公开(公告)号：US08237929B2

公开(公告)日：2012-08-07

申请号：US13196802

申请日：2011-08-02

Applicant: Michael L. Myrick ,  Robert P. Freese ,  William Soltmann ,  David L. Perkins

Inventor： Michael L. Myrick ,  Robert P. Freese ,  William Soltmann ,  David L. Perkins

IPC: G01N21/00

CPC classification number: G01J3/02 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0232 ,  G01J3/0235 ,  G01J3/0243 ,  G01J3/0286 ,  G01J3/08 ,  G01J3/28 ,  G01J3/42 ,  G01J2003/1213 ,  G01N2201/1293

Abstract: The present subject matter relates to methods of high-speed analysis of product samples during production of the product. Light is directed to a portion of a product under analysis and reflected from or transmitted through the product toward optical detectors. Signals from the optical detectors are compared to determine characteristics of the product under analysis. Temperature within the monitoring system may be monitored in order to provide compensation for the signals produced by the optical detectors. The products under analysis may be stationary, moved by an inspection point by conveyor or other means, or may be contained within a container, the container including a window portion through which the product illuminating light may pass.

Abstract translation: 本主题涉及产品生产过程中产品样品的高速分析方法。 光被引导到被分析产品的一部分，从产品反射或透射到光学检测器。 将来自光学检测器的信号进行比较，以确定正在分析的产品的特性。 可以监视监视系统内的温度，以便为由光学检测器产生的信号提供补偿。 被分析的产品可以是固定的，由检查点通过输送机或其他方式移动，或者可以容纳在容器内，该容器包括产品照明光通过的窗口部分。

公开(公告)号：US08154726B2

公开(公告)日：2012-04-10

申请号：US12094462

申请日：2006-11-27

Applicant: John C. Blackburn ,  Robert P. Freese ,  David L. Perkins

Inventor： John C. Blackburn ,  Robert P. Freese ,  David L. Perkins

IPC: G01N21/25

CPC classification number: G01J3/02 ,  G01J3/0205 ,  G01J3/021 ,  G01J3/0232 ,  G01J3/0291 ,  G01J3/08 ,  G01J3/28 ,  G01J3/36 ,  G01N21/274 ,  G01N21/31 ,  G01N2201/1293

Abstract: An optical analysis system and method for determining information carried by light include a multivariate optical element disposed in the system to receive a source light from an illumination source; filtering the source light through a spectral element in the optical element analysis system; reflecting the filtered light through an inner region of a cavity in a first direction of a sample to be measured, the cavity defining a second region disposed about the inner region; focusing the reflected light proximate the sample; reflecting the focused light from the sample through the second region in a second direction of a beamsplitter, the light being reflected from the sample carrying data from the sample; splitting the sample carrying light with the beamsplitter into a first light and a second light; optically filtering the data of the first light with the multivariate optical element into an orthogonal component; directing the first light filtered by the multivariate optical element onto a first photodetector; directing the second light onto a second photodetector; and comparing the orthogonal component to information present in the second light to determine a property of the sample.

Abstract translation: 用于确定由光携带的信息的光学分析系统和方法包括设置在系统中以从照明源接收源光的多变量光学元件; 通过光学元件分析系统中的光谱元件对源光进行滤光; 通过待测样品的第一方向的空腔的内部区域反射经过滤光，所述空腔限定围绕所述内部区域设置的第二区域; 将反射光聚焦在样品附近; 在分束器的第二方向上反射来自样品的聚焦光通过第二区域，从样品反射的光从样品携带数据; 将带有分束器的携带光的样品分成第一光和第二光; 用多元光学元件将第一光的数据光学滤波为正交分量; 将由多元光学元件滤波的第一光引导到第一光电检测器上; 将第二光引导到第二光电检测器上; 以及将所述正交分量与存在于所述第二光中的信息进行比较，以确定所述样本的性质。

