公开(公告)号：US20040075831A1

公开(公告)日：2004-04-22

申请号：US10653252

申请日：2003-09-03

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Yasuyuki Suzuki ,  Yoshihiro Sanpei ,  Makoto Komiyama ,  Kenji Ogino ,  Raiju Okada ,  Shuuhei Okada ,  Shin Kamei

IPC: G01J003/28

CPC classification number: G01J3/12 ,  G01J3/2803

Abstract: The present invention relates to a spectrometer whereby the accuracy of wavelength measurement can be improved without being affected by the environment of use. The present invention is characterized by improvements made to a spectrometer for spectrally dividing the light under measurement by transmitting the components thereof at different, wavelength-by-wavelength angles, and receiving and detecting the light under measurement thus spectrally divided by the chromatic dispersion device using an optical detector. The apparatus according to the present invention comprises a refractive index compensation means for compensating changes in the angle at which the chromatic dispersion device transmits the light under measurement, according to changes in the refractive index of the medium in which the chromatic dispersion device is placed.

Abstract translation: 本发明涉及一种能够提高波长测量精度而不受使用环境的影响的光谱仪。 本发明的特征在于对光谱仪进行的改进，用于通过以不同的波长一个波长的角度透射其分量来光谱分割测量的光，并且接收和检测由色散装置上光谱分割的光，使用 光学检测器。 根据本发明的装置包括折射率补偿装置，用于根据其中放置色散装置的介质的折射率的变化来补偿色散装置透射测量光的角度的变化。

公开(公告)号：US20040070755A1

公开(公告)日：2004-04-15

申请号：US10612227

申请日：2003-07-02

Inventor： Thomas Fuhrmann ,  Wolfgang Schmid ,  Michael Pahlke

IPC: G01J003/28

CPC classification number: G01J3/02 ,  G01J3/0218 ,  G01J3/28

Abstract: An optical spectrometer comprises at least two coupling apertures with different mode field diameters, a means for dispersing the light beams exiting each of the coupling apertures along a dispersion axis and at least two decoupling apertures on which the dispersed light beams are imaged and whose mode field diameters each correspond to the mode field diameters of the associated coupling apertures. Due the enlarged mode field diameter, a larger spectral fraction of dispersed light beams, i.e., light of a larger spectral bandwidth, can be coupled into the decoupling aperture than into the decoupling aperture.

Abstract translation: 光学光谱仪包括具有不同模场直径的至少两个耦合孔径，用于沿着色散轴线分散离开每个耦合孔的光束的装置和分散光束成像的至少两个去耦孔，并且其模场 直径各自对应于相关联的联接孔的模场直径。 由于放大的模场直径，分散光束的较大光谱分数，即较大光谱带宽的光可以耦合到去耦孔径中而不是去耦孔径。

公开(公告)号：US20040036871A1

公开(公告)日：2004-02-26

申请号：US10621648

申请日：2003-07-17

Inventor： Vanessa Mary Joy McCallum ,  Martin Kaselis ,  Hans Heinrich Egli

IPC: G01J003/28

CPC classification number: G01J3/4406 ,  G01J3/0275 ,  G01J3/0291 ,  G01J3/28

Abstract: A spectrometry instrument with exchangeable accessories (34, 48, 50, 52) providing, for example, different sample presentation facilities. The accessories include a manually operable cam-lock facility (54, 68) for quick and easy attachment of an accessory to the instrument. The instrument also includes an electrical circuit (86-90), which is completed by a circuit portion (100) in an accessory when the accessory is attached to the instrument, for generating a unique identifying voltage (94) to thereby identify that accessory. This allows for automatic loading in a controlling computer of programs for setting up and running the instrument for measurement regimes using that accessory. The spectrometry instrument is preferably a spectrophotometer used for phosphorescence decay measurements in which sequential phosphorescence emission measurements data from each of a number of excitation cycles applied to a sample are taken and then reassembled into a correct time sequence to define a phosphorescence decay characteristic for the sample, that is, measured data points from a second (and subsequent) excitation cycle are interleaved with those from a first excitation cycle. This significantly reduces the time for establishing a phosphorescence decay characteristic.

