Abstract:
The present invention provides an optical device that is miniature, is highly sensitive and has a simplified package, and a manufacturing method thereof with high production efficiency and high reliability. The present invention is an optical device comprising: a photoelectric conversion element (50) having at least one photoelectric conversion portion (1) which is formed on a substrate (10); a sealing material (14); and a connection terminal (3). The optical device comprises an optical window which is an interface between the photoelectric conversion element (50) and an outside of the optical device; and an aperture (6) formed in the sealing material 14, and whose bottom face is the optical window. An entire face of the optical window is exposed to the outside. An optical adjustment element (13) may be formed on the interface. In this case, the interface between the optical adjustment element (13) and the outside is the optical window.
Abstract:
The present invention provides a current measuring apparatus having an improved structure to inhibit the possible adverse effect of a current in a different phase and the possible generation of an induced electromotive force caused by a measurement target current, enabling the measurement target current to be accurately detected even with the small size of the apparatus. The current measuring apparatus includes a printed circuit board 1 having Hall elements 2a, 2b and a signal processing integrated circuit 3 mounted thereon, the Hall elements 2a, 2b sensing a magnetic field generated by a current flowing through a current measurement target bus bar 4a, the signal processing integrated circuit 3 processing sensing outputs from the Hall elements 2a, 2b to calculate a value for the current flowing through the bus bar 4a. Magnetic sensing surfaces of the Hall elements 2a, 2b are arranged substantially perpendicularly to the direction of the magnetic field generated by the current flowing through the bus bar 4a. Further, the printed circuit board 1 is fixed to the bus bar 4a so that a circuit board surface of the printed circuit board 1 having a wire electrically connecting the Hall elements 2a, 2b to the signal processing integrated circuit 3 is positioned substantially parallel to the direction of the magnetic field.
Abstract:
A nonaqueous battery which comprises unit battery layers in a battery jar, each unit battery layer composed of a positive electrode plate having a positive electrode active material only on one side of a collector foil, a negative electrode plate having a negative electrode active material only on one side of a collector foil and a separator, and in which a surface of the positive electrode plate having thereon the positive electrode active material and a surface of the negative electrode plate having thereon the negative electrode active material face each other through the separator, and a surface of the positive electrode plate not having thereon the positive electrode active material and a surface of the negative electrode plate not having thereon the negative electrode active material face each other through an insulating film. According to the invention, safety of the battery is ensured since rapid temperature rise is suppressed inside even in the event of abnormal heating from outside, crushing of the battery in a direction of lamination, or short circuit between the positive electrode active material and the negative electrode due to nailing and the like.
Abstract:
There are provided an azimuth measurement device and its method for realizing an update of an offset calculated from the data acquired by azimuth measurement. A geomagnetism output measured by a 3-axis magnetic sensor (10) is amplified by an amplification section (13) and input to an A/D conversion section (14). A chopper section (11) is arranged for switching the terminals for driving an X-axis magnetic sensor (2), a Y-axis magnetic sensor (3), and a Z-axis magnetic sensor (4) and applies drive voltage output from a drive power source section (12) to the X-axis magnetic sensor (2), the Y-axis magnetic sensor (3), and the Z-axis magnetic sensor (4). The output amplified value amplified by the amplification section (13) is converted from an analog signal to a digital signal by the A/D conversion section (14) and then is input to a sensitivity/offset correction calculation section (16). Output data from this sensitivity/offset correction calculation section (16) is input to an azimuth calculation section (20) and the corresponding azimuth information is output. A reliability information calculation section (19) outputs reliability information.
Abstract:
A low-cost current sensor suitable for mass production and a manufacturing method thereof are provided. The current sensor is small with high sensitivity and can be packaged in a standard assembly line which is normally used when an integrated circuit is manufactured. Further, it is possible to obtain a sufficient shielding effect against a disturbance flux without degrading the detecting sensitivity of a flux. A first magnetic material 50 is bonded to the lower part of a current conductor 22C. The first magnetic material 50 has the function of converging and amplifying a flux 3 generated by thecurrent to be measured. A second magnetic material 51 is bonded above a magnetic sensor chip 20. The second magnetic material 51 has a shielding function against a disturbance flux entering from the outside.
Abstract:
A sputtering apparatus (10) includes: a first target holder (111) and a second target holder (112) holding a first target (T1) and a second target (T2) respectively such that their surfaces face each other; a substrate holder (16) provided on a side of a plasma generation region (R) which is a region between the first target (T1) and the second target (T2) respectively held by the first target holder (111) and the second target holder (112); a first main magnetic field generation unit (121) and a second main magnetic field generation unit (122) respectively provided on the back surface sides of the first target holder (111) and the second target holder (112), and configured to generate a first main magnetic field and a second main magnetic field respectively on surfaces of the first target (T1) and the second target (T2) held, in which magnets are disposed such that opposite poles face each other; a power supply configured to generate an electric field in a plasma generation region (R) by applying predetermined potentials to the first target holder (111) and the second target holder (112); a radio-frequency electromagnetic field generation unit (17) configured to generate a radio-frequency electromagnetic field in the plasma generation region (R), which is provided on a side of the plasma generation region (R) facing the substrate holder (16) with the plasma generation region (R) between them; and a plasma source gas introduction unit (15) configured to introduce a plasma source gas into the plasma generation region (R), wherein means for generating a magnetic field does not exist at the ends of the first target holder (111) and the second target holder (112) on a side of radio-frequency electromagnetic field generation unit (17).
Abstract:
Provided is a dielectric barrier discharge type plasma generator that is provided in a gas treatment apparatus for generating plasma by ionizing gas flowing in a gas flow path and can prevent electric leakage and undesirable discharge from occurring. The plasma generator 10 includes an AC power supply 14, a power supply electrode 111 and a ground electrode 112, one of which is disposed in a gas flow path and the other of which is a conductive wall constituting the gas flow path, an inflexible connection member 13 configured to electrically connect the AC power supply 14 and the power supply electrode 111, and an insulating material (power supply side insulating material 121, ground side insulating material 122) covering a side of one of the power supply electrode 111 and the ground electrode 112, the side facing the other electrode. By using the inflexible connection member 13, even if vibration is transmitted from the gas flowing in the gas flow path to the connection member 13 via the power supply electrode 111, the connection member 13 does not unexpectedly come into contact with or does not come close to a member other than the power supply electrode in the plasma generator 10, so that it is possible to prevent electric leakage and undesirable discharge from occurring.
Abstract:
The present invention relates to a magnetic sensor with a sensitivity measuring function and a sensitivity measuring device and a method thereof having a magnetic substance on a semiconductor substrate provided with a plurality of Hall elements. Magnetic sensitivity surfaces (31) detect flux density, and a switching unit (32) extracts magnetic field intensity information of each axis, and inputs it to a sensitivity calculating unit (34) via an amplifier unit (33). The sensitivity calculating unit (34) calculates the sensitivity from the magnetic field intensity information about the individual axes from the magnetic sensitivity surfaces (31). The sensitivity calculating unit includes an axial component analyzing unit (34a) for analyzing the flux density from the magnetic sensitivity surfaces (31) into magnetic components of the individual axes; a sensitivity decision unit (34b) for deciding the sensitivity by comparing the individual axial components of the magnetic field intensity from the axial component analyzing unit (34a) with a reference value; and a sensitivity correction unit (34c) for carrying out sensitivity correction in accordance with the sensitivity information from the sensitivity decision unit (34b). A sensor diagnostic unit (39) carries out self-diagnosis of the validity of the sensitivity of the magnetic sensor according to the sensitivity information, and performs self-sensitivity correction (adjustment).