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公开(公告)号：AT395580T
公开(公告)日：2008-05-15
申请号：AT07007384
申请日：2007-04-11
Applicant: ZEISS CARL MICROIMAGING GMBH
Inventor： DOBSCHAL HANS-JUERGEN , WOLLESCHENSKY RALF , BATHE WOLFGANG , STEINERT JOERG
Abstract: The unit has a diffraction grating (1) and a light bundle 0-diffraction order without circulation (12) that strikes on a deflecting device, where the device is aligned and positioned in such a manner that the bundle falls on the grating and a light bundle 1-diffraction order from the circulation (13) and a light bundle 0-diffraction order from the circulation (14) are produced. A light bundle 1-difraction order without circulation (11) and the light bundle 1-difraction order from the circulation are formed on a respective individual units of a detector line by a lens (2).
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公开(公告)号：DE69634317T2
公开(公告)日：2006-01-05
申请号：DE69634317
申请日：1996-05-08
Applicant: PERKIN ELMER CORP
Inventor： BARNARD THOMAS W
IPC: G01J1/04 , G01J3/02 , G01J3/18 , G01J3/24 , G01J3/26 , G01J3/28 , G01J3/32 , G01J3/42 , G02B5/18
Abstract: The spectrometer includes initial dispersion device receptive of source radiation to effect light radiation in the form of an initial spectrum, a number of dispersion gratings receptive of the initial spectrum and being crossed with the initial dispersion device to effect a spectrally dispersed beam, and detector device comprising a two dimensional array of photodetectors receptive of the beam for spectral detection. The dispersion grating has a grating surface comprising two surface portions. The first portion has a first groove configuration for effecting the dispersed beam in a first spectral range, and the second portion has a second groove configuration for effecting the dispersed beam in a second spectral range different from the first spectral range.
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公开(公告)号：DE10317278A1
公开(公告)日：2003-11-06
申请号：DE10317278
申请日：2003-04-11
Applicant: ZEISS CARL SMT AG
Inventor： SCHRIEVER MARTIN , HAIDNER HELMUT
Abstract: The measuring device has a wave front source for producing at least one wave front which passes through the imaging system, a diffraction grating, which can be arranged behind the imaging system in order to interact with the wave front, which is modified by the imaging system, and a spatially resolving detector associated with the diffraction grating that detects interferometric information. The wave front source has at least one measuring mask embodied on the mask along with a working mask. The invention also relates to a corresponding projection illumination installation, a pattern for use with such an installation in microlithography and a method for signal evaluation.
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公开(公告)号：DE10114028A1
公开(公告)日：2001-10-11
申请号：DE10114028
申请日：2001-03-22
Applicant: USHIO RES INST OF TECHNOLOGY I
Inventor： TADA AKIFUMI
Abstract: The spectroscope is designed with an outlet slit or a light distribution detector, which is arranged in a focal plane of the optical imaging system (2). So that the diffraction grating (1) is a reflection grating, and the optical collimation system also serves as the optical imaging system. So that at least between the optical collimation system and the diffraction grating, an optical beam diameter widening system is arranged, in order to widen a diameter of a light beam collimated by the optical collimation system, at least in a dispersion direction of the diffraction grating.
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公开(公告)号：CA2178247C
公开(公告)日：2001-05-01
申请号：CA2178247
申请日：1996-06-05
Applicant: VARIAN ASSOCIATES
Inventor： ZANDER ANDREW T , CHIEN RING-LING , COOPER CHARLES B III
Abstract: A solid-state detector for use in an atomic spectrometer comprises a plurali ty of arrays of sensing elements, or pixels, each of the arrays being positioned a long and on the locations of spectral signals on a focal plane of an echelle grating spectro meter. The sensing elements are positioned along the many diffraction orders presented on a two- dimensional echelle grating focal plane so that at least one element is loca ted at each and every resolution element regardless of global x-y coordinate positioning of the elements or with reference to each other. The result is a series of skewed lines of s ensing elements, those lines being in the same shape as the series of diffraction order lines which comprise an echelle spectrum. The solid-state detector is particularly useful in an a tomic spectrometer wherein an echelle grating is used to diffract incident radiati on such that the various components of the radiation may be observed.