Abstract translation: 一种具有可交换附件（34,48,50,52）的光谱仪器，其提供例如不同的样品呈现设备。 附件包括一个可手动操作的凸轮锁定设备（54,68），用于将附件快速方便地附接到仪器上。 仪器还包括一个电路（86-90），当附件附接到仪器上时，该电路由附件中的电路部分（100）完成，用于产生唯一的识别电压（94），从而识别该附件。 这允许在控制计算机中自动加载用于使用该附件设置和运行用于测量方案的仪器的程序。 光谱仪器优选是用于磷光衰变测量的分光光度计，其中采用从施加到样品的多个激发循环中的每一个的顺序磷光发射测量数据，然后重新组装成正确的时间序列，以定义样品的磷光衰减特性 也就是说，来自第二激励周期（和随后）的测量数据点与来自第一激励周期的测量数据点交错。 这显着地减少了建立磷光衰变特性的时间。

公开(公告)号：US20040021861A1

公开(公告)日：2004-02-05

申请号：US10328713

申请日：2002-12-23

Inventor： E. Neil Lewis ,  Kenneth S. Haber

IPC: G01J003/28

CPC classification number: G01J3/02 ,  G01J3/0218 ,  G01J3/0229 ,  G01J3/26 ,  G01J3/28 ,  G01J3/2803 ,  G01J3/42 ,  G01J3/51 ,  G01N21/31 ,  G01N21/65 ,  G01N2021/651

Abstract: Spectrometric apparatus that include an array of detector elements and exhibits a number of capabilities is disclosed. The elements can be responsive to incident radiation to produce an output signal that includes information from the incident radiation. A spectrally selective element can be located in an optical path between the radiation source and the array, with an analysis module responsive to the output signal operative to analyze spatial distribution of spectral information received by the array. The apparatus can also correct for differences in intensity and spectral variability for spectral image signals and/or compare the spectral image signals with a pattern in spatial-spectral coordinate space. Detector elements can be responsive to scattering, and spatial information in their output can be analyzed.

Abstract translation: 公开了包括检测器元件阵列并展现多种能力的光谱仪。 这些元件可以响应于入射辐射以产生包括来自入射辐射的信息的输出信号。 光谱选择元件可以位于辐射源和阵列之间的光路中，分析模块响应于输出信号进行操作以分析由阵列接收的光谱信息的空间分布。 该装置还可以校正光谱图像信号的强度和光谱变化的差异和/或将光谱图像信号与空间谱坐标空间中的图案进行比较。 检测器元件可以响应于散射，并且可以分析其输出中的空间信息。

公开(公告)号：US20030202180A1

公开(公告)日：2003-10-30

申请号：US10422558

申请日：2003-04-24

Inventor： Juergen Gobel ,  Werner Hoyme ,  Martin Goetz ,  Wilhelm Schebesta

IPC: G01J003/42 ,  G01J003/28 ,  G01J005/02

CPC classification number: G01J3/02 ,  G01J3/0218 ,  G01J3/0256 ,  G01J3/36 ,  G01J2001/0481 ,  G01N21/31 ,  G01N21/3563 ,  G01N21/474 ,  G01N21/59 ,  G01N21/8901 ,  G01N2021/3155

Abstract: An optical measuring arrangement, particularly for quality control in continuous material flow processes, comprising a measuring head which is arranged immediately adjacent to a measurement object, a measurement light source which is held at the measuring head for illuminating a measurement spot on the measurement object, a measurement light reception device, at least one spectrometer which is optically coupled with the measurement light reception device via a light-conducting device, wherein the spectrometer and the light-conducting device are received in the measuring head, and a signal processing device which is likewise received in the measuring head. This results in a compact arrangement for reflection measurement which is easy to assemble and which, beyond this, supplies very accurate measurement results. Further, a measuring arrangement operating on the principle of spectroscopy is suggested for transmission measurement. The disclosure further relates to a combined reflection and transmission measurement device which carries out both measuring processes simultaneously.

