公开(公告)号：US20050106876A1

公开(公告)日：2005-05-19

申请号：US10961798

申请日：2004-10-08

Applicant: Charles Taylor ,  Darryl Barlett ,  Douglas Perry ,  Roy Clarke ,  Jason Williams

Inventor： Charles Taylor ,  Darryl Barlett ,  Douglas Perry ,  Roy Clarke ,  Jason Williams

IPC: C23C16/46 ,  C23C16/52 ,  G01J3/10 ,  G01J5/00 ,  G01J5/08 ,  G01J5/60 ,  H01L21/302 ,  H01L21/31 ,  H01L21/461 ,  H01L21/469

CPC classification number: G01J5/0003 ,  C23C16/46 ,  C23C16/52 ,  G01J3/024 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/10 ,  G01J5/0007 ,  G01J5/0821 ,  G01J5/60

Abstract: The invention is an optical method and apparatus for measuring the temperature of semiconductor substrates in real-time, during thin film growth and wafer processing. Utilizing the nearly linear dependence of the interband optical absorption edge on temperature, the present method and apparatus result in highly accurate measurement of the absorption edge in diffuse reflectance and transmission geometry, in real time, with sufficient accuracy and sensitivity to enable closed loop temperature control of wafers during film growth and processing. The apparatus operates across a wide range of temperatures covering all of the required range for common semiconductor substrates.

Abstract translation: 本发明是用于在薄膜生长和晶片处理期间实时测量半导体衬底的温度的光学方法和装置。 利用带间光吸收边缘对温度的近似线性依赖性，本方法和装置实时地实现了对扩散反射和透射几何形状的吸收边的高度精确测量，具有足够的精度和灵敏度以实现闭环温度控制 的薄膜生长和加工中的晶片。 该装置在涵盖普通半导体衬底的所有范围的宽范围的温度范围内工作。

公开(公告)号：US20050046856A1

公开(公告)日：2005-03-03

申请号：US10676175

申请日：2003-09-30

Applicant: Rajasekhar Rao ,  John Melchior ,  Holger Glatzel

Inventor： Rajasekhar Rao ,  John Melchior ,  Holger Glatzel

IPC: G01B9/02 ,  G01J1/42 ,  G01J9/02 ,  G03F7/20 ,  H01S3/00 ,  H01S3/036 ,  H01S3/038 ,  H01S3/04 ,  H01S3/041 ,  H01S3/08 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/0975 ,  H01S3/102 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/11 ,  H01S3/13 ,  H01S3/134 ,  H01S3/139 ,  H01S3/22 ,  H01S3/223 ,  H01S3/225 ,  H01S3/23

CPC classification number: G01J1/4257 ,  G01J1/429 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/024 ,  G01J3/027 ,  G01J3/26 ,  G01J9/02 ,  G01J9/0246 ,  G03F7/70025 ,  G03F7/70575 ,  G03F7/70933 ,  H01S3/0057 ,  H01S3/0071 ,  H01S3/02 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0385 ,  H01S3/0401 ,  H01S3/041 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/0975 ,  H01S3/1024 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/1305 ,  H01S3/134 ,  H01S3/139 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/223 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2258 ,  H01S3/2333 ,  H01S3/2366

Abstract: A wavemeter and method for measuring bandwidth for a high repetition rate gas discharge laser having an output laser beam comprising a pulsed output of greater than or equal to 15 mJ per pulse, sub-nanometer bandwidth tuning range pulses having a femptometer bandwidth precision and tens of femptometers bandwidth accuracy range, for measuring bandwidth on a pulse to pulse basis at pulse repetition rates of 4000 Hz and above, is disclosed which may comprise a focusing lens having a focal length; an optical interferometer creating an interference fringe pattern; an optical detection means positioned at the focal length from the focusing lens; and a bandwidth calculator calculating bandwidth from the position of interference fringes in the interference fringe pattern incident on the optical detection means, defining a DID and a DOD, the respective distances between a pair of first fringe borders and between a pair of second fringe borders in the interference pattern on an axis of the interference pattern, and according to the formula Δλ=λ0[DOD2−DID2]/[8f2−D02], where λ0 is an assumed constant wavelength and D0=(DOD−DID)/2, and f is the focal length. The optical detector may be a photodiode array. The wavemeter may have an optical interferometer having a slit function; the slit function and the focal length being selected to deliver to the optical detector the two innermost fringes of the optical interference ring pattern. The optical detector may comprise an array of pixels each having a height and width and the array having a total width; and an aperture at the optical input to the optical interferometer may selectively input to the optical interferometer a portion of a beam of light sufficient for the output of the etalon to illuminate the optical detector over the height of each respective pixel height and the total width. The optical interferometer may comprise an etalon having a slit function of 3 pm or less and a finesses of 25 or greater; and the focal length may be 1.5 meters. A second stage diffuser may be placed between the first stage diffuser and the etalon delivering a narrow cone of light to the etalon, and an aperture between the second stage diffuser and the etalon may deliver to the etalon a thin strip of the narrow cone of light.

