公开(公告)号：KR1020080097807A

公开(公告)日：2008-11-06

申请号：KR1020070043126

申请日：2007-05-03

Applicant: 한국기계연구원

Inventor： 조정대 ,  이응숙 ,  김광영

IPC: H01L21/027

CPC classification number: H01L21/0274 ,  G03F7/0002 ,  G03F7/707

Abstract: A micro contact printing device using polymer stamp is provided to control the displacement minutely by using the piezo actuator. A micro contact printing device comprises the stamp chuck(110) jointing and fixing the elastomeric stamp; the substrate chuck(120) which joints and fixes the substrate in order to be in opposite directions to the elastomeric stamp; The frame(130) supporting the stamp chuck to the set up height; the displacement movement part(140) raising the substrate chuck; the load measurement part(150) measuring the applied load in the movement of the substrate chuck; the micro contact printing apparatus(100) using the elastomeric stamp.

Abstract translation: 提供使用聚合物印模的微接触印刷装置，以通过使用压电致动器来微调位移。 微型接触印刷装置包括印模卡盘（110），其连接并固定弹性印章; 衬底卡盘（120），其接合并固定所述衬底以使其与所述弹性体印模相反; 将印模卡盘支撑到设置高度的框架（130） 位移移动部（140）升起基板卡盘; 负载测量部分（150）测量衬底卡盘运动中施加的负载; 所述微接触印刷装置（100）使用所述弹性印章。

公开(公告)号：KR100866597B1

公开(公告)日：2008-11-03

申请号：KR1020070057773

申请日：2007-06-13

Applicant: 한국기계연구원

Inventor： 김충환 ,  신동윤 ,  류병순 ,  김동수 ,  조정대

IPC: B41F23/00 ,  H05K3/00

CPC classification number: B41F23/00 ,  B41F23/0403 ,  H05K3/00

Abstract: A dryer for printing is provided to remove the limit on the size of printed material wound on a rewinder since the drying directions of the printed material and the rewinder are different, and to ensure mass production since the rewinder can wind any size of printed materials and wind the printed materials at high speed. A dryer(10) for printing includes a plurality of transfer rollers(12) which are installed in the spiral direction within the dryer and transfer a printed material(2) with contacting with the unprinted surface of the printed material; and deflection rollers(20,21) which is installed to be inclined with respect to the transfer roller, changes the transfer direction of the printed material to another direction different from the drying direction with contacting with the unprinted surface of the printed material and makes the printed material wound on a rewinder(11).

Abstract translation: 提供用于印刷的干燥器以消除卷绕在复卷机上的打印材料的尺寸，因为打印材料和回卷器的干燥方向不同，并且为了确保批量生产，因为回卷机可以卷绕任何尺寸的印刷材料， 以高速卷起印刷品。 一种用于印刷的干燥机（10）包括多个转印辊（12），它们在干燥器内沿螺旋方向安装，并与打印材料的未打印表面接触地传送印刷材料（2）; 和相对于转印辊倾斜安装的偏转辊（20,21），通过与印刷材料的未印刷表面接触，将印刷材料的转印方向改变到与干燥方向不同的另一方向，并使 卷绕在回卷器（11）上的印刷材料。

公开(公告)号：KR1020080073068A

公开(公告)日：2008-08-08

申请号：KR1020070011602

申请日：2007-02-05

Applicant: 한국기계연구원

Inventor： 조정대 ,  이택민 ,  김충환 ,  김동수 ,  이응숙 ,  최병오 ,  정태영

IPC: H01L21/08 ,  H01L21/027

CPC classification number: G03F7/162 ,  B05C11/1005 ,  H01L21/6715

Abstract: A method and an apparatus for coating a large sized thin film are provided to reduce an application thickness of a liquid chemical material applied on a base layer to be smaller than 10mum by using a bar coater, a squeeze, or a blade. A liquid chemical material(20) is poured on one surface of a base layer(10). A line is wound around an outer periphery of a cylinder, such that a bar coater(30) is formed. The bar coater is rotatably pushed back and forth on one surface of the base layer, such that the liquid chemical material is applied on the base layer. The base layer is selected from the group consisting of a glass substrate, a plastic substrate, a metal substrate, and a wafer. The liquid chemical material is one of photoresist, paste, and ink.

