公开(公告)号：WO2015038367A2

公开(公告)日：2015-03-19

申请号：PCT/US2014/053677

申请日：2014-09-02

Applicant: INNOVATIVE MICRO TECHNOLOGY

Inventor： GUDEMAN, Christopher ,  SEN, Prosenjit

CPC classification number: H01L21/486 ,  B81B7/007 ,  B81B2207/095 ,  B81B2207/096 ,  B81C1/00095 ,  H01L21/76898 ,  H01L23/481 ,  H01L31/02167 ,  H01L31/03529 ,  H01L31/052 ,  H01L31/068 ,  H01L2924/0002 ,  Y02E10/547 ,  H01L2924/00

Abstract: A method for forming through substrate vias (TSVs) in a non-conducting, glass substrate is disclosed. The method involves patterning a silicon template substrate with a plurality of lands and spaces, bonding a slab or wafer of glass to the template substrate, and melting the glass so that it flows into the spaces formed in the template substrate. The template substrate may then be removed to leave a plurality of TSVs in the glass slab or wafer.

Abstract translation: 公开了一种用于在非导电玻璃基板中形成贯穿衬底通孔（TSV）的方法。 该方法包括用多个焊盘和间隔图案化硅模板衬底，将玻璃板或玻璃晶片粘合到模板衬底上，并且熔化玻璃使其流入形成在模板衬底中的空间。 然后可以移除模板衬底以在玻璃板或晶片中留下多个TSV。

公开(公告)号：WO2013112121A1

公开(公告)日：2013-08-01

申请号：PCT/US2012/000322

申请日：2012-07-11

Applicant: OWL BIOMEDICAL, INC ,  INNOVATIVE MICRO TECHNOLOGY ,  FOSTER, John, S. ,  GRUMMIT, Daryl, W. ,  HARLEY, John, C. ,  SPONG, Jaquelin, K. ,  TURNER, Kimberly

Inventor： FOSTER, John, S. ,  GRUMMIT, Daryl, W. ,  HARLEY, John, C. ,  SPONG, Jaquelin, K. ,  TURNER, Kimberly

IPC: C12M1/34

CPC classification number: G01N33/5005 ,  B01L3/502738 ,  B01L3/502761 ,  B01L2200/0652 ,  B01L2400/043 ,  B01L2400/0633 ,  C12M47/04

Abstract: A MEMS-based system and a method are described for separating a target particle from the remainder of a fluid stream. The system makes use of a unique, microfabricated movable structure formed on a substrate, which moves in a rotary fashion about one or more fixed points, which are all located on one side of the axis of motion. The movable structure is actuated by a separate force-generating apparatus, which is entirely separate from the movable structure formed on its substrate. This allows the movable structure to be entirely submerged in the sample fluid.

Abstract translation: 描述了基于MEMS的系统和方法，用于将目标颗粒与流体流的其余部分分离。 该系统利用形成在基板上的独特的微加工可移动结构，其以旋转方式围绕一个或多个固定点移动，所述固定点都位于运动轴的一侧。 可移动结构由独立的力产生装置致动，该装置与其基板上形成的可移动结构完全分开。 这允许可移动结构完全浸没在样品流体中。

公开(公告)号：WO2011149503A1

公开(公告)日：2011-12-01

申请号：PCT/US2011/000678

申请日：2011-04-14

Applicant: INNOVATIVE MICRO TECHNOLOGY ,  FOSTER, John, Stuart ,  GUDEMAN, Christopher

Inventor： FOSTER, John, Stuart ,  GUDEMAN, Christopher

IPC: B81B7/02

CPC classification number: F04B43/043

Abstract: A micromechanical pumping system is formed on a substrate surface. The pumping system uses a pumping element which pumps a fluid through valves which move in a plane substantially parallel to the substrate surface. An electromagnetic actuating mechanism may also be fabricated on the surface of the substrate. Magnetic flux produced by a coil around a permeable core may be coupled to a permeable member affixed to a pumping element. The permeable member and pumping element may be configured to move in a plane parallel to the substrate. The electromagnetic actuating mechanism gives the pumping system a large throw and substantial force, such that the fluid pumped by the pumping system may be pumped through a transdermal cannula to deliver a therapeutic substance to the tissue underlying the skin of a patient.

