公开(公告)号：US20140367641A1

公开(公告)日：2014-12-18

申请号：US14467497

申请日：2014-08-25

Applicant: 3M INNOVATIVE PROPERTIES COMPANY

Inventor： Jun-Ying Zhang ,  Michael A. Haase ,  Todd A. Ballen ,  Terry L. Smith

IPC: H01L33/06 ,  H01L33/28

CPC classification number: H01L33/06 ,  B82Y20/00 ,  C23C14/021 ,  C23C14/0652 ,  C23C16/0227 ,  C23C16/345 ,  G02B6/4439 ,  H01L21/30604 ,  H01L21/46 ,  H01L33/28 ,  H01L33/46 ,  H01S5/18369 ,  H01S5/347

Abstract: Multilayer construction is disclosed. The multilayer construction includes a II-VI semiconductor layer and a Si3N4 layer disposed directly on the II-VI semiconductor layer.

Abstract translation: 公开了多层结构。 多层结构包括直接设置在II-VI半导体层上的II-VI半导体层和Si 3 N 4层。

公开(公告)号：US20130286367A1

公开(公告)日：2013-10-31

申请号：US13929505

申请日：2013-06-27

Applicant: 3M INNOVATIVE PROPERTIES COMPANY

Inventor： Michael A. Haase ,  Jeffrey H. Tokie ,  Daniel J. Theis ,  Brian K. Nelson

IPC: G03F7/20

CPC classification number: G03F7/70516 ,  G03F7/22 ,  G03F7/70791 ,  G03F9/7003 ,  H05K1/0269 ,  H05K1/0393 ,  H05K3/0008 ,  H05K3/0082 ,  H05K2201/09918 ,  H05K2203/1545 ,  H05K2203/163 ,  H05K2203/166

Abstract: A system for making flexible circuit films includes an inelastic conveyor, a web handling apparatus configured to pass a flexible substrate around the inelastic conveyor, an image acquisition apparatus configured to measure positions of a first set of alignment marks on the flexible substrate at a first conveyor location, an exposure apparatus configured to patternwise expose a photosensitive material on the flexible substrate at a second conveyor location, and an image processor configured to receive the measured positions of the first set of alignment marks, and to compare the measured positions with reference positions of the first set of alignment marks. The exposure apparatus is configured to patternwise expose the photosensitive material based on the comparison between the measured positions and the reference positions.

Abstract translation: 一种用于制造柔性电路膜的系统包括非弹性输送机，配置成使柔性基板围绕非弹性输送机通过的幅材处理设备，被配置成在第一输送机上测量柔性基板上的第一组对准标记的位置的图像采集设备 位置，曝光装置被配置为在第二传送器位置以图形方式在柔性基板上曝光感光材料，以及图像处理器，被配置为接收第一组对准标记的测量位置，并将测量位置与参考位置 第一组对齐标记。 曝光装置被配置为基于测量位置和参考位置之间的比较来图案化地曝光感光材料。