Abstract translation: 提供一种用于涂覆大尺寸薄膜的方法和装置，通过使用刮棒涂布机，挤压机或刮刀将减少施加在基底层上的液体化学材料的应用厚度小于10um。 将液体化学材料（20）注入基层（10）的一个表面上。 线圈绕圆筒的外周缠绕，从而形成刮棒涂布机（30）。 棒涂机在基层的一个表面上可旋转地被推动，使得液体化学材料被施加在基层上。 基层选自玻璃基板，塑料基板，金属基板和晶片。 液体化学材料是光致抗蚀剂，糊剂和油墨之一。

公开(公告)号：KR100837339B1

公开(公告)日：2008-06-12

申请号：KR1020070024599

申请日：2007-03-13

Applicant: 한국기계연구원

Inventor： 조정대 ,  이택민 ,  김충환 ,  김동수 ,  이응숙 ,  김광영 ,  최병오

IPC: H01L21/027 ,  B82Y40/00

CPC classification number: B41K3/12 ,  B29C59/02 ,  G03F7/0002

Abstract: A micro-contact printing device of a roll-print type using a polymer stamp is provided to form fine patterns on a large-sized substrate by using an elastic polymer stamp. A drum member is rotatably installed at a frame(10). A flat table(40) is formed to support the substrate and is installed at the frame to be able to be driven. An elastic polymer stamp includes a first surface attached on the substrate in order to transfer a pattern onto the substrate and a second surface arranged on an outer circumference of the drum member. A metal thin film is positioned between the elastic polymer stamp and the drum member. The second surface of the elastic polymer stamp is attached on the metal thin film. The metal thin film is attached to the outer circumference of the drum member. A print composition supply unit(70) is installed at the frame in order to supply print compositions to the first surface. The elastic polymer stamp corresponds to the pattern formed on the substrate. A first region as a convex part and a second region as a concave part are formed on the outer circumference of the drum member.

Abstract translation: 提供使用聚合物印模的辊式印刷型微接触印刷装置，以通过使用弹性聚合物印模在大尺寸基板上形成精细图案。 鼓构件可旋转地安装在框架（10）上。 形成平台（40）以支撑基板并安装在框架上以能够被驱动。 弹性聚合物印模包括附着在基材上的第一表面，以将图案转印到基底上，第二表面布置在鼓构件的外圆周上。 金属薄膜位于弹性聚合物印模和鼓构件之间。 弹性聚合物印模的第二表面附着在金属薄膜上。 金属薄膜附着在鼓构件的外周。 打印组合物供应单元（70）安装在框架处，以便向第一表面提供印刷组合物。 弹性聚合物印模对应于在基材上形成的图案。 作为凸部的第一区域和作为凹部的第二区域形成在鼓构件的外周上。

公开(公告)号：KR100837337B1

公开(公告)日：2008-06-12

申请号：KR1020070004580

申请日：2007-01-16

Applicant: 한국기계연구원

Inventor： 조정대 ,  이택민 ,  김광영 ,  이응숙 ,  최병오

IPC: H01L21/027

CPC classification number: G03F7/703 ,  G03F7/18

Abstract: An exposure device for non-planar substrate, a non-planar substrate patterning method using the same, and a non-planar substrate patterned by the same method are provided to form a pattern on an entire surface of the non-planar substrate by rotating and exposing the non-planar substrate. A mask preparation process is performed to prepare a mask(100) having a non-planar substrate(300), a glass substrate(200), and a predetermined pattern(50). The mask is attached on a lower part of the glass substrate. A surface of the non-planar substrate is coated with photoresist(400). The non-planar substrate is arranged within a range without diffraction to the mask. The photoresist coated on the non-planar substrate is exposed by using a rotary exposure apparatus. The non-planar substrate is formed with a cylinder.

Abstract translation: 提供一种用于非平面基板的曝光装置，使用该曝光装置的非平面基板图案化方法以及通过相同方法图案化的非平面基板，以通过旋转和/或旋转在非平面基板的整个表面上形成图案 露出非平面基板。 进行掩模准备处理以制备具有非平面基板（300），玻璃基板（200）和预定图案（50）的掩模（100）。 掩模附着在玻璃基板的下部。 非平面基板的表面涂覆有光致抗蚀剂（400）。 非平面基板被布置在不对掩模进行衍射的范围内。 通过使用旋转曝光装置曝光涂布在非平面基板上的光致抗蚀剂。 非平面基板由圆筒形成。

