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    METHOD FOR DETECTING DEFECTS IN A ROD-SHAPED TRANSPARENT OBJECT
    111.
    发明申请
    METHOD FOR DETECTING DEFECTS IN A ROD-SHAPED TRANSPARENT OBJECT 有权
    检测锯齿形透明物体缺陷的方法

    公开(公告)号：US20160139062A1

    公开(公告)日：2016-05-19

    申请号：US14899840

    申请日：2013-06-25

    Applicant: PRYSMIAN S.P.A.

    Inventor： Antonio Faraldi ,  Gerardo Testa ,  Antonio Adigrat ,  Franco Cocchini

    IPC: G01N21/954 ,  C03B37/025 ,  G01M11/08

    CPC classification number: G01N21/954 ,  C03B37/025 ,  G01M11/088 ,  G01M11/37 ,  G01N2021/9548 ,  G01N2201/06113 ,  G01N2201/105

    Abstract: A method for inspecting defects inside a rod-shaped transparent object by using a scanning beam of parallel light rays directed onto a rod-shaped transparent object orthogonally to the longitudinal axis of the object so that an inspection plane comprises an object's cross-section. The scanning beam is detected at an opposite side of the rod-shaped object that is interposed to intercept the parallel rays of the scanning beam. The electric output signal from the detector is processed to produce a first light intensity profile in a first scan direction, the light intensity profile comprising a shadow region delimited by first and second shadow edges, which is indicative of the outside diameter of the object across the inspection plane. The method comprises analysing the first light intensity profile to determine the presence or absence of a peak of positive intensity within the shadow region and, if an intensity peak is determined to be present, to determine the presence or absence of a region of depressed intensity within the intensity peak. If, as a result of analysing, an intensity peak within the shadow region is determined to be absent or a region of depressed intensity is determined to be present within the intensity peak, the presence of at least one structural defect within the object's cross-section is identified. In the preferred embodiments, the rod-shaped transparent object is a glass core rod for the production of a transmission optical fibre.

    Abstract translation: 一种用于通过使用与物体的纵向轴线正交的杆状透明物体上的平行光线的扫描光束来检查棒状透明物体内的缺陷的方法，使得检查平面包括物体的横截面。 扫描光束在被插入以截取扫描光束的平行光线的棒状物体的相反侧被检测。 来自检测器的电输出信号被处理以在第一扫描方向上产生第一光强度分布，光强度分布包括由第一和第二阴影边界限定的阴影区域，该阴影区域指示物体的外直径 检查机。 该方法包括分析第一光强分布以确定阴影区域内正强度峰值的存在或不存在，以及如果确定强度峰值存在，则确定强度峰值存在或不存在 强度峰值。 如果作为分析的结果，确定阴影区域内的强度峰值被确定为不存在，或者确定强度峰值区域存在于强度峰值内，则在物体的横截面内存在至少一个结构缺陷 被识别。 在优选实施例中，棒状透明物体是用于制造透射光纤的玻璃芯棒。

    OPTICAL DETECTION APPARATUS AND METHOD OF COMPENSATING DETECTION ERROR
    113.
    发明申请
    OPTICAL DETECTION APPARATUS AND METHOD OF COMPENSATING DETECTION ERROR 审中-公开
    光学检测装置和补偿检测错误的方法

    公开(公告)号：US20150177141A1

    公开(公告)日：2015-06-25

    申请号：US14513386

    申请日：2014-10-14

    Applicant: SAMSUNG ELECTRONICS CO., LTD.

