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公开(公告)号：KR1019970006988B1
公开(公告)日：1997-05-01
申请号：KR1019930004520
申请日：1993-03-23
Applicant: 대우전자주식회사
Inventor： 민용기
IPC: H04N5/74
Abstract: A method for manufacturing a mirror used in a projection type of image displaying system is disclosed. First, a separating layer(23) is formed on the upper surface of a mirror plate(21). And then, a metal layer(27) is piled on the surface of a transparent layer(25) which is piled on the separating layer(23). Thereafter, an actuator(29) is attached at the surface of the metal layer(27). Finally, the separating layer(23) is removed so as to separate the mirror plate(21).
Abstract translation: 公开了一种在投影型图像显示系统中使用的镜子的制造方法。 首先，在镜板（21）的上表面上形成分离层（23）。 然后，将金属层（27）堆叠在堆叠在分离层（23）上的透明层（25）的表面上。 此后，致动器（29）附接在金属层（27）的表面。 最后，去除分离层（23）以分离镜板（21）。
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公开(公告)号：KR1019970006695B1
公开(公告)日：1997-04-29
申请号：KR1019930025876
申请日：1993-11-30
Applicant: 대우전자주식회사
Inventor： 민용기
IPC: H04N5/74
Abstract: A method of fabricating an optical path controller includes the steps of forming a sacrificial layer and supports on a driving substrate on which contact terminals are formed, the sacrificial layer having no contact with the contact terminals, the supports being formed on a region where the sacrificial layer is not formed, the supports surrounding the contact terminals, the driving substrate including transistors arranged in matrix form, removing a predetermined portion of the supports to expose the contact terminals, thereby forming trenches and forming plugs in the trenches, sequentially forming a signal electrode electrically connected to the plugs, modification portion, bias electrode and photoresist layer on the sacrificial layer and supports, exposing and developing the photoresist layer to form a photoresist pattern and etching a predetermined portion of the bias electrode, modification portion, signal electrode, supports and sacrificial layer using the photoresist pattern as a mask to expose a predetermined portion of the driving substrate, forming a mirror body on a region other than the one side of the supports and a predetermined portion of the driving substrate, removing the photoresist pattern and sacrificial layer and forming a mirror on the mirror body.
Abstract translation: 制造光路控制器的方法包括以下步骤：在其上形成有接触端子的驱动基板上形成牺牲层和支撑体，牺牲层不与接触端子接触，支撑件形成在牺牲层 层不形成，围绕接触端子的支撑体，驱动基板包括以矩阵形式布置的晶体管，移除支撑体的预定部分以露出接触端子，从而在沟槽中形成沟槽并形成插塞，顺序地形成信号电极 电连接到牺牲层上的插头，修改部分，偏置电极和光致抗蚀剂层，并且支撑，曝光和显影光致抗蚀剂层以形成光致抗蚀剂图案并蚀刻偏置电极，修改部分，信号电极，支架和 使用光致抗蚀剂图案作为牺牲层 掩模以暴露驱动基板的预定部分，在除了支撑体的一侧以外的区域和驱动基板的预定部分上形成镜体，去除光致抗蚀剂图案和牺牲层，并在镜体上形成反射镜 。
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Patent Agency Ranking
公开(公告)号：KR1019970006692B1
公开(公告)日：1997-04-29
申请号：KR1019930024396
申请日：1993-11-16
Applicant: 대우전자주식회사
Inventor： 민용기
IPC: H04N5/74
Abstract: A method of fabricating an optical path controller of a projection-type image display device includes the steps of selectively forming a sacrificial layer 21 on a driving substrate 20 and forming a signal electrode 22 on an exposed surface of the substrate, forming a ceramic layer 23 on the overall exposed surface of the substrate and selectively forming a bias electrode 24 thereon, forming a support 25 on the ceramic layer 23 and forming a sacrificial layer 26 on the bias electrode 24, forming a body 27 on the overall surface of the substrate, patterning the body 27, sacrificial layer 26, support 25, bias electrode 24, ceramic layer 23, signal electrode 22 and sacrificial layer 21 by pixels and removing the sacrificial layers 21 and 26, and forming a mirror on the body 27.
Abstract translation: 制造投影型图像显示装置的光路控制器的方法包括以下步骤：在驱动基板20上选择性地形成牺牲层21，并在基板的暴露表面上形成信号电极22，形成陶瓷层23 在衬底的总体暴露表面上并选择性地在其上形成偏置电极24，在陶瓷层23上形成支撑体25并在偏置电极24上形成牺牲层26，在衬底的整个表面上形成主体27， 通过像素图案化主体27，牺牲层26，支撑件25，偏置电极24，陶瓷层23，信号电极22和牺牲层21，并去除牺牲层21和26，以及在主体27上形成反射镜。
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公开(公告)号：KR1019970003461B1
公开(公告)日：1997-03-18
申请号：KR1019930019454
申请日：1993-09-23
Applicant: 대우전자주식회사
IPC: H04N5/74
Abstract: After an interlocking ceramic plates to stick together, spread the conductive metal film of aluminium, copper or nickel, by sputtering or by vacuum vaporizing on the one surface of the ceramic wafer(49) and form a signal terminals(51) by means of photo-lithography. And place the ceramic wafer(49) on the driving base material, form the second groove(57) which is at a right angle to modifier(45). And then form a driving delivery part(65) on the detachment layer(63), connect a bias terminal(61) with the wiring pattern(71) availing the metal wire(69) and complete a light path control device.