公开(公告)号：KR100810043B1

公开(公告)日：2008-03-05

申请号：KR1020070013858

申请日：2007-02-09

Applicant: 한국기계연구원

Inventor： 이택민 ,  신동윤 ,  김충환 ,  조정대 ,  김동수 ,  최병오

IPC: H01L21/027 ,  H01L21/66 ,  H01L21/00

CPC classification number: G03F7/7065 ,  H01L22/12

Abstract: A method for revising a defect of minute pattern is provided to promptly and accurately correct the defect of minute pattern and to prevent the extension of a defect region by using a mask having a laser passing hole. A mask(50) having a laser passing hole(51) is arranged over minute patterns(30,30'). The laser passing hole is opened so as to be corresponded to minute pattern forming regions(21,21'). A laser is irradiated to the laser passing hole corresponding to a defect minute pattern to remove it. A normal minute pattern is formed on the minute pattern forming region from which the defect minute pattern is removed by filling a minute pattern material into the minute pattern forming regions and hardening the minute pattern material filled in the minute pattern forming regions. The minute patterns are formed in a certain linear arrangement structure along a plane surface of a substrate.

Abstract translation: 提供了修改微小图案缺陷的方法，以及时准确地校正微小图案的缺陷，并且通过使用具有激光通孔的掩模来防止缺陷区域的延伸。 具有激光通孔（51）的掩模（50）布置在微小图案（30,30'）上。 打开激光通过孔，以对应于微小图案形成区域（21,21'）。 将激光照射到对应于缺陷微图案的激光通过孔以将其去除。 通过将微小图案材料填充到微小图案形成区域并使填充在微小图案形成区域中的微小图案材料硬化而在其上去除缺陷微小图案的微小图案形成区域上形成正常的微小图案。 微小图案沿着基板的平面形成为一定的线性排列结构。

公开(公告)号：KR100797092B1

公开(公告)日：2008-01-22

申请号：KR1020060072087

申请日：2006-07-31

Applicant: 한국기계연구원

Inventor： 조정대 ,  최준혁 ,  김광영 ,  이응숙

IPC: H01L29/768

CPC classification number: H01L51/0022 ,  H01L51/052 ,  H01L51/0545 ,  H01L51/055

Abstract: A method for manufacturing an organic thin film driving device using a microcontact printing is provided to improve electron mobility and to implement a fine patterning of 10 ‘í below by using a microcontact printing process and a low temperature process. A metal thin film is formed on a substrate and a gate electrode is formed by using a microcontact printing process(S1). An organic dielectric is formed on the gate electrode and then is patterned(S2). A metal thin film is formed on the organic dielectric and drain and source electrodes are formed by using the microcontact printing process(S3). An organic semiconductor layer is formed on an upper portion including the drain and source electrodes and then is patterned(S4). The microcontact printing process including a procedure for producing a PDMS(PolyDiMethylSiloxane) stamp by mixing polymer mold materials and a procedure for inking a self-assembled monolayer on a surface of the PDMS stamp and transferring a printing pattern on the substrate on which the metal thin film is coated.

Abstract translation: 提供了使用微接触印刷制造有机薄膜驱动装置的方法，以通过使用微接触印刷工艺和低温工艺来提高电子迁移率并实现10℃以下的精细图案化。 在基板上形成金属薄膜，通过微接触印刷工艺形成栅电极（S1）。 在栅电极上形成有机电介质，然后进行图案化（S2）。 在有机电介质上形成金属薄膜，利用微接触印刷工艺（S3）形成漏极和源电极。 在包括漏极和源极的上部形成有机半导体层，然后进行图案化（S4）。 微接触印刷方法包括通过混合聚合物模具材料制备PDMS（聚二甲基硅氧烷）印模的程序和在PDMS印模的表面上印刷自组装单层的步骤，并将印刷图案转印到基材上，其上金属薄片 涂膜。

公开(公告)号：KR100793860B1

公开(公告)日：2008-01-10

申请号：KR1020070003037

申请日：2007-01-10

Applicant: 한국기계연구원

Inventor： 이택민 ,  김용성 ,  신동윤 ,  김충환 ,  조정대 ,  김동수

IPC: H05B33/02

CPC classification number: G09F9/3023 ,  G09F13/22 ,  H05B33/10

Abstract: An EL(Electro Luminescence) segment display device is provided to make thinner a thickness of the EL segment display device and realize a simple appearance of the EL segment display device. An EL segment display device includes a display device body(10) and a controller(30). The display device body light-emitting displays predetermined figure patterns according to a previously set control signal. The controller controls the light emitting of the display device body. The display device body includes a thin-film substrate(11) and a plurality of thin-film EL segments(20). The display device body includes a substrate, a reinforcement layer, and the EL segments. The EL segments are formed by a lower electrode, a dielectric layer, an EL layer, and an upper electrode. The EL segments are formed on the substrate so as to display predetermined patterns by selective light emitting.