公开(公告)号：US20030016363A1

公开(公告)日：2003-01-23

申请号：US10173190

申请日：2002-06-14

Inventor： Richard L. Sandstrom ,  John T. Melchior ,  Rajasekhar Rao

IPC: H01S003/22 ,  H01S003/223 ,  G01J003/45 ,  G01B009/02

CPC classification number: G01J3/26 ,  G01J1/4257 ,  G01J1/429 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/024 ,  G01J3/027 ,  G01J9/02 ,  G01J9/0246 ,  G03F7/70025 ,  G03F7/70575 ,  G03F7/70933 ,  H01S3/0057 ,  H01S3/0071 ,  H01S3/02 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0385 ,  H01S3/0401 ,  H01S3/041 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/0975 ,  H01S3/1024 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/1305 ,  H01S3/134 ,  H01S3/139 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/223 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2258 ,  H01S3/2333 ,  H01S3/2366

Abstract: The present invention provides a wavemeter for an ultraviolet laser capable of long life beam quality monitoring in a pulsed ultraviolet laser system at pulse rates greater than 2000 Hz at pulse energies at 5 mJ or greater. In a preferred embodiment an enhanced illumination configuration reduces per pulse illumination of an etalon by a factor of 28 compared to a popular prior art configuration. Optics are provided in this embodiment which reduce light entering the etalon to only that amount needed to illuminate a linear photo diode array positioned to measure interference patterns produced by the etalon. In this preferred embodiment two sample beams produced by reflections from two surfaces of a beam splitter are diffused by a defractive diffuser and the output of the defractive diffuser is focused on two separate secondary diffusers effectively combining both beams in two separate spectrally equivalent diffuse beams. One beam is used for wavelength and bandwidth measurement and the other beam is used for calibration. In preferred embodiments an etalon chamber contains nitrogen with an oxygen concentration of between 1.6 and 2.4 percent.

Abstract translation: 本发明提供了一种用于紫外激光器的波长计，其能够在脉冲能量为5mJ以上的脉冲紫外激光系统中以大于2000Hz的脉冲速率进行长寿命光束质量监测。 在一个优选实施例中，与常用的现有技术配置相比，增强的照明配置将标准具的每脉冲照明降低了28倍。 在该实施例中提供光学器件，其将进入标准具的光仅仅照射照亮定位成测量由标准具产生的干涉图案的线性光电二极管阵列所需的量。 在该优选实施例中，通过来自分束器的两个表面的反射产生的两个采样光束被减光扩散器扩散，并且消光扩散器的输出聚焦在两个分开的二次扩散器上，两个分离的二次扩散器在两个分开的光谱等效漫射光束中有效地组合两个光束。 一个波束用于波长和带宽测量，另一个波束用于校准。 在优选实施例中，标准具室含有氧浓度在1.6和2.4％之间的氮。

公开(公告)号：US06411381B1

公开(公告)日：2002-06-25

申请号：US09562256

申请日：2000-05-02

Applicant: David E. Aspnes ,  Martin Ebert

Inventor： David E. Aspnes ,  Martin Ebert

IPC: G01J304

CPC classification number: G01J3/10 ,  G01J3/024 ,  G01J3/04

Abstract: A spectroscopy system having enhanced noise reduction that comprises (i) an arc lamp light source of emitted light, which emitted light is projected as an image of the light source; (ii) a slit aperture through which the emitted light is projected; and (iii) a detector operably associated with the slit aperture for detecting the emitted light. The slit aperture, the arc lamp, and the image of the arc lamp each have a major axis. The major axis of the slit aperture is oriented essentially orthogonally to the major axis of the image of the arc lamp, so that the signal-to-noise ratio of the spectroscopy system is improved as compared to the signal-to-noise ratio of the spectroscopy system when the major axis of the slit aperture is oriented essentially parallel to the major axis of the image of the arc lamp.