    Inventor： Yeong-bae YEO ,  Hyun-soo JANG

    IPC: G01N21/59 ,  G01N21/75

    CPC classification number: G01N21/59 ,  G01N21/75 ,  G01N2201/0612 ,  G01N2201/0621 ,  G01N2201/0696 ,  G01N2201/105 ,  G01N2201/121 ,  G01N2201/127

    Abstract: An optical detection apparatus for measuring detection chambers of a specimen cartridge includes: a light source unit including light sources which are arranged along a scan line on which the detection chambers are aligned to be scanned, and configured to emit light rays to the detection chambers; and an optical detector configured to detect the light rays having passed through corresponding detection chambers disposed on the scan line. The light sources include main wavelength light sources which are used for measuring samples disposed in the detection chambers, and a sub-wavelength light source which is used for correcting a measuring error.

    Abstract translation: 一种用于测量样本盒的检测室的光学检测装置，包括：光源单元，包括沿扫描线布置的光源，检测室对准扫描线，并且被配置为向检测室发射光线; 以及光检测器，被配置为检测通过设置在扫描线上的相应检测室的光线。 光源包括用于测量设置在检测室中的样品的主波长光源和用于校正测量误差的亚波长光源。

    Optical unit, fluorescence detection device, and fluorescence detection method
    114.
    发明授权
    Optical unit, fluorescence detection device, and fluorescence detection method 有权
    光学单元，荧光检测装置和荧光检测方法

    公开(公告)号：US09006687B2

    公开(公告)日：2015-04-14

    申请号：US14378674

    申请日：2013-02-20

    Applicant: Sharp Kabushiki Kaisha

    Inventor： Yukio Watanabe

    IPC: G01N21/64 ,  G02B13/18 ,  G02B21/00

    CPC classification number: G01N21/645 ,  G01N21/6456 ,  G01N21/6486 ,  G01N2021/6471 ,  G01N2021/6478 ,  G01N2201/06113 ,  G01N2201/10 ,  G01N2201/103 ,  G01N2201/105 ,  G02B19/0028 ,  G02B19/0076 ,  G02B19/008 ,  G02B19/0085 ,  G02B21/0076 ,  G02B2207/113

    Abstract: A first lens configured to convert light from the objective lens into parallel light includes a concave lens part having a concave curved face in a center portion of a flat face, and a convex lens part having a convex curved face around a flat face. Further, the first lens includes first and second regions configured to diverge light through the flat face and the concave curved face and a third region configured to collect light through the convex curved face and the concave curved face. When the sample is on a sample table and sealed in a two-dimensional electrophoresis substrate, light totally reflected by a side surface of the objective lens enters the second region. In contrast, when the sample is directly on the sample table, the light enters the third region.

    Abstract translation: 第一透镜被配置为将来自物镜的光转换为平行光，包括在平面的中心部分具有凹曲面的凹透镜部分和在平坦表面周围具有凸曲面的凸透镜部分。 此外，第一透镜包括被配置为使光通过平面和凹曲面发散的第一和第二区域和被配置为通过凸曲面和凹曲面收集光的第三区域。 当样品在样品台上并密封在二维电泳基质中时，由物镜的侧表面全反射的光进入第二区域。 相反，当样品直接在样品台上时，光进入第三区域。

    Methods and apparatus to obtain suspended particle information
    117.
    发明授权
    Methods and apparatus to obtain suspended particle information 有权
    获得悬浮粒子信息的方法和装置

    公开(公告)号：US08867039B2

    公开(公告)日：2014-10-21

    申请号：US13908637

    申请日：2013-06-03

    Applicant: Steven Ruggiero ,  Carol Tanner

    Inventor： Steven Ruggiero ,  Carol Tanner

    IPC: G01N21/00 ,  G01N15/02 ,  G01N21/51 ,  G01N21/47 ,  G02B21/00 ,  G02B21/18

    CPC classification number: G01N15/0205 ,  G01N21/00 ,  G01N21/31 ,  G01N21/39 ,  G01N21/4785 ,  G01N21/51 ,  G01N21/59 ,  G01N2015/0294 ,  G01N2021/4707 ,  G01N2201/06113 ,  G01N2201/105 ,  G02B21/0096 ,  G02B21/18

