公开(公告)号：WO2006113208A2

公开(公告)日：2006-10-26

申请号：PCT/US2006/013304

申请日：2006-04-10

Applicant: ASYST TECHNOLOGIES, INC. ,  ELLIS, Raymond ,  WAGNER, Evzen

Inventor： ELLIS, Raymond ,  WAGNER, Evzen

IPC: G06F19/00

CPC classification number: G06Q10/10

Abstract: A method and apparatus are disclosed for improving the implementation of automated job management for equipment in a factory. A software library is provided that allows a job management client, such as a thin station controller client, to communicate with an equipment server, such as an equipment interface bridge (EIB). The job management client can create, control and monitor jobs conveniently and efficiently utilizing industry standard protocols. The equipment server communicates directly in real-time with factory equipment. By providing an interface between a job management client and an equipment server, data consumer clients are effectively decoupled from job management clients, allowing next generation station controllers for monitoring and controlling equipment processing to be easily implemented. Layers of expensive and complex code currently in use for job management can be replaced with a superior and cost-effective thin-client, distributed architecture. Such a system may operate in conjunction with legacy station controllers, or the station controller can be eliminated and replaced by multiple modules that distribute the many types of functions typically incorporated into conventional station controllers.

Abstract translation: 公开了一种用于改进工厂中设备的自动化工作管理的实现的方法和装置。 提供了一个软件库，允许作业管理客户端（如瘦台控制器客户端）与设备服务器（如设备接口桥（EIB））进行通信。 工作管理客户端可以使用行业标准协议方便，高效地创建，控制和监视作业。 设备服务器与工厂设备实时直接通信。 通过在作业管理客户端和设备服务器之间提供接口，数据消费者客户端与作业管理客户端有效地脱钩，从而允许下一代站控制器轻松实现监控和控制设备处理。 目前用于作业管理的昂贵且复杂的代码层可以被替代为具有优越性和成本效益的瘦客户端分布式架构。 这样的系统可以与传统站控制器一起操作，或者站控制器可被消除并由分布通常并入传统站控制器的许多类型的功能的多个模块代替。

公开(公告)号：WO2006066202A2

公开(公告)日：2006-06-22

申请号：PCT/US2005/045923

申请日：2005-12-15

Applicant: ASYST TECHNOLOGIES, INC. ,  BONORA, Anthony, C. ,  HINE, Roger, G. ,  NOBLES, D., Wayne, Jr. ,  RILEY, Norma, B.

Inventor： BONORA, Anthony, C. ,  HINE, Roger, G. ,  NOBLES, D., Wayne, Jr. ,  RILEY, Norma, B.

IPC: H01L21/00

CPC classification number: H01L21/68707 ,  Y10S294/902 ,  Y10S414/141

Abstract: The present invention comprises a distal rest pad for supporting a portion of a wafer seated on an end effector. In one embodiment, the rest pad includes a bottom support pad and an edge stop. Each element is mounted separately to the distal end of a support plate. The bottom support pad includes an inclined surface that transitions to a substantially horizontal surface at its distal end. The edge stop has a substantially vertical wafer contact surface that the peripheral edge of a wafer eventually contacts as the wafer is urged towards the distal rest pad. In another embodiment, the bottom support pad comprises an inclined surface. In yet another embodiment, the distal rest pad comprises a single structure. The distal rest pad includes a backstop portion and a bottom support separated by a particle collection groove. The bottom support may include an inclined lead-in surface that transitions into a flat contact surface or only comprise an inclined lead-in surface.

Abstract translation: 本发明包括用于支撑位于末端执行器上的晶片的一部分的远端休息垫。 在一个实施例中，休息垫包括底部支撑垫和边缘止动件。 每个元件分别安装到支撑板的远端。 底部支撑垫包括在其远端处转变到基本水平的表面的倾斜表面。 边缘止动器具有基本上垂直的晶片接触表面，当晶片被推向远侧支撑垫时，晶片的周边边缘最终接触。 在另一个实施例中，底部支撑垫包括倾斜表面。 在另一个实施例中，远侧支撑垫包括单个结构。 远侧支撑垫包括由颗粒收集槽分隔的止挡部分和底部支撑件。 底部支撑件可以包括倾斜的导入表面，其转变成平坦的接触表面或仅包括倾斜的导入表面。

公开(公告)号：WO2003098668A2

公开(公告)日：2003-11-27

申请号：PCT/US2003/015588

申请日：2003-05-15

Applicant: ASYST TECHNOLOGIES, INC. ,  MAYO, Michaël, J.