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Patent Agency Ranking
公开(公告)号：DE69518244D1
公开(公告)日：2000-09-07
申请号：DE69518244
申请日：1995-05-15
Applicant: MULTICHANNEL INSTR AB SKARPNAE
Inventor： LINDBLOM PETER
Abstract: PCT No. PCT/SE95/00543 Sec. 371 Date Jan. 21, 1997 Sec. 102(e) Date Jan. 21, 1997 PCT Filed May 15, 1995 PCT Pub. No. WO95/31703 PCT Pub. Date Nov. 23, 1995An apparatus for carrying out spectral analysis of optical radiation emitted from a light source (11) comprises a spectral detector (1) having an entrance aperture (10) for the radiation from thelight source (11), a first imaging optical component (11), a first imaging optical component (12), a diffraction grating (14) for wavelength dispersion of the radiation, order sorting means (131, 132) for separation of the spectral orders of the diffraction grating (14), a second imaging optical component (15), and a detecting unit (16) for registration of the light source spectrum divided into order spectra through the order sorting means (131, 132). The order sorting means (131, 132) comprise at least two refractive optical components manufactured from different material. The two refractive optical components (131 and 132) together with the diffraction grating (14) and the imaging optical components (12 and 15) produce a substantially uniform distribution of the order spectra on the detector unit (16). Favourably the order sorting means (131, 132), the diffraction grating (14) and the imaging optical components (12, 15) also co-act to produce a substantially stigmatic image of the entrance aperture (10) in at least one point on the detector unit (16).
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公开(公告)号：DE29906678U1
公开(公告)日：1999-07-29
申请号：DE29906678
申请日：1999-04-15
Applicant: ZEISS CARL JENA GMBH
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公开(公告)号：AU5248596A
公开(公告)日：1996-12-05
申请号：AU5248596
申请日：1996-05-24
Applicant: PERKIN ELMER CORP
Inventor： BARNARD THOMAS W
Abstract: The spectrometer includes initial dispersion device receptive of source radiation to effect light radiation in the form of an initial spectrum, a number of dispersion gratings receptive of the initial spectrum and being crossed with the initial dispersion device to effect a spectrally dispersed beam, and detector device comprising a two dimensional array of photodetectors receptive of the beam for spectral detection. The dispersion grating has a grating surface comprising two surface portions. The first portion has a first groove configuration for effecting the dispersed beam in a first spectral range, and the second portion has a second groove configuration for effecting the dispersed beam in a second spectral range different from the first spectral range.
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公开(公告)号：DE69206641T2
公开(公告)日：1996-05-02
申请号：DE69206641
申请日：1992-02-06
Applicant: JAPAN RES DEV CORP , NAGOSHI TOSHIYUKI , ICHIMURA TSUTOMU
Inventor： ICHIMURA TSUTOMU , NAGOSHI TOSHIYUKI , INABA FUMIO
Abstract: A compact, high sensitive, multi-wavelength spectral analyzer capable of simultaneously obtaining a spectral distribution of extremely weak radiation such as bio-luminescence, chemiluminescence, extremely weak fluorescence caused by excitation light, Raman scattered light, etc., with extremely high luminosity and without wavelength scanning, is disclosed. The spectral analyzer comprises a spectroscope (1) and a high sensitive, one-or two-dimensional photodetector (6). The spectroscope includes an entrance slit (2), a collimator lens (3) of high luminosity disposed such that a focal point of the collimator lens is coincident with the entrance slit to convert light emerging therefrom into parallel rays, a reflection diffraction grating (4) that diffracts the parallel rays from the collimator lens to produce spectra, and an imaging lens (5) that focuses the parallel rays diffracted by the reflection diffraction grating (4) on an image plane (P) thereof to form a spectral image. The photodetector (6) is disposed on the image plane (P) of the imaging lens (5).
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公开(公告)号：SE502809C2
公开(公告)日：1996-01-22
申请号：SE9401669
申请日：1994-05-16
Applicant: NOW OPTICS AB
Inventor： LINDBLOM PETER
Abstract: PCT No. PCT/SE95/00543 Sec. 371 Date Jan. 21, 1997 Sec. 102(e) Date Jan. 21, 1997 PCT Filed May 15, 1995 PCT Pub. No. WO95/31703 PCT Pub. Date Nov. 23, 1995An apparatus for carrying out spectral analysis of optical radiation emitted from a light source (11) comprises a spectral detector (1) having an entrance aperture (10) for the radiation from thelight source (11), a first imaging optical component (11), a first imaging optical component (12), a diffraction grating (14) for wavelength dispersion of the radiation, order sorting means (131, 132) for separation of the spectral orders of the diffraction grating (14), a second imaging optical component (15), and a detecting unit (16) for registration of the light source spectrum divided into order spectra through the order sorting means (131, 132). The order sorting means (131, 132) comprise at least two refractive optical components manufactured from different material. The two refractive optical components (131 and 132) together with the diffraction grating (14) and the imaging optical components (12 and 15) produce a substantially uniform distribution of the order spectra on the detector unit (16). Favourably the order sorting means (131, 132), the diffraction grating (14) and the imaging optical components (12, 15) also co-act to produce a substantially stigmatic image of the entrance aperture (10) in at least one point on the detector unit (16).
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