Abstract translation: 在基板表面上形成微机械泵送系统。 泵送系统使用泵送元件，该元件通过在基本上平行于衬底表面的平面中移动的阀来泵送流体。 也可以在基板的表面上制造电磁致动机构。 线圈围绕可渗透芯体产生的磁通可以耦合到固定到泵送元件的可渗透构件。 可渗透构件和泵送元件可以构造成在平行于衬底的平面中移动。 电磁致动机构使泵送系统产生大的冲击力和相当大的力，使得由泵送系统泵送的流体可以泵送通过透皮套管，以将治疗物质递送到患者皮肤下方的组织。

公开(公告)号：WO2010033140A3

公开(公告)日：2010-03-25

申请号：PCT/US2009/002756

申请日：2009-05-05

Applicant: INNOVATIVE MICRO TECHNOLOGY ,  BISHOP, Jamie, H. ,  ERLACH, David, M. ,  FOSTER, Ian, S. ,  FOSTER, John, S. ,  HARLEY, John, C. ,  THOMPSON, Douglas, L.

Inventor： BISHOP, Jamie, H. ,  ERLACH, David, M. ,  FOSTER, Ian, S. ,  FOSTER, John, S. ,  HARLEY, John, C. ,  THOMPSON, Douglas, L.

IPC: B07C5/344

Abstract: A micromechanical particle sorting system uses a removable/disposable apparatus which may include a compressible device, a filter apparatus and a cell sorter chip assembly. The chip assembly may include a tubing strain relief manifold and a microfabricated cell sorting chip. The chip assembly may be detachable from the filter apparatus in order to mount the MEMS particle sorting chip adjacent to a force- generating apparatus which resides with the particle sorting system. A disturbance device installed in the particle sorting system may interact with a transducer on the removable/disposable apparatus to reduce clogging of the flow through the system. Using this removable/disposable apparatus, when the sample is changed, the entire apparatus can be thrown away with minimal expense and system down time.

公开(公告)号：WO2006127256A3

公开(公告)日：2009-04-16

申请号：PCT/US2006017743

申请日：2006-05-05

Applicant: INNOVATIVE MICRO TECHNOLOGY ,  FOSTER JOHN S ,  HOVEY STEVEN H ,  MARTIN RICHARD T ,  RUBEL PAUL J ,  NGUYEN HUNG D ,  HARLEY JOHN C

Inventor： FOSTER JOHN S ,  HOVEY STEVEN H ,  MARTIN RICHARD T ,  RUBEL PAUL J ,  NGUYEN HUNG D ,  HARLEY JOHN C

IPC: B01D63/00

CPC classification number: B01D61/14 ,  B01D63/00 ,  B01D65/08 ,  B01D67/0062 ,  B01D69/02 ,  B01D2321/2058 ,  G01N1/4077

Abstract: A microfabricated cross flow filter may have multiple filtration stages. The filtration stages may include microfabricated filter barriers and gaps created in a substrate, thereby allowing very tight tolerances in the filter barrier and gap dimensions to be maintained. Using the microfabrication techniques, the filter barriers can be made having arbitrary shapes, and arranged at an angle or curved with respect to the flow direction, making the pressure drop across the filtration stage more uniform in the cross flow direction.

Abstract translation: 微制造的交叉流过滤器可以具有多个过滤阶段。 过滤阶段可以包括微制造的过滤器屏障和在衬底中产生的间隙，从而允许保持过滤器屏障和间隙尺寸的非常严格的公差。 使用微细加工技术，过滤器屏障可以制成具有任意形状，并且以相对于流动方向成一定角度或弯曲的方式布置，使跨越过滤台的压降在横向方向上更均匀。

公开(公告)号：WO2007136582A3

公开(公告)日：2009-04-02

申请号：PCT/US2007011416

申请日：2007-05-11

Applicant: INNOVATIVE MICRO TECHNOLOGY ,  SUMMERS JEFFERY F

Inventor： SUMMERS JEFFERY F

IPC: H01L21/00

CPC classification number: H01L23/26 ,  B81B7/0038 ,  G01J5/045 ,  H01L2924/0002 ,  H01L2924/09701 ,  Y10T29/41 ,  H01L2924/00

Abstract: A method for providing improved gettering in a vacuum encapsulated device is described. The method includes forming a plurality of small indentation features in a device cavity formed in a lid wafer. The gettering material is then deposited over the indentation features. The indentation features increase the surface area of the getter material, thereby increasing the volume of gas that the getter material can absorb. This may improve the vacuum maintained within the vacuum cavity over the lifetime of the vacuum encapsulated device.