Abstract translation: 在互锁的陶瓷板粘合在一起之后，通过在陶瓷晶片（49）的一个表面上溅射或通过真空蒸发来扩散铝，铜或镍的导电金属膜，并通过照片形成信号端子（51） -lithography。 并将陶瓷晶片（49）放置在驱动基材上，形成与改性剂（45）成直角的第二槽（57）。 然后在分离层（63）上形成驱动传递部（65），将偏置端子（61）与利用金属线（69）的布线图案（71）连接，并且完成光路控制装置。
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公开(公告)号：KR1019970003448B1
公开(公告)日：1997-03-18
申请号：KR1019930013843
申请日：1993-07-21
Applicant: 대우전자주식회사
Inventor： 민용기
IPC: H04N5/74
CPC classification number: G02B26/0858 , H01L27/20 , H01L41/0986 , H01L41/332 , Y10S359/904 , Y10T29/42
Abstract: a driving substrate having transistors and pads connected with the transistors electrically on its surface; an actuator array where actuators are arranged in several matrices in order to connect a first and a second transformation part and a first and a second bias electrode with those of the adjacent actuator; and a mirror which comprises a reflective surface, with its bottom attached to insulation layers of the actuators. The actuator comprises: the first and the second transformation part formed on the driving substrate; a signal electrode formed on the bottom surface of the transformation parts and contacted with a transistor; the first and the second bias electrode projected to the top of a groove on the top surface of the transformation parts; and insulation layers formed on top of the first and the second bias electrode.
Abstract translation: 驱动基板，其表面上具有与晶体管电连接的晶体管和焊盘; 致动器阵列，其中致动器布置在几个矩阵中，以便将第一和第二变换部分以及第一和第二偏置电极与相邻致动器的第一和第二偏置电极连接; 以及包括反射表面的反射镜，其底部连接到致动器的绝缘层。 致动器包括：形成在驱动基板上的第一和第二变换部; 信号电极，形成在所述变换部分的底表面上并与晶体管接触; 所述第一偏置电极和所述第二偏置电极投影到所述变换部件的顶面上的槽的顶部; 以及形成在第一和第二偏置电极的顶部上的绝缘层。
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公开(公告)号：KR1019970008493A
公开(公告)日：1997-02-24
申请号：KR1019950023349
申请日：1995-07-31
Applicant: 대우전자주식회사
Inventor： 민용기
IPC: H01L21/768
Abstract: 본 발명은 광로 조절 장치의 콘택홀을 통하여 패드와 작동 전극을 연결시키기 위한 방법을 개시한다. 본 발명은 구동 기판상에 형성된 제1절연층을 패터닝시켜서 콘택홀을 형성시키고 상기 제1절연층상에 도전체 금속을 적층시킨 후 일부를 식각시킨 제1도전층을 형성시키는 제1단계와, 상기 제1도전층상에 제2절연층과 제2도전층을 순차적으로 형성시키는 제2단계로 이루어지고 상기 제2절연층은 급가열 공정에 의하여 열처리되는 것을 특징으로 하는 광로 조절 장치의 콘택홀 배선 방법에 의해 달성되며 이에 의해서 도전층간의 전기적 쇼트 현상을 방지시키고 평탄한 표면을 제공하므로 광로 조절 장치의 성능을 향상시킬 수 있다.
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公开(公告)号：KR1019970008408A
公开(公告)日：1997-02-24
申请号：KR1019950023397
申请日：1995-07-31
Applicant: 대우전자주식회사
Inventor： 민용기
IPC: H01L21/31
Abstract: 본 발명은 광로 조절 장치의 콘택홀 주위를 평탄화시키기 위한 다층 배선 평탄화 방법을 개시한다. 본 발명은 구동 기판상에 형성된 제1절연층을 패터닝시켜서 형성된 콘택홀을 통하여 패드와 전기적으로 연결된 제1도전층을 형성시키는 제1단계와, 상기 제1도전층상에 세라믹을 소정 두께로 적층시키고 열처리시켜서 제2절연층을 형성시키는 제2단계와, 상기 제2절연층상에 절연 물질을 적층시킨 후 에칭 백 공정에 의하여 제3절연층을 형성시키는 제3단계로 이루어진 광로 조절 장치의 다층 배선 평탄화 방법에 의해 달성되며 이에 의해서 도전층간의 전기적 쇼트 현상을 방지시키고 평탄한 표면을 제공하므로 광로 조절 장치의 성능을 향상시킬 수 있다.
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