公开(公告)号：JPH11191431A

公开(公告)日：1999-07-13

申请号：JP36106397

申请日：1997-12-26

Applicant: SONY CORP

Inventor： SAM FUI ,  FUJITA SHIGERU ,  SEGAWA TAKESHI

IPC: H01M10/05 ,  H01M10/052 ,  H01M10/0525 ,  H01M10/0569 ,  H01M10/40

Abstract: PROBLEM TO BE SOLVED: To make a nonaqueous solvent flame-resistant and to improve the cycle characteristic of a battery by providing a positive electrode, a negative electrode and a nonaqueous electrolyte with electrolyte disolved in a nonaqueous solvent, including a specific phosphate compound and a specific phosphagen compound as the nonaqueous solvent. SOLUTION: A nonaqueous solvent to be used contains a phosphate compound expressed by formula I and a phosphagen compound expressed by formula II. In the formula, R1 -R4 represent substituted or nonsubstituted cyclic aromatic groups, and A represents a nonsubstituted cyclic aromatic group or a heterocycle. In the formula, R5 , R6 represent a straight chain or branched alkyl group, a cyclic saturated alkyl group or an alkylene group, and (n) is an integer of 1-100. Flame resistance is displayed because of containing the phosphate compound in the nonaqueous solvent, and the cycle characteristic of a battery is improved since containing the phosphagen compound is contained. In this nonaqueous electrolyte battery, a wound layer body with a positive electrode, and a negative electrode wound through a separator is charged in a battery can.

公开(公告)号：JPH11186170A

公开(公告)日：1999-07-09

申请号：JP35273597

申请日：1997-12-22

Applicant: SONY CORP

Inventor： FUJITA SHIGERU

IPC: H01L21/22 ,  H01L21/205 ,  H01L21/31

Abstract: PROBLEM TO BE SOLVED: To provide a method and device for forming film by which films can be formed without causing a discharge route to be blocked with by-products left after the films are formed. SOLUTION: A film forming device respectively forms films on objects mounted on a quartz board 14 by introducing a reaction gas to a reaction furnace 13 after the boat 14 is carried in the furnace 13. An electric heater 17 which vaporizes resulted by-products of reaction adhering to the boat 14 by heating the boat 14 on the outside of the furnace 13 after the films are formed is provided on the outside of the furnace 13.

公开(公告)号：JPH1050618A

公开(公告)日：1998-02-20

申请号：JP20140296

申请日：1996-07-31

Applicant: SONY CORP ,  KOKUSAI ELECTRIC CO LTD

Inventor： FUJITA SHIGERU ,  FURUNO MAKOTO ,  ITAYA HIDEJI

IPC: C30B25/14 ,  C23C16/44 ,  C23C16/455 ,  C30B35/00 ,  H01L21/205

Abstract: PROBLEM TO BE SOLVED: To provide a manufacturing method and device wherein occurrence of foreign materials is prevented. SOLUTION: A semiconductor device manufacturing device 10 comprises a reaction chamber 2 for film-forming process with a wafer W, the first raw material gas introduction means for allowing the raw material gas to flow in one direction across the film-formation surface of the wafer W, the second raw material gas introduction means for allowing the raw material gas to flow in a direction different from the former direction, across the film formation surface of the wafer W, and a negative pressure source 8 for evacuating the inside of the reaction chamber. A control means 11 which controls actions of the first raw material gas introduction means, the negative pressure source 8 and the second raw material gas introduction means is provided, so that the raw material gas is introduced in the reaction chamber for a specified period by the first raw material gas introduction means, then the introduction of the raw material gas from the first raw material gas introduction means is stopped, with the inside of the reaction chamber 2 evacuated by the negative pressure source 8, and then the raw material gas is introduced in the reaction chamber 2 for a specified period by the second raw material gas introduction means.