Inventor： MAYO, Michaël, J.

IPC: H01L21/00

CPC classification number: H01L21/681 ,  H05K13/0015

Abstract: The present invention is a pre-aligner capable of determining the center of a wafer by casting light onto a wafer that is positioned above a charge-coupled device (CCD). The pre-aligner perfoi ns this operation by directing light emitted from a single LED simultaneously onto the wafer and the CCD. The light emitted from the LED is directed through a light guide in order to direct the light onto the wafer and CCD. A lens collimates the light exiting the light guide such that the light, as it passes the wafer's edge, is substantially perpendicular to the wafer's edge. The light guide may be removably secured to the pre-aligner housing for easy installation removal. The pre­aligner is capable of self-calibrate the LED.

Abstract translation: 本发明是能够通过将光投射到位于电荷耦合器件（CCD）上方的晶片上来确定晶片中心的预对准器。 预对准器通过将从单个LED发射的光同时引导到晶片和CCD上来实现该操作。 从LED发射的光被引导通过光导，以将光引导到晶片和CCD上。 透镜准直离开光导的光，使得当光通过晶片的边缘时，光基本上垂直于晶片的边缘。 光导可以可拆卸地固定到预对准器壳体上以便于安装去除。 预定位器能够自动校准LED。

公开(公告)号：WO2003038869A3

公开(公告)日：2003-05-08

申请号：PCT/US2002/027979

申请日：2002-09-03

Applicant: ASYST TECHNOLOGIES, INC.

Inventor： BONORA, Anthony, C. ,  GOULD, Richard, H. ,  HINE, Roger, G. ,  KROLAK, Michael ,  SPEASL, Jerry

IPC: H01L21/00

Abstract: The present invention is a wafer transfer system that transports individual wafers between chambers within an isolated environment. In one embodiment, a wafer is transported by a wafer shuttle that travel within a transport enclosure. The interior of the transport enclosure is isolated from the atmospheric conditions of the surrounding wafer fabrication facility. Thus, an individual wafer may be transported throughout the wafer fabrication facility without having to maintain a clean room environment for the entire facility. The wafer shuttle may be propelled by various technologies, such as, but not limited to, magnetic levitation or air bearings. The wafer shuttle may also transport more than one wafer simultaneously. The interior of the transport enclosure may also be under vacuum, gas-filled, or subject to filtered air.

公开(公告)号：WO2003019630A2

公开(公告)日：2003-03-06

申请号：PCT/US2002/030297

申请日：2002-08-30

Applicant: ASYST TECHNOLOGIES, INC.

Inventor： BONORA, Anthony, C. ,  GOULD, Richard, H. ,  HINE, Roger, G. ,  KROLAK, Michael ,  SPEASL, Jerry

IPC: H01L21/00

CPC classification number: H01L21/68707 ,  H01L21/67766 ,  H01L21/67775 ,  H01L21/67778 ,  Y10S414/135

Abstract: The present invention is a unified spine structure that EFEM components, such as a wafer handling robot and a SMIF pod advance assembly, may mount to. The frame includes multiple vertical struts that are mounted to an upper support member and a lower support member. Structurally tying the vertical struts to the support members creates a rigid body to support the EFEM components. The vertical struts also provide a common reference that the EFEM components may align with. This eliminates the need for each EFEM component to align with respect to each other. Thus, if one EFEM component is removed it will not affect the alignment and calibration of the remaining secured EFEM components. The unified frame also creates an isolated storage area for the SMIF pod door and the port door within the environment that is isolated from the outside ambient conditions.