公开(公告)号：US20030107733A1

公开(公告)日：2003-06-12

申请号：US10311994

申请日：2002-12-23

Inventor： Kouichi Oka ,  Makoto Okawauchi

IPC: G01J003/28

CPC classification number: G01J3/2803 ,  G01J3/28

Abstract: In a spectrum measuring instrument of the present invention, a detecting surface (13a) of a detector (13) is a two-dimensional detecting surface and spectrum light coming out from a spectroscope is irradiated to a region A on the detecting surface (13a). Signal intensity at the regions on the detecting surface (13a) other than the region A where the spectrum light is irradiated is subtracted from signal intensity on the region A. Consequently, it is possible to obtain an accurate spectrum intensity signal by processing a detection signal in such a manner that adverse effects of stray light generated inside the spectrum measuring instrument and unwanted light generated by reflection and diffraction occurring on the surface of a detecting element are removed (FIG. 4).

Abstract translation: 在本发明的光谱测量仪中，检测器（13）的检测表面（13a）是二维检测表面，并且从检测表面（13a）上的区域A照射从分光器出射的光谱光， 。 从区域A的信号强度中减去除了照射光谱的区域A以外的检测面（13a）上的区域的信号强度。因此，可以通过处理检测信号来获得准确的光谱强度信号 以这样的方式，消除了在光谱测量仪器内部产生的杂散光的不利影响和在检测元件的表面上发生的由反射和衍射产生的不需要的光（图4）。

公开(公告)号：US20030098975A1

公开(公告)日：2003-05-29

申请号：US10302379

申请日：2002-11-22

Applicant: Ando Electric Co., Ltd.

Inventor： Tohru Mori ,  Tsutomu Kaneko ,  Toshikazu Yamamoto

IPC: G01J003/28 ,  G01J003/18

CPC classification number: G01J3/02 ,  G01J3/0264 ,  G01J3/0286

Abstract: An optical spectrum analyzer comprises a refractive grating which extracts a specific wavelength of light which is incident to be measured and outputs as a component light, an optical detector which measures optical intensity of the component light, a container in which the refractive grating and the optical detector are provided, a gas filling port and a gas exhaust port, for performing a replacement of air with a gas, which are provided in the container, are provided. By doing this, the optical spectrum analyzer which can measure level of the light to be measured having a specific wavelength accurately without causing the absorption of the specific wavelength by an OH group.

Abstract translation: 光谱分析仪包括：折射光栅，其提取入射到被测量的特定波长的光并作为分量光输出;测量分量光的光强度的光学检测器;折射光栅和光学器件的容器 提供检测器，设置在容器中的用于执行用气体替换空气的气体填充口和排气口。 通过这样做，可以精确地测量具有特定波长的待测光的水平而不会由OH基吸收特定波长的光谱分析仪。

公开(公告)号：US20030048441A1

公开(公告)日：2003-03-13

申请号：US10277439

申请日：2002-10-21

Inventor： Christopher J. Manning

IPC: G01J003/28

CPC classification number: G01J3/453 ,  G01B9/02061 ,  G01J3/4532 ,  G01J3/4535 ,  G01J9/0215

Abstract: The tilt-compensated interferometers of the present invention are novel variations of Michelson's interferometer that use tilt- and shear-compensation to provide excellent photometric accuracy even when there are imperfections in the scanning motion used to produce variation of path difference. The tilt-compensation mechanism of the present invention consists of antiparallel reflections from a beamsplitter element and a roof reflector element, which elements are held rigidly in alignment. Several particularly useful embodiments of the invention are described. Other advantages of the present invention include photometric stability and reduced cost because manual alignment is not required. This interferometer has applications in spectrometry, spectral imaging and metrology.