公开(公告)号：US20100290033A1

公开(公告)日：2010-11-18

申请号：US12844851

申请日：2010-07-28

Applicant: Phillip Walsh ,  Dale Harrison

Inventor： Phillip Walsh ,  Dale Harrison

IPC: G01J3/00 ,  G01N21/55 ,  G01N21/47

CPC classification number: G01J3/02 ,  G01J3/021 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/08 ,  G01J3/2803 ,  G01J3/2823 ,  G01J3/36 ,  G01N21/274 ,  G01N21/4788

Abstract: A method and apparatus is disclosed for using below deep ultra-violet (DUV) wavelength reflectometry for measuring properties of diffracting and/or scattering structures on semiconductor work-pieces is disclosed. The system can use polarized light in any incidence configuration, but one technique disclosed herein advantageously uses un-polarized light in a normal incidence configuration. The system thus provides enhanced optical measurement capabilities using below deep ultra-violet (DUV) radiation, while maintaining a small optical module that is easily integrated into other process tools. A further refinement utilizes an r-θ stage to further reduce the footprint.

Abstract translation: 公开了一种用于使用下面的深紫外（DUV）波长反射测量法来测量半导体工件上的衍射和/或散射结构的性质的方法和装置。 该系统可以使用任何入射配置的偏振光，但是本文公开的一种技术有利地使用正常入射配置中的非偏振光。 因此，该系统使用下面的深紫外（DUV）辐射提供增强的光学测量能力，同时保持容易集成到其它工艺工具中的小型光学模块。 进一步细化利用r-＆thetas; 阶段进一步减少占地面积。

公开(公告)号：US20090002711A1

公开(公告)日：2009-01-01

申请号：US12231350

申请日：2008-09-02

Applicant: Dale A. Harrison

Inventor： Dale A. Harrison

IPC: G01N21/55

CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0232 ,  G01J3/027 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/08 ,  G01J3/10 ,  G01J3/28 ,  G01J3/2823 ,  G01J3/36 ,  G01J3/42 ,  G01J3/4531 ,  G01N21/211 ,  G01N21/274 ,  G01N21/33 ,  G01N21/47 ,  G01N21/55 ,  G01N21/9501 ,  G01N2021/335

Abstract: A spectroscopy system is provided which is optimized for operation in the VUV region and capable of performing well in the DUV-NIR region. Additionally, the system incorporates an optical module which presents selectable sources and detectors optimized for use in the VUV and DUV-NIR. As well, the optical module provides common delivery and collection optics to enable measurements in both spectral regions to be collected using similar spot properties. The module also provides a means of quickly referencing measured data so as to ensure that highly repeatable results are achieved. The module further provides a controlled environment between the VUV source, sample chamber and VUV detector which acts to limit in a repeatable manner the absorption of VUV photons. The use of broad band data sets which encompass VUV wavelengths, in addition to the DUV-NIR wavelengths enables a greater variety of materials to be meaningfully characterized. Array based detection instrumentation may be exploited to permit the simultaneous collection of larger wavelength regions.

Abstract translation: 提供了一种光谱系统，其被优化用于在VUV区域中的操作并且能够在DUV-NIR区域中表现良好。 此外，该系统还包含一个光学模块，该模块提供可用于VUV和DUV-NIR中优化的可选择的源和检测器。 同样，光学模块提供通用的传送和收集光学器件，以使得能够使用类似的光点特性来收集两个光谱区域中的测量。 该模块还提供了快速参考测量数据的方法，以确保实现高度可重复的结果。 该模块还在VUV源，样品室和VUV检测器之间提供受控的环境，其作用是以可重复的方式限制VUV光子的吸收。 除了DUV-NIR波长之外，使用包含VUV波长的宽带数据集使得可以有意义地表征更多种类的材料。 可以利用基于阵列的检测仪器来允许同时收集更大的波长区域。