    Abstract: Example methods and apparatus for obtaining suspended particle information are disclosed. A disclosed example method includes emitting light from a light source, dividing the light source into a first path and a second path, and directing the first path to a first container comprising a plurality of particles in a suspension material. The example method also includes directing the second path to a second container containing a suspension material devoid of particles, retrieving a first transmission value of the first path through the first container, and retrieving a second transmission value of the second path through the second container. The example method further includes directing the first and second paths to the second and first containers, respectively, retrieving a third transmission value of the first path a through the second container, retrieving a fourth transmission value of the second path through the first container, and calculating a ratio of the first and second transmission values to the third and fourth transmission values to determine an indication of transmissivity for a given wavelength.

    Abstract translation: 公开了用于获得悬浮颗粒信息的示例性方法和装置。 所公开的示例性方法包括从光源发射光，将光源分成第一路径和第二路径，并将第一路径引导到包括悬置材料中的多个颗粒的第一容器。 示例性方法还包括将第二路径引导到第二容器，该第二容器包含没有颗粒的悬挂材料，检索通过第一容器的第一路径的第一传输值，以及检索通过第二容器的第二路径的第二传输值。 该示例方法还包括分别将第一和第二路径引导到第二和第一容器，检索通过第二容器的第一路径a的第三传输值，检索穿过第一容器的第二路径的第四传输值，以及 计算第一和第二传输值与第三和第四传输值的比率，以确定给定波长的透射率的指示。

    Multi-Spectral Defect Inspection for 3D Wafers
    118.
    发明申请
    Multi-Spectral Defect Inspection for 3D Wafers 有权
    3D晶片的多光谱缺陷检测

    公开(公告)号：US20140139822A1

    公开(公告)日：2014-05-22

    申请号：US13742315

    申请日：2013-01-15

    Applicant: KLA-Tencor Corporation

    Inventor： Steven R. Lange

    IPC: G01N21/25 ,  G01N21/21

    CPC classification number: G01N21/9501 ,  G01N21/3563 ,  G01N21/359 ,  G01N21/55 ,  G01N21/9503 ,  G01N2201/0612 ,  G01N2201/105

    Abstract: Multi-spectral defect inspection for 3D wafers is provided. One system configured to detect defects in one or more structures formed on a wafer includes an illumination subsystem configured to direct light in discrete spectral bands to the one or more structures formed on the wafer. At least some of the discrete spectral bands are in the near infrared (NIR) wavelength range. Each of the discrete spectral bands has a bandpass that is less than 100 nm. The system also includes a detection subsystem configured to generate output responsive to light in the discrete spectral bands reflected from the one or more structures. In addition, the system includes a computer subsystem configured to detect defects in the one or more structures on the wafer using the output.

    Abstract translation: 提供了三维晶圆的多光谱缺陷检测。 被配置为检测在晶片上形成的一个或多个结构中的缺陷的一个系统包括被配置为将离散光谱带中的光引导到在晶片上形成的一个或多个结构的照明子系统。 至少一些离散的光谱带处于近红外（NIR）波长范围。 每个离散的光谱带具有小于100nm的带通。 该系统还包括检测子系统，该检测子系统被配置为响应于从一个或多个结构反映的离散频谱带中的光产生输出。 另外，该系统包括被配置为使用输出来检测晶片上的一个或多个结构中的缺陷的计算机子系统。

    MULTIPLEXING EUV SOURCES IN RETICLE INSPECTION
    119.
    发明申请
    MULTIPLEXING EUV SOURCES IN RETICLE INSPECTION 有权
    反复检查中的多重EUV来源

    公开(公告)号：US20140036333A1

    公开(公告)日：2014-02-06

    申请号：US13563850

    申请日：2012-08-01

    Applicant: Daniel Wack ,  Daimian Wang ,  Karl R. Umstadter ,  Ed Ma ,  Frank Chilese

    Inventor： Daniel Wack ,  Daimian Wang ,  Karl R. Umstadter ,  Ed Ma ,  Frank Chilese

