公开(公告)号：JPH02116848A

公开(公告)日：1990-05-01

申请号：JP27159888

申请日：1988-10-27

Applicant: SONY CORP

Inventor： TAKEDA MINORU ,  KAWAHIRA HIROICHI

IPC: G03F1/44 ,  H01L21/027

Abstract: PURPOSE:To accurately and easily evaluate the accuracy of a pattern on a photomask by arranging the pattern for photomask evaluation composed of a line and space pattern and an island pattern on a reticle. CONSTITUTION:This photomask consists of the line and space pattern consisting of five lines 21 - 25 which are bent orthogonally and isolated from one another having spaces and the island pattern consisting of nine square islands 31 - 39. The island pattern is so constituted as to evaluate the pattern for a contact hole. One (23 in a figure) of the lines constituting the line and space pattern is longer than other lines 21, 22, 23, and 25 and the measurement of line width is easily taken at this part. Consequently, the accuracy of the pattern on the photomask is easily and accurately evaluated.

公开(公告)号：JPH0291943A

公开(公告)日：1990-03-30

申请号：JP24558788

申请日：1988-09-29

Applicant: SONY CORP

Inventor： TAKEDA MINORU

IPC: H01L21/3205

Abstract: PURPOSE:To obtain wide superposition margin by providing a groove for wiring and an opening for connection to communicate with it in an insulating film, and first burying the first conductive material selectively in the opening for connection, and next burying the second conductive material in the groove for wiring, when forming multilayer interconnection in a semiconductor device. CONSTITUTION:The surface of a substrate 1 where a semiconductor device such as LSI, etc., are formed is covered with an insulating film 2 such as SiO2, PSG, or the like, and a groove 3 for wiring to form multilayer interconnection in the semiconductor device and an opening for connection which is positioned at this part are bored in self alignment using the multilayer resist method. Next, the first conductive material 5 such as W, etc., is buried in the opening 4 for connection, and next the second conductive material 6 is buried in the groove 3 for wiring such that one part is in contact with the material 5, using W of Al. This way, by burying the conductors in self alignment, superposition accuracy margin can be taken large, and also it becomes possible to obtain large contact area.

公开(公告)号：JPS6489342A

公开(公告)日：1989-04-03

申请号：JP24501687

申请日：1987-09-29

Applicant: SONY CORP

Inventor： TAKEDA MINORU

IPC: H01L21/3205 ,  H01L23/52 ,  H01L39/24

Abstract: PURPOSE:To superpose and form many multilayer interconnection regions each having a flat structure by forming a conductive layer made of a superconducting material on a semiconductor substrate, and then selectively insulating the superconducting material except the interconnection regions. CONSTITUTION:A conductive layer 2 made of a superconducting material is formed on a semiconductor substrate 1 formed with a predetermined semiconductor element. Then, a photoresist layer 3 is formed on a section to be formed with the wiring region 6 of the layer 2. Then, energetic particles 4 are irradiated to be implanted in high density to the exposed layer 2. The layer 2 not masked with the layer 3 is altered by the implantation of the particles 4 to an insulating layer 5, and the layer 2 of the section masked with the layer 3 is altered to a first interconnection region 6. Then, after the layer 3 on the region 3 is removed, a conductive layer 7 made of a superconducting material is formed on the whole surface. Thereafter, the interconnection layer and the interlayer insulating film are sequentially formed similarly, to manufacture a semiconductor device having multilayer interconnection regions.

公开(公告)号：JPS63233531A

公开(公告)日：1988-09-29

申请号：JP6871987

申请日：1987-03-23

Applicant: SONY CORP

Inventor： TAKEDA MINORU

IPC: H01L21/3213 ,  G03C1/00 ,  G03F7/00 ,  G03F7/09 ,  G03F7/11 ,  H01L21/027 ,  H01L21/30

Abstract: PURPOSE:To omit burning under specified conditions and to obtain a pattern by a simple process, by selectively etching a reflection preventing film and a material to be etched with a photoresist layer, on which a pattern is formed, as a mask, and forming the pattern. CONSTITUTION:A reflection preventing film 13 including acrylic resin is formed on a material to be etched 12. A photoresist layer 14 is formed on the preventing film 13. The resist layer 14 is exposed and developed, and a pattern is formed on the resist layer 14. With the resist layer 14, on which the pattern is formed, as a mask, the preventing film 13 and the material to be etched 12 are selectively etched, and a pattern is formed on the material to be etched 12. Thus burning under specified conditions is omitted, and the pattern is obtained in a simple process.