公开(公告)号：US20080316484A1

公开(公告)日：2008-12-25

申请号：US12205292

申请日：2008-09-05

Applicant: Sean M. Christian ,  Jess V. Ford ,  Mike Ponstingl ,  Sven Kruger ,  Margaret C. Waid ,  Bryan W. Kasperski ,  Entique Prati

Inventor： Sean M. Christian ,  Jess V. Ford ,  Mike Ponstingl ,  Sven Kruger ,  Margaret C. Waid ,  Bryan W. Kasperski ,  Entique Prati

IPC: G01J3/28

CPC classification number: G01J3/08 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0297 ,  G01J3/28 ,  G01J3/42 ,  G01J2003/1282 ,  G01J2003/1286 ,  G01N21/274

Abstract: A spectroscope designed to utilize an adaptive optical element such as a micro mirror array (MMA) and two distinct light channels and detectors. The devices can provide for real-time and near real-time scaling and normalization of signals.

Abstract translation: 设计用于利用诸如微镜阵列（MMA）和两个不同的光通道和检测器的自适应光学元件的分光镜。 这些设备可以提供信号的实时和近乎实时的缩放和归一化。

公开(公告)号：US20080315102A1

公开(公告)日：2008-12-25

申请号：US12197859

申请日：2008-08-25

Applicant: Damien WEIDMANN

Inventor： Damien WEIDMANN

IPC: G01J5/02

CPC classification number: G01J3/02 ,  G01J3/0286 ,  G01J3/08 ,  G01J3/42 ,  G01N21/276 ,  G01N21/3504 ,  G01N21/39 ,  G01N2021/399

Abstract: Method and apparatus for detecting, by absorption spectroscopy, an isotopic ratio of a sample, by passing first and second laser beams of different frequencies through the sample. Two IR absorption cells are used, a first containing a reference gas of known isotopic ratio and the second containing a sample of unknown isotopic ratio. An interlacer or reflective chopper may be used so that as the laser frequencies are scanned the absorption of the sample cell and the reference cell are detected alternately. This ensures that the apparatus is continuously calibrated and rejects the baseline noise when phase sensitive detection is used.

Abstract translation: 通过吸收光谱法，通过使不同频率的第一和第二激光束通过样品来检测样品的同位素比的方法和装置。 使用两个IR吸收单元，首先含有已知同位素比的参考气体，第二个包含未知同位素比例的样品。 可以使用隔行扫描器或反射式斩波器，使得当扫描激光频率时，交替检测样品池和参考池的吸收。 这确保了当使用相敏检测时，该设备被连续地校准并且拒绝基线噪声。

公开(公告)号：US20080285036A1

公开(公告)日：2008-11-20

申请号：US12036931

申请日：2008-02-25

Applicant: Dean G. Hafeman ,  Calvin Y. Chow

Inventor： Dean G. Hafeman ,  Calvin Y. Chow

IPC: G01N21/59

CPC classification number: G01J3/08 ,  G01J3/1804 ,  G01N21/253 ,  G01N21/31 ,  G01N21/314 ,  G01N21/6452

Abstract: Disclosed are photometric methods and devices for determining optical pathlength of liquid samples containing analytes dissolved or suspended in a solvent. The methods and devices rely on determining a relationship between the light absorption properties of the solvent and the optical pathlength of liquid samples containing the solvent. This relationship is used to establish the optical pathlength for samples containing an unknown concentration of analyte but having similar solvent composition. Further disclosed are methods and devices for determining the concentration of analyte in such samples where both the optical pathlength and the concentration of analyte are unknown. The methods and devices rely on separately determining, at different wavelengths of light, light absorption by the solvent and light absorption by the analyte. Light absorption by the analyte, together with the optical pathlength so determined, is used to calculate the concentration of the analyte. Devices for carrying out the methods particularly advantageously include vertical-beam photometers containing samples disposed within the wells of multi-assay plates, wherein the photometer is able to monitor light absorption of each sample at multiple wavelengths, including in the visible or UV-visible region of the spectrum, as well as in the near-infrared region of the electromagnetic spectrum Novel photometer devices are described which automatically determine the concentration of analytes in such multi-assay plates directly without employing a standard curve.