    IPC: G02B26/08

    CPC classification number: G02B26/123 ,  G01N21/8806 ,  G01N2021/95676 ,  G01N2201/105 ,  G03F1/24 ,  G03F1/84 ,  G03F7/7005

    Abstract: The present disclosure is directed to an illumination system. The illumination system may include a base member rotatable about a rotation axis and a plurality of mirrors disposed on an outer surface of the base member along a perimeter of the base member. The mirrors may be oriented at a predetermined angle. The illumination system also includes at least two illumination sources. Each of the mirrors of the first plurality of mirrors is configured to receive radiation from the first illumination source at a first portion of each mirror at a first time. The mirror is configured to reflect the radiation to an optical path. Each of the mirrors is further configured to receive radiation from the second illumination source at a second portion of the mirror at a second time. The mirrors reflect the radiation from the second illumination source to the common optical path.

    Abstract translation: 本公开涉及一种照明系统。 照明系统可以包括可围绕旋转轴线旋转的基座构件和沿着基座构件的周边设置在基座构件的外表面上的多个反射镜。 反射镜可以以预定角度定向。 照明系统还包括至少两个照明源。 第一多个反射镜的每个反射镜被配置为在第一时间在每个反射镜的第一部分处接收来自第一照明源的辐射。 镜被配置为将辐射反射到光路。 每个反射镜被进一步配置成在第二时间在反射镜的第二部分处接收来自第二照明光源的辐射。 反射镜将从第二照明源的辐射反射到公共光路。

    METHODS AND APPARATUS TO OBTAIN SUSPENDED PARTICLE INFORMATION
    120.
    发明申请
    METHODS AND APPARATUS TO OBTAIN SUSPENDED PARTICLE INFORMATION 有权
    获取悬浮粒子信息的方法和设备

    公开(公告)号：US20140022545A1

    公开(公告)日：2014-01-23

    申请号：US13908637

    申请日：2013-06-03

    Applicant: Steven Ruggiero ,  Carol Tanner

    Inventor： Steven Ruggiero ,  Carol Tanner

    IPC: G01N15/02

    CPC classification number: G01N15/0205 ,  G01N21/00 ,  G01N21/31 ,  G01N21/39 ,  G01N21/4785 ,  G01N21/51 ,  G01N21/59 ,  G01N2015/0294 ,  G01N2021/4707 ,  G01N2201/06113 ,  G01N2201/105 ,  G02B21/0096 ,  G02B21/18

    Abstract: Example methods and apparatus for obtaining suspended particle information are disclosed. A disclosed example method includes emitting light from a light source, dividing the light source into a first path and a second path, and directing the first path to a first container comprising a plurality of particles in a suspension material. The example method also includes directing the second path to a second container containing a suspension material devoid of particles, retrieving a first transmission value of the first path through the first container, and retrieving a second transmission value of the second path through the second container. The example method further includes directing the first and second paths to the second and first containers, respectively, retrieving a third transmission value of the first path a through the second container, retrieving a fourth transmission value of the second path through the first container, and calculating a ratio of the first and second transmission values to the third and fourth transmission values to determine an indication of transmissivity for a given wavelength.

    Abstract translation: 公开了用于获得悬浮颗粒信息的示例性方法和装置。 所公开的示例性方法包括从光源发射光，将光源分成第一路径和第二路径，并将第一路径引导到包括悬置材料中的多个颗粒的第一容器。 示例性方法还包括将第二路径引导到第二容器，该第二容器包含没有颗粒的悬挂材料，检索通过第一容器的第一路径的第一传输值，以及检索通过第二容器的第二路径的第二传输值。 该示例方法还包括分别将第一和第二路径引导到第二和第一容器，检索通过第二容器的第一路径a的第三传输值，检索穿过第一容器的第二路径的第四传输值，以及 计算第一和第二传输值与第三和第四传输值的比率，以确定给定波长的透射率的指示。

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