公开(公告)号：JPS6358839A

公开(公告)日：1988-03-14

申请号：JP20315286

申请日：1986-08-29

Applicant: SONY CORP

Inventor： TAKEDA MINORU

IPC: H01L21/302 ,  H01L21/3065 ,  H01L21/3213

Abstract: PURPOSE:To form patterns with high precision by means of selecting ion kinds and implanting energy, i.e., the accelerating voltage, dosage, etc., by a method wherein alloy or compound parts formed by selective ion implantation to form patterns are used as substantial etching resist. CONSTITUTION:Alloy parts 25 are formed by ion-implantation of boron, argon, etc., on the parts near interface of the first and the second material layers 21 and 22 through parts lacking a resist patterns 24. Next, the resist patterns 24 are peeled off by oxygen plasma processing, etc., and then the second Al material layer 22 is etched by, e.g., phosphoric acid with low etching capacity toward the alloy parts 25 and later the first material layer 21 excluding the part below the parts 25 is removed by ion-etching process using fluorine base reactive gas as well as the parts 25 as masks. Through these procedures, patterns 26 comprising the first material layer 21 in width WL and gap DL corresponding to the alloy parts 25, i.e., metallic interconnection patterns 26 can be formed.

公开(公告)号：JPS6263427A

公开(公告)日：1987-03-20

申请号：JP20175285

申请日：1985-09-13

Applicant: SONY CORP

Inventor： TAKEDA MINORU

IPC: H01L21/306 ,  G03F7/20 ,  H01L21/027 ,  H01L21/30

Abstract: PURPOSE:To improve the stability and reliability of a fine metal wiring by applying a resist after fully baking the film for preventing reflection at a high temperature, and further performing exposure, development and etching, thereby preventing the resist from peeling off. CONSTITUTION:A film 3 for preventing reflection is uniformly heated and cured by means of high-temperature baking so as to be insolubilized to the developer of resist, the film 3 for preventing reflection is left on the whole surface after the development of a resist 4, and the film 3 for preventing reflection and a ground layer 2 are sequentially removed by means of RIE. Therefore, remaining of the unwanted film for preventing reflection based on the fluctuation of the baking and reduction of the stability nd reliability of the patterning due to the bad adhesion between the film for preventing reflection and the resist can be prevented. Moreover, the effect of preventing reflection of the film for preventing reflection is fully exhibited, thereby enabling a high-precision wiring pattern to be formed without being affected by the reflection by the ground layer.

公开(公告)号：JP2009170010A

公开(公告)日：2009-07-30

申请号：JP2008004968

申请日：2008-01-11

Applicant: Sony Corp ,  ソニー株式会社

Inventor： ASHIZAKI KOJI ,  ITO TATSUMI ,  ANDO MASATO ,  TOYODA TAKAHIRO ,  TAKEDA MINORU ,  KOBAYASHI SEIJI

IPC: G11B23/40

CPC classification number: B41J2/195 ,  B41J3/4071 ,  B41J29/02

Abstract: PROBLEM TO BE SOLVED: To solve the problem that a conventional device requires the number of display LEDs equal to the number of ink colors or requires a wide space for disposing a display and it is uneconomical. SOLUTION: This device is provided with one light-emitting display lamp 21 capable of displaying a plurality of colors by emitting lights, an ink tank for receiving inks of colors equal in number to the number of colors to be displayed by the light-emitting display lamp 21, an ink amount detection part for detecting the amount of the plurality of inks received in the ink tank for each ink of the color, a printing operation detection part for detecting the operation of a printer 10 to output its detection signal, a driving operation detection part for detecting the operation of a disk driving device 9 to output its detection signal, and a first light emission control unit for controlling an emitted light color and a light emission state of the light emitting display lamp 21 according to the operation of the printer 10, the operation of the disk driving device 9, and the ink amount of each color based on the detection signal from the ink amount detection part, the detection signal from the printing operation detection part, and a detection signal from the driving operation detection part. COPYRIGHT: (C)2009,JPO&INPIT