Abstract translation: 提供EL（电致发光）段显示装置以使EL段显示装置的厚度更薄，并实现EL段显示装置的简单外观。 EL段显示装置包括显示装置主体（10）和控制器（30）。 显示装置体发光根据先前设定的控制信号显示预定的图案。 控制器控制显示装置主体的发光。 显示装置主体包括薄膜基板（11）和多个薄膜EL部分（20）。 显示装置主体包括基板，加强层和EL段。 EL段由下电极，电介质层，EL层和上电极形成。 EL片段形成在衬底上，以通过选择性发光来显示预定图案。

公开(公告)号：KR100793859B1

公开(公告)日：2008-01-10

申请号：KR1020070004804

申请日：2007-01-16

Applicant: 한국기계연구원

Inventor： 이택민 ,  신동윤 ,  김충환 ,  조정대 ,  김동수 ,  최병오

IPC: H05B33/02 ,  H05B33/10

CPC classification number: H05B33/12 ,  H05B33/10 ,  H05B33/22 ,  H05B33/26

Abstract: A paper electro luminescence lighting element and a manufacturing method thereof are provided to perform a comparatively low temperature hardening process by adding a UV cured photoinitiator to ink materials of lamination layers. A paper electro luminescence lighting element includes a paper substrate(10), a lower electrode(20), a dielectric layer(30), an EL layer(40), and an upper electrode(50). The lower electrode is cured by laminate-printing a conductive ink material on the paper substrate. The dielectric layer is cured by laminate-printing a dielectric ink material on the lower electrode. The electro luminance layer is cured by laminate printing a luminescence ink material on the dielectric layer. The upper layer is cured by laminate-printing a conductive ink material on the EL layer. A reinforcement layer of a resin material is laminate-printed on the paper substrate. The lower electrode, the dielectric layer, the EL layer, and the upper electrode are laminate-printed on the reinforcement layer.

Abstract translation: 提供一种纸电致发光照明元件及其制造方法，通过向层叠层的油墨材料添加UV固化光引发剂来进行比较低温的硬化处理。 纸电致发光照明元件包括纸基片（10），下电极（20），电介质层（30），EL层（40）和上电极（50）。 通过在纸基材上层压印刷导电油墨材料来固化下电极。 电介质层通过在下电极上层压印刷电介质油墨材料来固化。 通过在电介质层上层压印刷发光墨水材料来固化电致发光层。 通过在EL层上层压印刷导电油墨材料来固化上层。 树脂材料的加强层被层压印刷在纸基材上。 下电极，电介质层，EL层和上电极层压印刷在加强层上。

公开(公告)号：KR100787237B1

公开(公告)日：2007-12-21

申请号：KR1020060056470

申请日：2006-06-22

Applicant: 한국기계연구원

Inventor： 조정대 ,  김광영 ,  이응숙 ,  최병오

IPC: H01L21/027

CPC classification number: G03F7/0002 ,  B29C59/022 ,  B82Y40/00

Abstract: A micro contact printing apparatus of a roll-print method using a PDMS(Polydimethylsiloxane) is provided to control the size of a substrate for printing depending on a diameter of a drum member by surrounding an outer surface of the drum member by the PDMS as a shape of the roll-print method. A drum member(20) is installed rotatably on a frame(10). A plane table(40) supports a substrate, and is installed to be driven on the frame. A PDMS(Polydimethylsiloxane) stamp(60) in which a predetermined pattern is formed is located to surround the outer surface of the drum member and closed to the substrate. A metal thin film(65) is installed to be adhered to the outer surface and a contrary surface of the PDMS. A print composition supply unit(70) is installed on the frame, and supplies a predetermined print composition to the surface on which the pattern is formed.

Abstract translation: 提供使用PDMS（聚二甲基硅氧烷）的卷筒印刷方法的微型接触式印刷装置，以通过将PDMS的鼓面部件的外表面包围的方式来控制用于印刷的基板的尺寸，这取决于滚筒部件的直径 滚动打印方式的形状。 鼓构件（20）可旋转地安装在框架（10）上。 平面台（40）支撑基板，并被安装成在框架上被驱动。 其中形成有预定图案的PDMS（聚二甲基硅氧烷）印模（60）被定位成围绕鼓构件的外表面并且关闭到基底。 安装金属薄膜（65）粘附到PDMS的外表面和相对表面。 打印构图供给单元（70）安装在框架上，并将预定的打印构图提供到其上形成有图案的表面。