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公开(公告)号:JP5749151B2
公开(公告)日:2015-07-15
申请号:JP2011282408
申请日:2011-12-22
Applicant: 株式会社SUMCO
Inventor: 須藤 俊明 , 佐藤 忠広 , 北原 賢
IPC: C30B29/06 , G01N21/65 , C30B15/10