公开(公告)号：JPH10250084A

公开(公告)日：1998-09-22

申请号：JP6516997

申请日：1997-03-18

Applicant: SEIKO EPSON CORP

Inventor： KARASAWA YASUSHI

IPC: B41J2/135

Abstract: PROBLEM TO BE SOLVED: To provide an ink jet recording head of a low cost for maintaining satisfactory high printing quality of ink passability for a long period by providing excellent water repellence of a nozzle surface of the head. SOLUTION: A third plate 17 having an oxide film formed on a silicon surface formed with a nozzle hole 16 is coated with water repellent and oil repellent film 18 by a vacuum deposition process. Then, it is dipped in solution containing coupling compound of next composition, and dried to form a coupling compound layer 19. Or, a rear side of the plate 17 is irradiated with an oxygen plasma, a water repellent and oil repellent film at the rear side of the plate 17 and in the hole 16 is hydrophilized and made lipophilic, the plate 17 is dipped in solution containing coupling compound of next composition, and dried to form a coupling layer.

公开(公告)号：JPH09267478A

公开(公告)日：1997-10-14

申请号：JP7764996

申请日：1996-03-29

Applicant: SEIKO EPSON CORP

Inventor： KARASAWA YASUSHI

IPC: B41J2/16 ,  B41J2/135

Abstract: PROBLEM TO BE SOLVED: To protect water-repellent and oil-repellent films on the surfaces of nozzles of an ink jet recording head and turn flow paths hydrophilic and lipophilic. SOLUTION: A water-repellent and oil-repellent material is applied on a nozzle plate 4 with nozzle holes 6 processed thereon to form water-repellent and oil-repellent films 12. Silicone rubbers 13 are stuck on the water-repellent and oil-repellent films 12 of the nozzle plate surface 15, and then exposed in the oxygen plasma environment to remove the water-repellent and oil-repellent films 12 inside the nozzle holes 6 and the nozzle plate rear side 14 and turn flow paths hydrophilic and lipophilic.

公开(公告)号：JPH0725015A

公开(公告)日：1995-01-27

申请号：JP16941093

申请日：1993-07-08

Applicant: SEIKO EPSON CORP

Inventor： KARASAWA YASUSHI ,  NISHIKAWA MITSUTAKA

IPC: B41J2/135

Abstract: PURPOSE:To cover with excellent adhesive properties, to reduce pinholes, to enhance water-repellent performance and to obtain long-term reliability by forming an ink-repellent film of fluorine-containing polyimide resin in an ink jet printer in which the ink-repellent film is deposited on a surface of a nozzle of an ink jet recording head. CONSTITUTION:When a fluorine-containing polyimide film is formed of an ink-repellent film 12, excellent adhesive properties with a nozzle plate 11 are obtained, and ink can be simultaneously repelled by an operation of fluorine. The film 12 is laminated on a surface of a nozzle of the plate 11 by a deposition polymerizing method. The method comprises the steps of depositing respective monomers, and then imidizing it and can hence make stable polyimide film uniform and easily laminate it. Carbon tetrafluoride resin is laminated on the fluorine-containing polyimide resin thereby to enhance fluorine density on a surface of the film 12, thereby improving more ink repellency.