公开(公告)号：JPH1050617A

公开(公告)日：1998-02-20

申请号：JP20140196

申请日：1996-07-31

Applicant: SONY CORP ,  KOKUSAI ELECTRIC CO LTD

Inventor： FUJITA SHIGERU ,  FURUNO MAKOTO ,  ITAYA HIDEJI

IPC: C23C16/44 ,  C23C16/52 ,  H01L21/205

Abstract: PROBLEM TO BE SOLVED: To provide a method for manufacturing semiconductor device wherein, at film-forming with a leaf-type decompression CVD device, such phenomenon as generation of foreign substances and a rough film-forming surface is prevented. SOLUTION: A raw material is introduced in a reaction chamber 2 of a decompression CVD device 1 provided with a leaf-type reaction chamber 2, and a deposition material of raw material gas is deposited on a wafer W assigned in advance in the reaction chamber 2, for film-forming. The capacity of the reaction chamber is 10-30 liters. Introduction of the raw material gas into the reaction chamber 2 is gradually increased in a continuous manner from 0sccm in flow rate, so that is reaches a set flow rate in at least 20 seconds. The set flow rate is 50-1000sccm.

公开(公告)号：JPH0896852A

公开(公告)日：1996-04-12

申请号：JP16855595

申请日：1995-07-04

Applicant: SONY CORP

Inventor： NARUSE YOSHIAKI ,  FUJITA SHIGERU ,  KOMARU TOKUO

IPC: H01M10/05 ,  C01B31/02 ,  C01B31/04 ,  H01M4/587 ,  H01M10/0569 ,  H01M10/40 ,  H01M4/02 ,  H01M4/58

Abstract: PURPOSE: To provide high energy density and display a good cycle characteristic by using a material containing vinylene carbonate as a nonaqueous solvent for the electrolyte of a nonaqueous electrolytic secondary battery. CONSTITUTION: This nonaqueous electrolytic secondary battery has a negative electrode made of such a material as capable of doping and de-doping metal lithium, lithium alloy and lithium, a positive electrode, and a nonaqueous electolytic solution containing an electrolyte dissolved in a nonaqueous solvent. Regarding this battery, vinylene carbonate is used as a high dielectric solvent as a substitute for the conventional propylene carbonate for the nonaqueous solvent for the electrolytic solution. In this case, the ratio of the vinylene carbonate contained in the nonaqueous solvent is suitable, when taken at a value approximately between 20 and 60vol.%. Also, the vinylene carbonate is not decomposed by graphite and, therefore, the energy density of the battery can be increased by using graphite of high density as a negative electrode active material.

公开(公告)号：JPH0846040A

公开(公告)日：1996-02-16

申请号：JP17872594

申请日：1994-07-29

Applicant: SONY CORP

Inventor： FUJITA SHIGERU

IPC: H01L23/522 ,  H01L21/306 ,  H01L21/768

Abstract: PURPOSE:To reduce contact resistance between an intermediate wiring and an upper wiring thereon or between an intermediate wiring and lower wiring when using a through contact. CONSTITUTION:In a wiring contact structure in a multilayer wiring provided with a first conductive layer 1, a conductive plug 5 arranged on the first conductive layer 1, a second conductive layer 3 in contact with a sidewall part of the conductive plug and a third conductive layer 6 in contact with an upper surface of the conductive plug, a sidewall part of the conductive plug 5 in contact with the second conductive layer 3 is made to project to an upper surface or lower surface side of the second conductive layer 3.

公开(公告)号：JPH07240232A

公开(公告)日：1995-09-12

申请号：JP15166494

申请日：1994-06-08

Applicant: SONY CORP

Inventor： NARUSE YOSHIAKI ,  FUJITA SHIGERU ,  KOMARU TOKUO

IPC: H01M4/485 ,  H01M4/587 ,  H01M10/05 ,  H01M10/0569 ,  H01M10/40 ,  H01M4/02

Abstract: PURPOSE:To improve cycle characteristics of a nonaqueous electrolyte secondary battery using lithium at any temperature including low temperature by containing specified annular carbonate in a nonaqueous solvent which composes the nonaqueous electrolyte. CONSTITUTION:A nonaqueous electrolyte secondary battery is composed of a negative electrode, a positive electrode, and a nonaqueous electrolyte dissolved in a nonaqueous solvent wherein the negative electrode consists of a material which can be doped with the desorb lithium together with metal lithium or a lithium alloy. The nonaqueous solvent contains a cyclic carbonate having the formula shown wherein at least one of X , X , X stands for F, C, or Br. Moreover, in the point of improving the capacity of the battery and heightening energy density, it is preferable to use lithium and at least one kind of transition metal compounded compounded as positive electrode active materials for the positive electrode.

