHNOLOGIES, INC.

Inventor： MASTERSON, Bernard P. ,  ESTES, Michael John ,  SAPPEY, Andrew D.

IPC: F23N5/08

CPC classification number: F23N5/082 ,  F23M11/042 ,  F23N5/24 ,  F23N2031/00 ,  G01N21/15 ,  G01N21/39 ,  G01N21/716 ,  G01N2021/151 ,  G01N2021/152 ,  G01N2021/399 ,  G01N2021/8416 ,  G01N2201/066 ,  G01N2201/0826 ,  G01N2201/0833

Abstract: A method of monitoring blockage of a sight tube attached to a wall of a process chamber, the sight tube being operatively associated with a TDLAS optical head with a window between the sight tube and the TDLAS optical head. The method includes the steps of providing a photo sensor in the TDLAS optical head, the photo sensor being positioned to receive light emitted by a light emitting process within the process chamber. An emission signal produced by light emitted by the light emitting process within the process chamber being received by the photo sensor is monitored. A determination is made if the emission signal is degrading.

Abstract translation: 监测附着在处理室的壁上的观察器的阻塞的方法，所述瞄准镜可操作地与TDLAS光学头相关联，在视线管和TDLAS光学头之间具有窗口。 该方法包括以下步骤：在TDLAS光头中提供光传感器，光传感器被定位成接收由处理室内的发光过程发射的光。 监视由光传感器接收的由处理室内的发光处理发出的光产生的发射信号。 如果发射信号降级，则确定。

公开(公告)号：EP3084306A1

公开(公告)日：2016-10-26

申请号：EP14872360.4

申请日：2014-12-22

Applicant: Zolo Technologies, Inc.

Inventor： MASTERSON, Bernard P. ,  ESTES, Michael John ,  SAPPEY, AndrewD.

IPC: F23N5/08

CPC classification number: F23N5/082 ,  F23M11/042 ,  F23N5/24 ,  F23N2031/00 ,  G01N21/15 ,  G01N21/39 ,  G01N21/716 ,  G01N2021/151 ,  G01N2021/152 ,  G01N2021/399 ,  G01N2021/8416 ,  G01N2201/066 ,  G01N2201/0826 ,  G01N2201/0833

Abstract: A method of monitoring blockage of a sight tube attached to a wall of a process chamber, the sight tube being operatively associated with a TDLAS optical head with a window between the sight tube and the TDLAS optical head. The method includes the steps of providing a photo sensor in the TDLAS optical head, the photo sensor being positioned to receive light emitted by a light emitting process within the process chamber. An emission signal produced by light emitted by the light emitting process within the process chamber being received by the photo sensor is monitored. A determination is made if the emission signal is degrading.