Abstract translation: 公开了用于确定含有溶解或悬浮在溶剂中的分析物的液体样品的光程长度的光度测定方法和装置。 所述方法和装置依赖于确定溶剂的光吸收性质和含有溶剂的液体样品的光程长度之间的关系。 该关系用于建立含有未知浓度的分析物但具有相似溶剂组成的样品的光程。 进一步公开了用于确定样品中分析物浓度的方法和装置，其中光程长和分析物浓度都是未知的。 方法和装置依赖于在不同波长的光下分别确定溶剂的光吸收和被分析物的光吸收。 被分析物的光吸收以及如此确定的光程长度被用于计算分析物的浓度。 用于实施方法的装置特别有利地包括垂直光束光度计，其包含设置在多测定板的孔内的样品，其中光度计能够监测包括在可见光或可见光区域中的多个波长的每个样品的光吸收 的光谱，以及电磁光谱的近红外区域描述了新型光度计装置，其自动确定这种多测定板中分析物的浓度，而不使用标准曲线。

公开(公告)号：US20080094626A1

公开(公告)日：2008-04-24

申请号：US11629143

申请日：2005-06-02

Applicant: Helmut Becker-Ross ,  Stefan Florek ,  Gunter Wesemann ,  Michael Okruss

Inventor： Helmut Becker-Ross ,  Stefan Florek ,  Gunter Wesemann ,  Michael Okruss

IPC: G01J3/28

CPC classification number: G01J3/1809 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0232 ,  G01J3/0237 ,  G01J3/0286 ,  G01J3/0294 ,  G01J3/08 ,  G01J3/12 ,  G01J3/2803

Abstract: The invention relates to a spectrometer arrangement (10) comprising a spectrometer (14) for producing a spectrum of a first wavelength range of radiation from a radiation source on a detector (42). Said arrangement also comprises: an Echelle grating (36) for the spectral decomposition of the radiation penetrating the spectrometer arrangement (10) in a main dispersion direction (46); a dispersing element (34) for separating the degrees by means of spectral decomposition of the radiation in a transversal dispersion direction (48) which forms an angle with the main dispersion direction of the Echelle grating (36), in such a way that a two-dimensional spectrum (50) can be produced with a plurality of separated degrees (52); an imaging optical element (24, 38) for imaging the radiation penetrating through an inlet gap (20) into the spectrometer arrangement (10), in an image plane (40); and a surface detector (42) comprising a two dimensional arrangement of a plurality of detector elements in the image plane (40). The inventive arrangement is characterised in that another spectrometer (12) comprising at least one other dispersing element (64) and another imaging optical element (60,66) is provided in order to produce a spectrum (68) of a second wavelength range of radiation, which is different from the first wavelength range, from a radiation source on the same detector (42). The spectra can be spatially or temporally separated on the detector.

Abstract translation: 本发明涉及一种分光计装置（10），其包括用于产生来自检测器（42）上的辐射源的第一波长范围的光谱仪（14）。 所述布置还包括：用于在主色散方向（46）上穿透光谱仪装置（10）的辐射的光谱分解的梯形光栅（36）; 分散元件（34），用于通过在与梯形光栅（36）的主色散方向形成角度的横向色散方向（48）上的辐射的光谱分解来分离度数，使得两个 可以用多个分离的度数（52）产生维度谱（50）; 用于在图像平面（40）中将穿过入口间隙（20）的辐射成像到成像光学装置（10）中的成像光学元件（24,38）; 以及包括所述图像平面（40）中的多个检测器元件的二维布置的表面检测器（42）。 本发明的装置的特征在于，提供包括至少一个其它分散元件（64）和另一成像光学元件（60,66）的另一个光谱仪（12），以产生第二波长范围的辐射（68） ，其与第一波长范围不同，来自相同检测器（42）上的辐射源。 光谱可以在检测器上进行空间或时间分离。

