公开(公告)号：EP2386118A1

公开(公告)日：2011-11-16

申请号：EP10729457.1

申请日：2010-01-06

Applicant: 1366 Technologies Inc.

Inventor： SACHS, Emanuel, M. ,  WALLACE, Richard, L. ,  BREDT, James, F. ,  POLITO, Benjamin, F. ,  ERSEN, Ali

IPC: H01L31/00

CPC classification number: H01L31/022425 ,  H01L21/6715 ,  Y02E10/50

Abstract: Materials that contain liquid are deposited into grooves upon a surface of a work piece, such as a silicon wafer to form a solar cell. Liquid can be dispensed into work piece paths, such as grooves under pressure through a dispensing tube. The tube mechanically tracks in the groove. The tube may be small and rest at the groove bottom, with the sidewalls providing restraint. Or it may be larger and ride on the top edges of the groove. A tracking feature, such as a protrusion, Non-circular cross-sections, molded-on protrusions and lobes also enhance tracking. The tube may be forced against the groove by spring or magnetic loading. Alignment guides, such as lead-in features may guide the tube into the groove. Restoring features along the path may restore a wayward tube. Many tubes may be used. Many work pieces can be treated in a line or on a drum.