公开(公告)号：JPH07192762A

公开(公告)日：1995-07-28

申请号：JP34773193

申请日：1993-12-24

Applicant: SONY CORP

Inventor： FUJITA SHIGERU

IPC: H01M10/05 ,  H01M4/131 ,  H01M4/133 ,  H01M4/134 ,  H01M10/052 ,  H01M10/0569 ,  H01M10/40

Abstract: PURPOSE:To provide a nonaqueous electrolyte secondary battery excellent in high-load property, low-temperature property, cycle property, and low- inflammability by making a nonaqueous solvent of nonaqueous electrolyte contain specified compounds, in a nonaqueous electrolyte secondary battery equipped with a positive electrode and a negative pole and a nonaqueous electrolyte each specified. CONSTITUTION:In a nonaqueous secondary battery equipped with a negative pole consisting of a material (example: a kind of graphite) capable of doping or dedoping Li and metallic Li or Li alloy (example: Li-Al alloy), a positive pole (example: LiCoO2), and nonaqueous electrolyte where electrolyte (example: LiPF6) is dissolved in a nonaqueous solvent, the nonaqueous solvent of nonaqueous electrolyte contains ester formate halide (example: chloroethyl formate) shown by the formula XCOOR [X is halogen, and R is C1-5 alkyl (halogen substitution)] and preferably circular ester (example: propylene carbonate) as well.

公开(公告)号：JPH0684543A

公开(公告)日：1994-03-25

申请号：JP25750992

申请日：1992-08-31

Applicant: SONY CORP

Inventor： FUJITA SHIGERU ,  KOMARU TOKUO

IPC: H01M4/131 ,  H01M4/133 ,  H01M4/485 ,  H01M4/583 ,  H01M10/05 ,  H01M10/0525 ,  H01M10/0566 ,  H01M10/40 ,  H01M4/02

Abstract: PURPOSE:To improve temperature characteristics and load characteristics, and achieve favorable oxidation/reduction resistance by setting conductivity of a nonaqueous electrolyte secondary battery sufficiently high. CONSTITUTION:A nonaqueous electrolyte secondary battery is provided with a negative electrode 1 capable of doping and undoping lithium, a positive electrode 2, and nonaqueous electrolyte comprising electrolyte dissolved in nonaqueous solvent. In this nonaqueous electrolyte secondary battery, mixed solvent including propylene carbonate, ethylene carbonate, dimethyl carbonate, and diethyl carbonate is used.

公开(公告)号：JPH0613109A

公开(公告)日：1994-01-21

申请号：JP6075493

申请日：1993-03-19

Applicant: SONY CORP

Inventor： KOMARU TOKUO ,  FUJITA SHIGERU

IPC: H01M10/05 ,  C01B31/02 ,  H01M4/505 ,  H01M4/525 ,  H01M4/587 ,  H01M10/0568 ,  H01M10/0569 ,  H01M10/40 ,  H01M4/58

Abstract: PURPOSE:To achieve a high energy density, a long life and high reliability in a wide range of temperature for use by using mixed solvent of propylene carbonate(PC) and methyl ethyl carbonate(MEC) as nonaqueous electrolyte. CONSTITUTION:A nonaqueous secondary battery is formed with a negative plate 1 of carbon material, a positive plate 2 of lithium composite oxide. As nonaqueous solvent, PC/MEC mixed low-viscocity solvent is used so that the nonaqueous electrolyte secondary battery shows a high energy density, a long life and high reliability in a wide range of temperature for use without increasing its inner pressure under high temperature circumstances and solidifying its electrolyte under low temperature circumstances.