Hybrid optical modulator
    108.
    发明授权
    Hybrid optical modulator 有权
    混合光调制器

    公开(公告)号:US09568750B2

    公开(公告)日:2017-02-14

    申请号:US13861564

    申请日:2013-04-12

    Abstract: An optical modulator includes an input port, a first waveguide region comprising silicon and optically coupled to the input port, and a waveguide splitter optically coupled to the first waveguide region and having a first output and a second output. The optical modulator also includes a first phase adjustment section optically coupled to the first output and comprising a first III-V diode and a second phase adjustment section optically coupled to the second output and comprising a second III-V diode. The optical modulator further includes a waveguide coupler optically coupled to the first phase adjustment section and the second phase adjustment section, a second waveguide region comprising silicon and optically coupled to the waveguide coupler, and an output port optically coupled to the second waveguide region.

    Abstract translation: 光调制器包括输入端口,包括硅并且光耦合到输入端口的第一波导区域,以及光耦合到第一波导区域并具有第一输出和第二输出的波导分配器。 光调制器还包括光耦合到第一输出并包括第一III-V二极管的第一相位调整部分和与第二输出光耦合并包括第二III-V二极管的第二相位调整部分。 光调制器还包括光耦合到第一相位调整部分和第二相位调整部分的波导耦合器,包括硅并光耦合到波导耦合器的第二波导区域以及光耦合到第二波导区域的输出端口。

    BACK SIDE VIA VERTICAL OUTPUT COUPLERS
    110.
    发明申请
    BACK SIDE VIA VERTICAL OUTPUT COUPLERS 审中-公开
    背面通过垂直输出耦合器

    公开(公告)号:US20160306111A1

    公开(公告)日:2016-10-20

    申请号:US15133920

    申请日:2016-04-20

    Inventor: Damien Lambert

    Abstract: A method forms a vertical output coupler for a waveguide, formed of waveguide material and disposed within a layer stack on a top surface of a wafer. The method includes etching through a portion of the wafer to form a via that exposes the waveguide material, and etching the waveguide material to remove at least a first portion of the waveguide. The etching forms a tilted plane in the waveguide material. The method further includes coating the first tilted plane with one or more reflective layers, to form a tilted mirror in contact with the first tilted plane in the waveguide material. The tilted mirror forms the vertical output coupler such that light propagating through the waveguide is deflected by the tilted mirror, and exits the waveguide.

    Abstract translation: 一种方法形成用于波导的垂直输出耦合器,由波导材料形成并设置在晶片顶表面上的层叠中。 该方法包括蚀刻通过晶片的一部分以形成暴露波导材料的通孔,以及蚀刻波导材料以去除波导的至少第一部分。 蚀刻在波导材料中形成倾斜平面。 该方法还包括用一个或多个反射层涂覆第一倾斜平面,以形成与波导材料中的第一倾斜平面接触的倾斜反射镜。 倾斜的反射镜形成垂直输出耦合器,使得通过波导传播的光被倾斜的反射镜偏转,并离开波导。

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