Abstract translation: 要解决的问题：为了解决传统设备需要等于油墨颜色数量的显示器LED的数量或者需要用于布置显示器的宽广空间并且是不经济的问题。 解决方案：该装置设置有能够通过发光来显示多种颜色的一个发光显示灯21，用于接收与要由光显示的颜色数量相等的颜色的墨的墨水盒 显示灯21，用于检测在每个墨水的墨水中接收的多个墨水量的墨水量检测部件，用于检测打印机10的操作以输出其检测信号的打印操作检测部件 ，用于检测盘驱动装置9以输出其检测信号的操作的驱动操作检测部分，以及用于根据所述驱动操作检测部分控制发光显示灯21的发出的光色和发光状态的第一发光控制单元 基于来自墨量检测部的检测信号，打印机10的操作，盘驱动装置9的操作以及各种颜色的墨量，来自 打印操作检测部分和来自驾驶操作检测部分的检测信号。 版权所有（C）2009，JPO＆INPIT

公开(公告)号：JP2008047272A

公开(公告)日：2008-02-28

申请号：JP2006326260

申请日：2006-12-01

Applicant: Sony Corp ,  ソニー株式会社

Inventor： ITO TATSUMI ,  ANDO MASATO ,  ASHIZAKI KOJI ,  TOYODA TAKAHIRO ,  TAKEDA MINORU

IPC: G11B23/40 ,  B41J2/01 ,  B41J3/407 ,  B41J29/38

CPC classification number: B41J2/17509 ,  B41J29/02 ,  B41J29/38

Abstract: PROBLEM TO BE SOLVED: To counteract differences occurred in the print density between the inner and outer peripheries of the print region when the angular velocity of a rotated printed object and the timing for ejecting ink droplets are both constant for a print apparatus that prints visible information on a print surface of the rotated printed object by ejecting ink droplets from ejection nozzles provided on a print head onto the rotated printed object. SOLUTION: The apparatus includes a print control unit generating ink ejection data based on visible information while controlling a print head by the ink ejection data, the print control unit converts the visible information expressed by using biaxial perpendicular coordinate data, to polar coordinate data and carries out dot density correction that applies a correction weighting calculated in accordance with the number of dots per unit area for each dot in the polar coordinate data to a luminance value of each dot to generate the ink ejection data. COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 要解决的问题：为了抵消当旋转的打印物体的角速度和喷墨墨滴的定时对于打印设备的打印设备而言，打印区域的内周和外周之间的打印密度发生差异， 通过将设置在打印头上的喷嘴的墨滴喷射到旋转的打印对象上，在旋转的打印对象的打印表面上打印可视信息。 解决方案：该设备包括一个打印控制单元，在通过喷墨数据控制打印头的同时基于可见信息产生喷墨数据，打印控制单元将使用双轴垂直坐标数据表示的可视信息转换为极坐标 数据，并进行点密度校正，其将针对极坐标数据中的每个点的每单位面积的点数计算的校正加权应用于每个点的亮度值，以产生喷墨数据。 版权所有（C）2008，JPO＆INPIT