公开(公告)号：US20060192958A1

公开(公告)日：2006-08-31

申请号：US11412802

申请日：2006-04-27

Applicant: Dale Harrison

Inventor： Dale Harrison

IPC: G01J1/42 ,  G01J3/28

CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0232 ,  G01J3/027 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/08 ,  G01J3/10 ,  G01J3/28 ,  G01J3/2823 ,  G01J3/36 ,  G01J3/42 ,  G01J3/4531 ,  G01N21/211 ,  G01N21/274 ,  G01N21/33 ,  G01N21/47 ,  G01N21/55 ,  G01N21/9501 ,  G01N2021/335

Abstract: A spectroscopy system is provided which is optimized for operation in the VUV region and capable of performing well in the DUV-NIR region. Additionally, the system incorporates an optical module which presents selectable sources and detectors optimized for use in the VUV and DUV-NIR. As well, the optical module provides common delivery and collection optics to enable measurements in both spectral regions to be collected using similar spot properties. The module also provides a means of quickly referencing measured data so as to ensure that highly repeatable results are achieved. The module further provides a controlled environment between the VUV source, sample chamber and VUV detector which acts to limit in a repeatable manner the absorption of VUV photons. The use of broad band data sets which encompass VUV wavelengths, in addition to the DUV-NIR wavelengths enables a greater variety of materials to be meaningfully characterized. Array based detection instrumentation may be exploited to permit the simultaneous collection of larger wavelength regions.

Abstract translation: 提供了一种光谱系统，其被优化用于在VUV区域中的操作并且能够在DUV-NIR区域中表现良好。 此外，该系统还包含一个光学模块，该模块提供可用于VUV和DUV-NIR中优化的可选择的源和检测器。 同样，光学模块提供通用的传送和收集光学器件，以使得能够使用类似的光点特性来收集两个光谱区域中的测量。 该模块还提供了快速参考测量数据的方法，以确保实现高度可重复的结果。 该模块还在VUV源，样品室和VUV检测器之间提供受控的环境，其作用是以可重复的方式限制VUV光子的吸收。 除了DUV-NIR波长之外，使用包含VUV波长的宽带数据集使得可以有意义地表征更多种类的材料。 可以利用基于阵列的检测仪器来允许同时收集更大的波长区域。

公开(公告)号：US20050178968A1

公开(公告)日：2005-08-18

申请号：US10786178

申请日：2004-02-25

Applicant: Renee Nesnidal ,  George Skupniewicz ,  N. Nunn

Inventor： Renee Nesnidal ,  George Skupniewicz ,  N. Nunn

IPC: G01J3/08 ,  G01N21/35 ,  G02B21/08

CPC classification number: G01J3/08 ,  G02B21/088

Abstract: Mirror elements are selectively interposable in the beam paths in a dual aperture microspectrometer system to selectively bypass the aperture element in transmission or reflection modes to increase optical throughput and field of view. The system may be operated in a dual aperture transmission mode or reflection mode and in modes in which the aperture is bypassed before or after the infrared beam reaches the sample. The system may be operated to bypass the aperture both before and after the sample, which may be utilized with an array detector having multiple detector elements in which an image of the sample is formed on the array detector.

Abstract translation: 反射镜元件在双孔显微光谱仪系统中的光束路径中选择性地插入，以选择性地以透射或反射模式旁路孔径元件以增加光学吞吐量和视场。 该系统可以以双孔传输模式或反射模式操作，并且在红外光束到达样品之前或之后绕过孔径的模式。 可以操作该系统以在样品之前和之后绕过孔，其可以与具有多个检测器元件的阵列检测器一起使用，其中在阵列检测器上形成样品的图像。