Abstract translation: 描述了一种在真空封装装置中提供改进吸气的方法。 该方法包括在形成在盖晶片中的器件空腔中形成多个小凹陷特征。 然后将吸气材料沉积在压痕特征上。 凹陷特征增加吸气材料的表面积，从而增加吸气剂材料可吸收的气体体积。 这可以在真空密封装置的寿命期内改善在真空腔内保持的真空。

公开(公告)号：WO2007109203A3

公开(公告)日：2008-11-06

申请号：PCT/US2007006752

申请日：2007-03-19

Applicant: INNOVATIVE MICRO TECHNOLOGY ,  PARANJPYE ALOK ,  SUMMERS JEFFERY F

Inventor： PARANJPYE ALOK ,  SUMMERS JEFFERY F

IPC: H01H33/02

CPC classification number: B81B3/0024 ,  B81B2201/018 ,  B81B2201/0278 ,  H01H2037/008 ,  H01H2061/008 ,  Y10T29/49105 ,  Y10T29/49147 ,  Y10T29/49204 ,  Y10T29/53248

Abstract: A MEMS thermal switch is disclosed which couples a hot, expanding beam to a cool flexor beam using a slideably engaged tether, and bends the cool, flexor beam by the expansion of the hot beam. A rigidly engaged tether ties the distal ends of the hot, expanding beam and the cool, flexor beam together, whereas the slideably engaged tether allows the hot, expanding beam to elongate with respect to the cool, flexor beam, without loading the slideably engaged tether with a large shear force. As a result, the material of the tether can be made stiffer, and therefore transmit the bending force of the hot, expanding beam more efficiently to the cool, flexor beam.

Abstract translation: 公开了一种MEMS热开关，其使用可滑动接合的系绳将热膨胀梁耦合到冷弯头梁，并且通过热梁的膨胀来弯曲冷弯曲梁。 刚性接合的系绳将热的，扩张的梁和冷的弯曲梁的远端连接在一起，而可滑动地接合的系绳允许热的，膨胀的梁相对于冷的屈肌梁而伸长，而不加载可滑动地接合的系绳 具有很大的剪切力。 结果，系链的材料可以变得更硬，并且因此将热膨胀梁的弯曲力更有效地传递到凉爽的弯曲梁。

公开(公告)号：WO2007136582A2

公开(公告)日：2007-11-29

申请号：PCT/US2007/011416

申请日：2007-05-11

Applicant: INNOVATIVE MICRO TECHNOLOGY ,  SUMMERS, Jeffery, F.

Inventor： SUMMERS, Jeffery, F.

IPC: H01L21/00

CPC classification number: H01L23/26 ,  B81B7/0038 ,  G01J5/045 ,  H01L2924/0002 ,  H01L2924/09701 ,  Y10T29/41 ,  H01L2924/00

Abstract: A method for providing improved gettering in a vacuum encapsulated device is described. The method includes forming a plurality of small indentation features in a device cavity formed in a lid wafer. The gettering material is then deposited over the indentation features. The indentation features increase the surface area of the getter material, thereby increasing the volume of gas that the getter material can absorb. This may improve the vacuum maintained within the vacuum cavity over the lifetime of the vacuum encapsulated device.