公开(公告)号：JPH06122204A

公开(公告)日：1994-05-06

申请号：JP27314692

申请日：1992-10-12

Applicant: SEIKO EPSON CORP

Inventor： OKI YASUHIRO ,  ATOBE MITSUAKI ,  KARASAWA YASUSHI

IPC: B05B1/02 ,  B41J2/045 ,  B41J2/055 ,  B41J2/16

Abstract: PURPOSE:To endow the device with the property that ink droplets spout straight in the constant direction for a long time by a method wherein irregularities having specified averaged differences in level and pitches are provided on a nozzle opening face and the face with the differences in level is coated with a polymer including fluorine at a specified thickness. CONSTITUTION:While liquid jet flows 11 including grinding stone particles are ejected from an ejection outlet 10 in a wet type honing machine 8, a stage 9 containing a nozzle plate 7 is transported to a direction of arrow 12 so that irregularities having 0.01-0.5mum of averaged differences in level and 15mum or less of pitches are formed on a nozzle opening face 13 to be a nozzle opening section after the assembling of a head. An adhering tape is adhered the opposite face of the nozzle opening face 13 with the irregularities and the nozzle plate 7 is dropped into a polymer solution, e.g. dissolving a polymer including fluorine, whereby the lifting speed of nozzle plate 7 is adjusted in such a manner that thin film having 50-1500 angstrom of thickness is formed. A vibration membrane 15 and a head forming member 16 are bonded each other. A piezoelectric element 17 and the nozzle plate 7 are bonded each other.

公开(公告)号：JPH05335315A

公开(公告)日：1993-12-17

申请号：JP14143192

申请日：1992-06-02

Applicant: SEIKO EPSON CORP

Inventor： KARASAWA YASUSHI

IPC: H01L21/60 ,  H01L21/321

Abstract: PURPOSE:To suppress short-circuiting between bump electrodes having high contact strength and small electrode pitch by covering he region other than that for an electrode with photosensitive resin, and by plating it with an acid zincate conversion plating liquid, at the time of manufacturing a bump electrode to be used for minutely mounting a semiconductor element through electroless plating process. CONSTITUTION:A conductive layer 3 composed of aluminum is formed on a silicon substrate 1 forming a circuit, and a nickel/phosphorus layer 5 is formed on the conductive layer 3, and a gold layer 6 is formed on the nickel/phosphorus layer 5.

公开(公告)号：JPH05330060A

公开(公告)日：1993-12-14

申请号：JP14142792

申请日：1992-06-02

Applicant: SEIKO EPSON CORP

Inventor： NOSE YASUTO ,  KARASAWA YASUSHI ,  HAYASHI CHIEKO

IPC: B41J2/01 ,  B41J2/135

Abstract: PURPOSE:To impart excellent water repelling characteristics to the surface of a nozzle and make the lasting properties and durability of effect excellent by forming a water repelling layer composed of a uniform mixed layer of fluororesin and one or more kind of an acrylic resin, an epoxy resin or the like on the surface of the nozzle. CONSTITUTION:A masking tape 13 is bonded to the rear of a nozzle plate 11. Next, the nozzle plate 11 is dipped in an aqueous solution containing a mixture consisting of a fluoroacrylate resin and a fluoromethacrylate resin and having polytetrafluoroethylene fine particles (5mum or less) dispersed therein and subjected to anodic electrolysis for 2min while voltage of 50V is applied using a stainless 304 material as a cathode to form a fluoroacrylate/ fluoromethacrylate mixed resin film 14 containing polytetrafluoroethylene on the surface of the nozzle plate 11. This nozzle plate 11 is heat-treated and, after the masking tape on the rear of the nozzle plate is peeled off, the nozzle plate is further heat-treated at 180 deg.C for 30min to provide a water repelling layer with a thickness of about 10mum only on the surface part of the nozzle plate.

