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    Wafer Edge Detection and Inspection
    111.
    发明申请
    Wafer Edge Detection and Inspection 有权
    晶圆边缘检测和检查

    公开(公告)号：US20150330914A1

    公开(公告)日：2015-11-19

    申请号：US14709427

    申请日：2015-05-11

    Applicant: KLA-Tencor Corporation

    Inventor： Ivan Maleev ,  Venkata Kode

    IPC: G01N21/95 ,  G01N21/47 ,  G01N21/55

    CPC classification number: G01N21/9503 ,  G01N21/47 ,  G01N21/55 ,  G01N2201/025 ,  G01N2201/061

    Abstract: Methods and systems for determining wafer inspection coordinates for fixed location(s) on a wafer are provided. One system includes an illumination subsystem configured to direct light to a spot on an edge of a wafer. The spot extends beyond the edge of the wafer. The system also includes a stage that rotates the wafer thereby causing the spot to be scanned over the edge of the wafer. The system also includes a detector configured to detect light from the spot while the spot is being scanned over the edge and to generate output responsive thereto. The system further includes a computer processor configured to determine wafer inspection coordinates of two or more locations on the edge of the wafer based on the output and to determine wafer inspection coordinates of fixed location(s) on the wafer based on the wafer inspection coordinates of the two or more locations on the edge.

    Abstract translation: 提供了用于确定晶片上固定位置的晶片检查坐标的方法和系统。 一个系统包括被配置为将光引导到晶片边缘上的点的照明子系统。 斑点延伸超过晶片的边缘。 该系统还包括使晶片旋转的台，从而使光斑在晶片的边缘上扫描。 该系统还包括检测器，其被配置为在斑点被扫描在边缘上时检测来自斑点的光并且响应于此产生输出。 该系统还包括计算机处理器，其被配置为基于输出来确定晶片边缘上的两个或更多个位置的晶片检查坐标，并且基于晶片的晶片检查坐标来确定晶片上固定位置的晶片检查坐标 边缘上的两个或多个位置。

    INSPECTION DEVICE AND INSPECTION SYSTEM FOR DISPLAY SUBSTRATE
    112.
    发明申请
    INSPECTION DEVICE AND INSPECTION SYSTEM FOR DISPLAY SUBSTRATE 有权
    用于显示基板的检查装置和检查系统

    公开(公告)号：US20150330891A1

    公开(公告)日：2015-11-19

    申请号：US14499567

    申请日：2014-09-29

    Applicant: Boe Technology Group Co., Ltd. ,  Beijing Boe Display Technology Co., Ltd.

    Inventor： Yang Yu ,  Nanren Quan ,  Yaoxie Zheng ,  Tongju Bai ,  Dehua Chen

    IPC: G01N21/01 ,  G01N21/95 ,  G01N21/88

    CPC classification number: G01N21/01 ,  G01N21/8803 ,  G01N21/95 ,  G01N2021/9513 ,  G01N2201/025

    Abstract: The present disclosure relates to a technical field of display substrate inspection. The present disclosure discloses an inspection device and an inspection system for display substrate. The inspection device includes a support member, a turning table and a first drive device. The turning table includes: a carrier pivotally mounted on a pivot shaft, the carrier having an observation aperture through its thickness direction; and positioning clamps which are mounted on the carrier and are used to retain the display substrate in the range of the observation aperture. The first drive device is in transmission connection with the pivot shaft of the carrier in order to drive the turning table to rotate around the pivot shaft. When inspecting the appearance of the display substrate by the above mentioned inspection device, omnidirectional inspection of the display substrate can be achieved by turning the turning table. Moreover, the contact between the inspector and the display substrate can be avoided, the risk of damaging the display substrate during appearance inspection can be decreased, and therefore defects of the display substrate caused by appearance inspection can be reduced.

    Abstract translation: 本公开涉及显示基板检查的技术领域。 本公开公开了一种用于显示基板的检查装置和检查系统。 检查装置包括支撑构件，转台和第一驱动装置。 转台包括：枢转地安装在枢轴上的托架，托架具有穿过其厚度方向的观察孔; 以及安装在载体上并用于将显示基板保持在观察孔的范围内的定位夹。 第一驱动装置与载体的枢轴传动连接，以驱动转台围绕枢转轴转动。 当通过上述检查装置检查显示基板的外观时，可以通过转动转台来实现对显示基板的全方位检查。 此外，可以避免检查者和显示基板之间的接触，可以减少在外观检查期间损坏显示基板的风险，因此可以减少由外观检查引起的显示基板的缺陷。

    METHOD FOR THE EVALUATION OF THE COLLOIDAL STABILITY OF LIQUID BIOPOLYMER SOLUTIONS
    114.
    发明申请
    METHOD FOR THE EVALUATION OF THE COLLOIDAL STABILITY OF LIQUID BIOPOLYMER SOLUTIONS 有权
    评价液体生物反应器溶液的胶体稳定性的方法

    公开(公告)号：US20150015886A1

    公开(公告)日：2015-01-15

    申请号：US14381697

    申请日：2013-02-27

    Applicant: Boehringer Ingelheim International GMBH

    Inventor： Patrick Garidel ,  Thomas Hennes ,  Torsten Schultz-Fademrecht

    IPC: G01N33/15 ,  G01N21/85 ,  G01N15/00

    CPC classification number: G01N33/15 ,  G01N15/00 ,  G01N21/85 ,  G01N2015/0693 ,  G01N2201/025

    Abstract: The invention concerns the field of biomolecule formulation screening and stability testing. It concerns a method for the evaluation of the colloidal stability of liquid biopolymer solutions. The present invention describes a method for determining the stability of a liquid pharmaceutical composition comprising: a) providing a liquid pharmaceutical composition in a container, b) shaking said container on a shaker, whereby the shaker performs an oloid movement, c) determining the stability of said liquid pharmaceutical composition.