公开(公告)号：JP2008027534A

公开(公告)日：2008-02-07

申请号：JP2006199941

申请日：2006-07-21

Applicant: Sony Corp ,  ソニー株式会社

Inventor： ITO TATSUMI ,  ANDO MASATO ,  ASHIZAKI KOJI ,  TOYODA TAKAHIRO ,  TAKEDA MINORU

IPC: G11B23/40 ,  B41J2/01

Abstract: PROBLEM TO BE SOLVED: To solve the problem that in a printing device printing visible information on a printing surface of a rotated object to be printed by ejecting ink drops from an ejection nozzle provided on a printing head, printing density is different in inner and outer peripheral parts of a printing region when angular velocity of the rotated object to be printed and timing of ejection of the ink drop are constant.
SOLUTION: Visible information represented by biaxial orthogonal coordinate data is transformed into polar coordinate data satisfying a relation of P
R =2πP
θ /(N
n -N
n-1 ), wherein a dot pitch of dots arranged in a radial direction and a dot pitch of dots arranged in an angle direction are defined as P
R and P
θ , respectively, and the number of dots of entire periphery of an n-th round from the center of the polar coordinate data is defined as N
n . The polar coordinate data are binarized to form ink ejection data. Printing is performed based on the formed ink ejection data.
COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 要解决的问题为了解决在通过从设置在打印头上的喷嘴喷出墨滴而在要打印的旋转物体的打印表面上打印可见信息的打印装置的打印密度不同的问题 要打印的被旋转物体的角速度和墨滴的喷射定时是打印区域的内周和外周部分。 解决方案：将由双轴正交坐标数据表示的可见信息变换为满足P R =（2

S / SB> -N n-1 ），其中沿径向布置的点的点间距和在角度方向上排列的点的点间距被定义为P R 和P θ，并且从极坐标数据的中心开始的第n个圆的整个圆周的点的数量被定义为N n 。 极坐标数据被二值化以形成喷墨数据。 基于形成的喷墨数据进行打印。 版权所有（C）2008，JPO＆INPIT

公开(公告)号：JP2008018610A

公开(公告)日：2008-01-31

申请号：JP2006192016

申请日：2006-07-12

Applicant: Sony Corp ,  ソニー株式会社

Inventor： ITO TATSUMI ,  ANDO MASATO ,  ASHIZAKI KOJI ,  TOYODA TAKAHIRO ,  TAKEDA MINORU

IPC: B41J2/18 ,  B41J2/185

Abstract: PROBLEM TO BE SOLVED: To prevent the periphery from being stained with mist by forming a constitution of covering the whole of a disc-shaped recording medium and the periphery of ejection nozzles of a printing head by a mist absorber, and capturing the mist of ink generated at the time of printing by the mist absorber.
SOLUTION: The printer is equipped with a spindle motor 9 which drives to rotate an optical disc 2 attached removably, an optical pickup 6 which is opposed to an information recording face of the optical disc 2 set on a turntable 11 and can record or reproduce an information signal to the information recording face, and the printing head 41 which has the ejection nozzles opposed to a label face of the optical disc 2 and can print visible information such as characters and patterns by ejecting ink droplets from the ejection nozzles to the label face. The mist absorber is arranged and set to cover the whole of the optical disc 2 and the periphery of the ejection nozzles of the printing head 41 with a suitable clearance kept between the optical disc 2 and the mist absorber at the time of printing of the visible information to the label face by the printing head 41.
COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 要解决的问题：通过形成通过雾吸收器覆盖整个盘状记录介质和打印头的喷嘴的周边的结构来防止周边被雾污染，并且捕获 在雾化吸收器打印时产生的墨雾。 解决方案：打印机配备有主轴电动机9，主轴电动机9驱动以可旋转地旋转光盘2，光学拾取器6与设置在转台11上的光盘2的信息记录面相对，并且可以记录 或将信息信号再现到信息记录面，以及打印头41，其具有与光盘2的标签面相对的喷嘴，并且可以通过从喷嘴喷射墨滴来打印诸如字符和图案的可见信息， 标签面。 雾吸收器被布置和设置成在打印可见光的时刻以保持在光盘2和雾吸收器之间的适当间隙覆盖整个光盘2和打印头41的喷嘴的周边 通过打印头41向标签面提供信息。版权所有（C）2008，JPO＆INPIT