公开(公告)号：JPH04146624A

公开(公告)日：1992-05-20

申请号：JP27126790

申请日：1990-10-09

Applicant: SEIKO EPSON CORP

Inventor： KARASAWA YASUSHI

IPC: C23C18/34 ,  H01L21/288 ,  H01L21/321 ,  H01L21/60

Abstract: PURPOSE:To eliminate a palladium treatment process from an electrode formation process, to make it possible to shorten the process of manufacture, and to cut down the cost by a method wherein washing and conveying operations are conducted in the washing water in which dissolved oxygen is removed by inert gas and the environment in which oxygen is removed by inert gas. CONSTITUTION:A silicon oxide layer 2 is laminated on an N-type silicon substrate 1 by a thermal oxidization method, an aluminum A alloy layer 3 is laminated thereon by a vacuum-deposition method, and a silicon layer 4 is covered thereon using a CVD method. Then, an expected region of electrode formation of 30X30mum is etched by a photolithography method. This substrate is degreased and after Al has been etched by a sulfuric solution, the substrate is washed by the washing water purged by the nitrogen-gas-replaced non-oxygen atmosphere and nitrogen gas. Lastly, the substrate 15 carried in a non-oxygen atmosphere, a nickel-phosphorus layer 5 is plated by a electroless plating solution under the prescribed plating condition, and the electrode of a semiconductor device is completed. In order to prevent Al from oxidation in the air of an aqueous solution, a plating treatment and a conveying operation are conducted in the water and the environment wherein oxygen is removed to the never generating no Al oxidation after the natural oxide film of Al is removed.

公开(公告)号：JPH03154223A

公开(公告)日：1991-07-02

申请号：JP29463389

申请日：1989-11-13

Applicant: SEIKO EPSON CORP

Inventor： KARASAWA YASUSHI

IPC: G11B5/64 ,  G11B5/66

Abstract: PURPOSE:To form the medium having a high coercive force and to obtain the magnetic disk device of a high memory capacity by using this medium by forming the magnetic recording layer of the magnetic disk device of a ferromagnetic metal and Zn, Re, Tl. CONSTITUTION:The magnetic recording layer is formed of the ferromagnetic metal and the Zn, Re and P. Namely, plating of nonmagnetic NiP is applied on an Al substrate and after the surface is polished, the magnetic recording layer is formed by an electroless plating liquid of Co, Ni, Zn, Tl, Re or P on this substrate, by which the magnetic medium is formed. The Zn and Tl forms the finer crystals of the magnetic crystal and the Re forms the further finer crystals by the interaction with the Zn. The medium having the high coercive force is thus formed. The line recording density of the magnetic recording layer is improved in this way and the magnetic disk device of the high memory capacity is obtd. by using this magnetic medium.

公开(公告)号：JPH0279216A

公开(公告)日：1990-03-19

申请号：JP23196288

申请日：1988-09-16

Applicant: SEIKO EPSON CORP

Inventor： KARASAWA YASUSHI

IPC: G11B5/82 ,  G11B5/64 ,  G11B5/73 ,  G11B5/858

Abstract: PURPOSE:To secure high recording density by forming a ferromagnetic substance film on a discoid nonmagnetic substrate through the ruggednesses with the roughness on the center line specified. CONSTITUTION:The ferromagnetic substance film is formed on the discoid nonmagnetic substrate through the ruggednesses with the roughness on the center line controlled to 100-1,000Angstrom . The ruggednesses are formed on the nonmagnetic substrate in the circumferential direction. Namely, the ruggednesses are formed on the discoid nonmagnetic substrate in the circumferential direction, and the magnetization of the magnetic particles is oriented. Consequently, the leakage flux is concentrated in the specified direction, and the reproduction output of the magnetic medium can be improved.

公开(公告)号：JPH01247579A

公开(公告)日：1989-10-03

申请号：JP7528188

申请日：1988-03-29

Applicant: SEIKO EPSON CORP

Inventor： KARASAWA YASUSHI

IPC: C23C18/31

Abstract: PURPOSE:To form a low-noise magnetic medium nearly free from defects by electroless plating by using a soln. contg. Co ions or Co ions and Ni ions in the form of metal salts, glycolic acid as a complexing agent for the metal salts and a Zn salt as a magnetic plating soln. for forming a magnetic medium for a magnetic disk device. CONSTITUTION:A soln. contg. a Co ion source such as cobalt sulfate or the Co ion source and an Ni ion source such as nickel sulfate, a reducing agent for the metal ions, a pH adjusting agent for the soln., a pH buffer, glycolic acid as a complexing agent for the metal salts and ZnSO4 as a Zn salt is used as a plating soln. for forming a magnetic medium for a magnetic disk device. The plating soln. has superior stability over a long period and a magnetic medium formed by electroless plating with the plating soln. has superior characteristics such as high coercive force and low noise.