Abstract translation: 本发明是一种统一的脊柱结构，诸如晶圆处理机器人和SMIF吊舱推进组件的EFEM部件可以安装到其上。 框架包括安装到上部支撑构件和下部支撑构件的多个竖直支柱。 在结构上将垂直支柱与支撑构件捆绑在一起会形成一个刚体以支撑EFEM部件。 垂直支柱还提供了EFEM组件可以对齐的通用参考。 这消除了每个EFEM组件相互对齐的需要。 因此，如果一个EFEM组件被移除，它不会影响剩余的安全EFEM组件的对齐和校准。 统一的框架还为SMIF吊舱门和隔离室外环境条件下的端口门创建了一个隔离存储区。

公开(公告)号：WO2002062681A1

公开(公告)日：2002-08-15

申请号：PCT/US2002/003909

申请日：2002-01-30

Applicant: ASYST TECHNOLOGIES, INC.

Inventor： FOSNIGHT, William, J. ,  BABBS, Daniel ,  GOULD, Richard ,  KROLAK, Michael ,  FEINDEL, David ,  LUONG, Timothy

IPC: B65G1/00

CPC classification number: H01L21/67242

Abstract: A system is disclosed for safeguarding fab operators (115) and workpieces such as semiconductor wafers from harm as a result of collision between an operator shown in the open corridor (115) and a transport assembly (106, 110) for the workpieces as the workpieces are transported between tools (102) and storage nests (108) within a tool bay (100).

Abstract translation: 公开了一种系统，用于保护工厂操作者（115）和诸如半导体晶圆等工件，由于打开的走廊（115）所示的操作者和作为工件的工件的传送组件（106,110）之间的碰撞而受到伤害 在工具箱（100）内的工具（102）和存储巢（108）之间传送。

公开(公告)号：WO2002059738A1

公开(公告)日：2002-08-01

申请号：PCT/US2002/002092

申请日：2002-01-24

Applicant: ASYST TECHNOLOGIES, INC.

Inventor： WEHRUNG, Brian ,  COX, Barton, J.

IPC: G06F7/00

CPC classification number: G05B19/4182 ,  G05B2219/31078 ,  G05B2219/45031 ,  G05B2219/45054 ,  G05B2219/45057 ,  G05B2219/45063 ,  H01L21/67276 ,  H01L21/67294 ,  H01L21/67769 ,  Y02P90/083 ,  Y02P90/20 ,  Y02P90/28

Abstract: A control system for transferring and buffering material in a material transport system. A transport system and method for moving an article between a conveyor and a workstation. A robot works in conjunction with transportation buffer control system to move Pods between storage shelves, load ports and I/O ports without intervention of the material handling controller. The robots include vertical movement mechanisms and horizontal movement mechanisms together with gripping devices to handle the Pods. Movement of Pods between storage shelves, load ports and I/O ports is seen as a single activity by the material control system. The TC identifies a Transport Job as a specific object (402) and submits the Transport Job to the Scheduler (404). The Control Thread (406) is a CLC object that receives commands from the Scheduler (404) and issues atomic level commands to the transport robot. The Control Thread (406) controls a transport robot via an x-axis controller (412) and z-axis controller (414). The Handshake Control (416) is able to communicate with the CLC object E23 or E24 Handshake Control Thread (418).

Abstract translation: 一种用于在材料输送系统中传送和缓冲材料的控制系统。 用于在输送机和工作站之间移动物品的运输系统和方法。 机器人与运输缓冲控制系统配合使用，可以在货架，装载端口和I / O端口之间移动Pod，而不需要材料处理控制器的干预。 机器人包括垂直移动机构和水平移动机构以及夹持装置来处理荚。 储物架，装载端口和I / O端口之间的荚的移动被材料控制系统视为一项活动。 TC将传输作业识别为特定对象（402），并将传输作业提交到调度程序（404）。 控制线程（406）是从计划程序（404）接收命令并向运输机器人发出原子级命令的CLC对象。 控制螺纹（406）通过x轴控制器（412）和z轴控制器（414）控制传送机器人。 握手控制（416）能够与CLC对象E23或E24握手控制线程（418）进行通信。

公开(公告)号：WO1997003005A1

公开(公告)日：1997-01-30

申请号：PCT/US1996011500

申请日：1996-07-10

Applicant: ASYST TECHNOLOGIES, INC.