Abstract translation: 本发明的倾斜补偿干涉仪是迈克尔逊干涉仪的新颖变型，其使用倾斜和剪切补偿来提供优异的测光精度，即使在用于产生路径差异的扫描运动中存在缺陷的情况下也是如此。 本发明的倾斜补偿机构包括来自分束器元件和屋顶反射器元件的反平行反射，这些元件被刚性地保持一致。 描述本发明的几个特别有用的实施例。 本发明的其它优点包括光度稳定性和降低的成本，因为不需要手动对准。 该干涉仪具有光谱，光谱成像和计量学应用。

公开(公告)号：US20030043372A1

公开(公告)日：2003-03-06

申请号：US10134243

申请日：2002-04-29

Inventor： Bernd Schulz

IPC: G01J003/28 ,  G01J003/447 ,  G01B011/24 ,  G01B011/30

CPC classification number: G01B11/24 ,  G01B2210/56 ,  G01N21/9501 ,  G01N21/956 ,  G03F7/70625 ,  G03F7/70633

Abstract: An apparatus for obtaining information on critical dimensions and overlay accuracy of features in a semiconductor structure comprises a light source, a detector and an optical means defining a first optical path and a second optical path. The first optical path and the second optical path are oriented in correspondence with the respective orientations of diffracting patterns provided on the semiconductor structure to obtain the required information without the necessity of rotating the semiconductor structure. This insures a significantly higher throughput.

Abstract translation: 用于获得关于半导体结构中的特征的关键尺寸和覆盖精度的信息的装置包括光源，检测器和限定第一光路和第二光路的光学装置。 第一光路和第二光路对应于设置在半导体结构上的衍射图案的各个取向，以获得所需信息，而不需要旋转半导体结构。 这确保了显着更高的吞吐量。

公开(公告)号：US20020180968A1

公开(公告)日：2002-12-05

申请号：US10160843

申请日：2002-05-30

Inventor： Wayne D. Jung ,  Russell W. Jung ,  Alan R. Loudermilk

IPC: G01J003/28

CPC classification number: G01J3/51 ,  G01J1/0242 ,  G01J1/04 ,  G01J1/06 ,  G01J3/02 ,  G01J3/0218 ,  G01J3/0229 ,  G01J3/0254 ,  G01J3/0259 ,  G01J3/0264 ,  G01J3/0272 ,  G01J3/0278 ,  G01J3/0283 ,  G01J3/0291 ,  G01J3/2803 ,  G01J3/508 ,  G01J3/513

Abstract: Optical characteristic measuring systems and methods such as for determining the color or other optical characteristics of teeth are disclosed. Perimeter receiver fiber optics preferably are spaced apart from a source fiber optic and receive light from the surface of the object/tooth being measured. Light from the perimeter fiber optics pass to a variety of filters. The system utilizes the perimeter receiver fiber optics to determine information regarding the height and angle of the probe with respect to the object/tooth being measured. Under processor control, the optical characteristics measurement may be made at a predetermined height and angle. Various color spectral photometer arrangements are disclosed. Translucency, fluorescence, gloss and/or surface texture data also may be obtained. Audio feedback may be provided to guide operator use of the system. The probe may have a removable or shielded tip for contamination prevention. A method of producing dental prostheses based on measured data also is disclosed. Measured data also may be stored and/or organized as part of a patient database. Such methods and implements may be desirably utilized for purposes of detecting and preventing counterfeiting or the like. Preferably, a two stage spectral separation is utilized, preferably utilizing a diffraction grating and interference filters.

Abstract translation: 公开了用于确定牙齿的颜色或其他光学特性的光学特性测量系统和方法。 周边接收机光纤优选地与源光纤间隔开，并且从被测量的物体/齿的表面接收光。 来自周边光纤的光通过各种滤光片。 该系统利用周边接收器光纤来确定关于探头相对于被测量物体/齿的高度和角度的信息。 在处理器控制下，可以以预定的高度和角度进行光学特性测量。 公开了各种颜色光谱光度计布置。 也可以获得半透明度，荧光，光泽度和/或表面纹理数据。 可以提供音频反馈以指导操作者使用该系统。 探头可能具有可移除或屏蔽的尖端，以防止污染。 还公开了一种基于测量数据生产牙科假体的方法。 测量的数据也可以作为患者数据库的一部分存储和/或组织。 为了检测和防止伪造等目的，可以期望地使用这些方法和装置。 优选地，利用两级光谱分离，优选利用衍射光栅和干涉滤光器。