Abstract translation: 描述了一种在真空封装装置中提供改进吸气的方法。 该方法包括在形成在盖晶片中的器件空腔中形成多个小凹陷特征。 然后将吸气材料沉积在压痕特征上。 凹陷特征增加吸气材料的表面积，从而增加吸气剂材料可吸收的气体体积。 这可以在真空密封装置的寿命期内改善在真空腔内保持的真空。

公开(公告)号：WO2007078472A1

公开(公告)日：2007-07-12

申请号：PCT/US2006/045542

申请日：2006-11-29

Applicant: INNOVATIVE MICRO TECHNOLOGY ,  CARLSON, Gregory, A. ,  ERLACH, David, M. ,  PARANJPYE, Alok ,  SUMMERS, Jeffery, F.

Inventor： CARLSON, Gregory, A. ,  ERLACH, David, M. ,  PARANJPYE, Alok ,  SUMMERS, Jeffery, F.

IPC: H01L21/00

CPC classification number: B81C1/00269 ,  B81C2203/0118 ,  B81C2203/019 ,  H01L23/10 ,  H01L2924/0002 ,  H01L2924/01079 ,  H01L2924/00

Abstract: Systems and methods for forming an encapsulated device include a hermetic seal which seals an insulating environment between two substrates, one of which supports the device. The hermetic seal is formed by an alloy of two metal layers, one deposited on a first substrate and the other deposited on the second substrate, along with a raised feature formed on the first or the second substrate. At least one of the metal layers may be deposited conformally over the raised feature. The raised feature penetrates the molten material of the first or the second metal layers during formation of the alloy, and produces a spectrum of stoichiometrics for the formation of the desired alloy, as a function of the distance from the raised feature. At some distance from the raised feature, the proper ratio of the first metal to the second metal exists to form an alloy of the preferred stoichiometry.

Abstract translation: 用于形成封装装置的系统和方法包括密封两个基板之间的绝缘环境的气密密封件，其中之一支撑该装置。 气密密封由两个金属层的合金形成，一个沉积在第一基板上，另一个沉积在第二基板上，以及形成在第一或第二基板上的凸起特征。 金属层中的至少一个可以在凸起特征上保形地沉积。 凸起的特征​​在形成合金期间渗透第一或第二金属层的熔融材料，并且作为与凸起特征的距离的函数产生用于形成所需合金的化学计量谱。 在与凸起特征相距一定距离处，存在第一金属与第二金属的适当比例以形成优选化学计量的合金。

公开(公告)号：WO2007019103A3

公开(公告)日：2007-07-05

申请号：PCT/US2006029661

申请日：2006-07-31

Applicant: INNOVATIVE MICRO TECHNOLOGY ,  FOSTER JOHN S ,  HARLEY JOHN C ,  HOVEY STEVEN H ,  MARTIN RICHARD T ,  NGUYEN HUNG ,  RUBEL PAUL J

Inventor： FOSTER JOHN S ,  HARLEY JOHN C ,  HOVEY STEVEN H ,  MARTIN RICHARD T ,  NGUYEN HUNG ,  RUBEL PAUL J

IPC: G01N1/10 ,  A61M1/36 ,  B01L3/00 ,  C12M1/34 ,  C12Q1/00 ,  G01N15/02 ,  G01N21/05 ,  G01N21/64 ,  H01L21/00

CPC classification number: C12M47/04 ,  A61M1/36 ,  A61M1/3633 ,  A61M1/3678 ,  A61M2202/0437 ,  B01L3/5027 ,  G01N21/6428 ,  G01N2015/0288 ,  G01N2015/149 ,  Y10T436/11 ,  Y10T436/112499 ,  Y10T436/2575

Abstract: A micromechanical particle sorting chip (300) uses laser light (305) directed through at least one of a reflective (360) and refractive (310) surface to come to a focus (320) in an optically transparent layer. The laser light (305) impinges on a particle of interest, causing it to fluoresce. Upon detecting the fluorescence, a micromechanical actuator (400) is activated, which directs the particle of interest into one of a plurality of possible exit paths.

Abstract translation: 微机械粒子分选芯片（300）使用穿过反射（360）和折射（310）表面中的至少一个的激光（305）到达光学透明层中的聚焦（320）。 激光（305）撞击感兴趣的颗粒，使其发荧光。 在检测到荧光时，微机械致动器（400）被激活，其将感兴趣的颗粒引导到多个可能的出口路径中的一个。