Inventor： ASYST TECHNOLOGIES, INC. ,  BONORA, Anthony, C. ,  NEADS, Michael, A. ,  OEN, Joshua, T.

IPC: B65G49/07

CPC classification number: H01L21/67772 ,  H01L21/67775 ,  Y10S414/137 ,  Y10S414/14

Abstract: A method and apparatus for removing a semiconductor wafer cassette (106) from a SMIF pod (100) and for transferring the cassette along a vertical axis to a platform (142) of a wafer processing station (124). The apparatus is comprised of a transfer device (110) that includes a pair of gripping arms (116) for gripping the wafer cassette from the sides of the cassette. Once gripped, the cassette moves with the transfer device upward along a vertical axis to make room for the platform to be extended from within the processing station to a position under the cassette. Thereafter, the direction of motion of the transfer device is reversed and the cassette is lowered onto the platform. Once seated on the platform, the gripping arms retract from the cassette, and the cassette is carried on the platform into the processing station.

Abstract translation: 一种用于从SMIF盒（100）移除半导体晶片盒（106）并将盒沿着垂直轴传送到晶片处理站（124）的平台（142）的方法和装置。 该装置包括一个转移装置（110），该转移装置包括一对用于从盒的侧面夹持晶片盒的夹持臂（116）。 一旦被抓住，盒子沿着垂直轴向上移动传送装置，以使平台从处理站中延伸到盒下方的位置。 此后，转印装置的运动方向相反，并且盒子下降到平台上。 一旦坐在平台上，把持臂从盒子中退回，并且盒子被放在平台上进入处理站。

公开(公告)号：WO1992007759A1

公开(公告)日：1992-05-14

申请号：PCT/US1991006620

申请日：1991-09-12

Applicant: ASYST TECHNOLOGIES, INC.

Inventor： ASYST TECHNOLOGIES, INC. ,  BONORA, Anthony, C. ,  GUERRE, Gilles ,  PARIKH, Mihir ,  ROSENQUIST, Frederick, T. ,  JAIN, Sudhir

IPC: B65B01/04

CPC classification number: H01L21/67757 ,  G03F7/7075 ,  H01L21/67772 ,  Y10S414/14

Abstract: A method and apparatus for transferring articles from a transportable container (18), for example, a SMIF pod, to a second container, for example, a processing station (8) having a port (24) which provides access to the interior region (15) of the processing station. A non-contact seal (92) or an isolation cover (110) or skirt (130) seals the port so that the interior region (21) of the container can be purged of contaminants prior to exposing the interior environment of the processing station to the environment within the container. The purging of the container may be a multistep process in which the container door (32) is moved between several intermediate positions so that the container door itself is purged prior to the purging of the environment within the container.

公开(公告)号：WO1990014273A1

公开(公告)日：1990-11-29

申请号：PCT/US1990001995

申请日：1990-04-13

Applicant: ASYST TECHNOLOGIES, INC.

Inventor： ASYST TECHNOLOGIES, INC. ,  BONORA, Anthony, Charles ,  ROSENQUIST, Frederick, Theodore

IPC: B65B69/00

CPC classification number: H01L21/67373 ,  Y10S414/14

Abstract: A transportable, sealable container (18) for example a SMIF pod, has a box (20) and a box door (32). The box has a first sealing surface (54) and the box door has a second sealing surface (58) which forms a seal with the first sealing surface when the box door is moved in a sealing direction with respect to the box. A latch mechanism (101) provided in the box door is operable in two stages. The first stage of operation moves latch members (1011, 1012) from a retracted position to an extended position; in the retracted position the latch members are contained in the box door to allow movement of the box door with respect to the box, and in the extended position the latch members are adjacent to latch surfaces (1121, 1122) of the box. Movement from the retracted to the extended position is performed without contact between the latch members and the latch surfaces to avoid any scraping or rubbing action which would create particles in the ''clean'' interior region of the box. The second stage of operation engages latch members with the latch surfaces to move the box door in the sealing direction; this second stage of operation is also performed without scraping or rubbing of the latch members and the latch surfaces.