    Abstract translation: 本发明涉及生物分子制剂筛选和稳定性测试领域。 它涉及评估液体生物聚合物溶液的胶体稳定性的方法。 本发明描述了一种用于确定液体药物组合物的稳定性的方法，其包括：a）在容器中提供液体药物组合物，b）在振荡器上摇动所述容器，由此所述振动器进行o运动，c）确定稳定性 的所述液体药物组合物。

    Methods for gas leak detection and localization in populated areas using horizontal analysis
    115.
    发明申请
    Methods for gas leak detection and localization in populated areas using horizontal analysis 有权
    采用横向分析方法对人口稠密地区进行气体泄漏检测和定位

    公开(公告)号：US20140032160A1

    公开(公告)日：2014-01-30

    申请号：US13656080

    申请日：2012-10-19

    Applicant: Picarro, Inc.

    Inventor： Chris W. Rella ,  Eric R. Crosson ,  Michael Woelk ,  Sze Meng Tan

    IPC: G06F15/00

    CPC classification number: G01M3/20 ,  G01N21/3504 ,  G01N33/0004 ,  G01N2201/025

    Abstract: Improved gas leak detection from moving platforms is provided. Automatic horizontal spatial scale analysis can be performed in order to distinguish a leak from background levels of the measured gas. Source identification can be provided by using isotopic ratios and/or chemical tracers to distinguish gas leaks from other sources of the measured gas. Multi-point measurements combined with spatial analysis of the multi-point measurement results can provide leak source distance estimates. These methods can be practiced individually or in any combination.

    Abstract translation: 提供了从移动平台改进的气体泄漏检测。 可以进行自动水平空间尺度分析，以区分泄漏与被测气体的背景水平。 可以通过使用同位素比率和/或化学示踪剂来提供源识别，以区分气体泄漏与测量气体的其他来源。 多点测量结合多点测量结果的空间分析可以提供泄漏源距离估计。 这些方法可以单独或以任何组合实施。

    MAGNETIC STABILIZATION METHOD AND SYSTEM IN INFRARED, VISIBLE AND ULTRAVIOLET SPECTROSCOPY
    118.
    发明公开
    MAGNETIC STABILIZATION METHOD AND SYSTEM IN INFRARED, VISIBLE AND ULTRAVIOLET SPECTROSCOPY 审中-公开

    公开(公告)号：US20240210312A1

    公开(公告)日：2024-06-27

    申请号：US18541744

    申请日：2023-12-15

    Applicant: Servomex Group Limited

    Inventor： Giuseppe Buccino ,  Martin Lopez

    IPC: G01N21/31

    CPC classification number: G01N21/31 ,  G01N2201/025

    Abstract: In a spectroscopic analysis system, a broadband light source emits infra-red, visible or ultra-violet light which is transmitted through a fluid in a sample cell to a broadband detector. Changes in transmitted intensity are related to measurand in the fluid. A rotatable optical modulator or chopper, driven by an electric motor and located in the optical path, has light-transmissive optical elements, and non-transmissive regions. A non-contact magnetic field generator applies a magnetic field to the modulator or chopper to damp or brake the rotation. In an aspect, the modulator is an electrically conductive, non-ferromagnetic wheel, disc or cylinder in which eddy currents are induced. Optical elements may be apertures, filters, cuvettes, etc. A Hall effect sensor, rotary encoder, optical switch, etc. may determine angular speed or position of the modulator, and a PID controller may be used to maintain rotation speed at a setpoint by modulating an electromagnetic field generator.

    METHOD FOR REDUCING VIBRATION USING SEGMENTED ACCELERATION
    119.
    发明公开
    METHOD FOR REDUCING VIBRATION USING SEGMENTED ACCELERATION 审中-公开

    公开(公告)号：US20240118203A1

    公开(公告)日：2024-04-11

    申请号：US18373592

    申请日：2023-09-27

    Applicant: Illumina, Inc.

    Inventor： Shavinesh Sukesh ,  Chia-Hsi Liu ,  Gregory Holst ,  Ahmed Okasha ,  Kurt Danielson ,  John Earney

    IPC: G01N21/64

    CPC classification number: G01N21/6428 ,  G01N2201/025 ,  G01N2201/068

    Abstract: The motion of a mechanical stage may be directed in x-, y-, and/or z-dimensions such that excitation of a resonant frequency f is reduced. In particular, once a resonant frequency f is identified, the acceleration of the stage in the x-, y-, and/or z-dimensions may divided into an even number of acceleration segments or intervals, with the second of each pair of acceleration segments starting 1/(2f) seconds after the start of the initial acceleration segment. The acceleration intervals may be defined by a start time, an amplitude profile, and/or a time duration. In some implementations, the amplitude and time duration of each acceleration pulse may be different. The amplitude and time duration of acceleration steps may be determined and adjusted to compensate for the particular resonance frequency of an individual system, and programmed into a controller for the stage using motor programming controls.

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