INTEGRAL FIELD LENS ILLUMINATION FOR VIDEO INSPECTION
    112.
    发明公开
    INTEGRAL FIELD LENS ILLUMINATION FOR VIDEO INSPECTION 失效
    WITH FRAME镜头视频检查集成照明

    公开(公告)号:EP0777850A1

    公开(公告)日:1997-06-11

    申请号:EP95921336.0

    申请日:1995-05-22

    CPC classification number: G01N21/8806 G01N21/90

    Abstract: A system for illumination of discrete specimens in an optical inspection system (A) include an image acquisition system (C) and corresponding illumination system (B). A beam splitter (16) intercepts light from a light source (10) and communicates a portion of it to field lens (20). A field lens (20), in turn, communicates light to a specimen (24) disposed in a viewing area (22). Light reflected from the specimen (24) is communicated back through the field lenses (20), through the beam splitter (16) and ultimately to a video camera (34) from which a digitized image is obtained. In another embodiment, light reflected from the specimen (24) and propagated through the beam splitter (16) has communicated to a second beam splitter (30). Separated light therefrom is communicated to first and second video cameras (34, 36), thus allowing for imaging of separate portions of the specimen (24).

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