Manufacturing method of substrate having coating film having amino group on its surface
    97.
    发明专利
    Manufacturing method of substrate having coating film having amino group on its surface 有权
    具有AMINO组在其表面上的涂层膜的基材的制造方法

    公开(公告)号:JP2007322219A

    公开(公告)日:2007-12-13

    申请号:JP2006151848

    申请日:2006-05-31

    Abstract: PROBLEM TO BE SOLVED: To provide a method which enables the formation of the fine pattern of a reagent or the like at a desired position with good reproducibility. SOLUTION: This manufacturing method of a substrate includes a vapor deposition process for forming a coating film having an amino group on the surface of the substrate by heating a compound represented by the formula (1), wherein (R 1 is -NH 2 or -CH 2 NH 2 and R 2 is -NH 2 , -CH 2 NH 2 or -H) to form a monomer and vapor-depositing the monomer on the substrate. The surface of the substrate has at least a region comprising a first material and a region comprising a second material and the amount of the amino group present on the surface of the coating film having the amino group per a unit area is different between the surface of the region comprising the first material and the surface of the region comprising the second material. The manufacturing method of the substrate is also disclosed. COPYRIGHT: (C)2008,JPO&INPIT

    Abstract translation: 待解决的问题:提供一种能够以期望的位置形成具有良好重现性的试剂等的精细图案的方法。 解决方案:该基板的制造方法包括通过加热由式(1)表示的化合物在基板的表面上形成具有氨基的涂膜的气相沉积工艺,其中(R 1 是-NH 2 或-CH 2 2 ,而R SP 2是-NH SB > 2 ,-CH 2 2 或-H)以形成单体并将单体气相沉积在基材上。 衬底的表面至少包括第一材料和包含第二材料的区域的区域,并且每单位面积具有氨基的涂膜表面上存在的氨基的量在第 所述区域包括第一材料和包括第二材料的区域的表面。 还公开了基板的制造方法。 版权所有(C)2008,JPO&INPIT

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