Abstract translation: 一种具有增强的噪声降低的光谱系统，其包括（i）发射的光的弧光灯光源，其被发射为光源的图像; （ii）狭缝孔，所述发射的光被投射通过所述狭缝孔; 和（iii）与狭缝孔可操作地相关联的检测发射光的检测器。 狭缝孔径，弧光灯和弧光灯的图像各自具有长轴。 狭缝孔的长轴基本上与弧光灯的图像的主轴正交地定向，使得与信号噪声比的信噪比相比，光谱系统的信噪比得到改善 当狭缝孔的长轴基本上平行于电弧灯的图像的长轴取向时，光谱系统。

公开(公告)号：US5260767A

公开(公告)日：1993-11-09

申请号：US808148

申请日：1991-12-16

Applicant: Lacy G. Cook

Inventor： Lacy G. Cook

IPC: G01J3/28 ,  G01J3/36

CPC classification number: G01J3/02 ,  G01J3/024 ,  G01J3/2823

Abstract: An all-reflective imaging spectrometer (10) has a three-mirror anastigmat (12) acting as its objective and a reflective triplet (14) with a dispersive element (18) providing the spectrometer collimator and imager. The system is capable of imaging an object being viewed to provide a plurality of different wavelength images of that object.

Abstract translation: 全反射成像光谱仪（10）具有用作其目的的三镜式反射镜（12）和具有提供光谱仪准直仪和成像器的色散元件（18）的反射三联体（14）。 该系统能够对被观看的物体成像以提供该物体的多个不同的波长图像。

公开(公告)号：US4264205A

公开(公告)日：1981-04-28

申请号：US940360

申请日：1978-09-07

Applicant: Isaac J. Landa

Inventor： Isaac J. Landa

IPC: G01J3/02 ,  G01J3/06 ,  G01J3/10 ,  G01J3/12 ,  G01J3/18 ,  G01J3/26 ,  G01J3/28 ,  G01N21/31

CPC classification number: G01J3/06 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0221 ,  G01J3/0232 ,  G01J3/024 ,  G01J3/0262 ,  G01J3/10 ,  G01J3/26 ,  G01J3/2889 ,  G01N21/314 ,  G01J2003/1273 ,  G01J2003/2853 ,  G01J3/1838

Abstract: An improved optical system is disclosed for rapid, accurate spectral analysis of the reflectivity or transmissivity of samples. A concave holographic diffraction grating oscillated at high speed is utilized to provide a rapid scanning of monochromatic light through a spectrum of wavelengths. The grating is positively driven at very high speed. The rapid scan by the grating enables the reduction of noise error by averaging over a large number of cycles. It also reduces the measurement time and thus prevents sample heating by excessive exposure to light energy. A filter wheel having opaque segments is rotated in the optical path and is synchronous with the grating. The filter wheel is divided into two arcuate segments separated by the opaque segments arranged approximately 180 degrees apart. One arcuate segment of the wheel transmits only first order light. The other arcuate segment transmits only second order light. Separate photodetectors are employed during infrared analysis of samples for detecting first order and second order wavelength transmissions and an electronic decoder apparatus is utilized for switching between detectors.

Abstract translation: 公开了一种改进的光学系统，用于对样品的反射率或透射率进行快速，准确的光谱分析。 利用以高速振荡的凹面全息衍射光栅，通过一系列波长快速扫描单色光。 光栅以非常高的速度被正向驱动。 光栅的快速扫描使得能够通过大量循环的平均来减少噪声误差。 它还减少测量时间，从而防止过度暴露于光能的样品加热。 具有不透明段的滤光轮在光路中旋转并与光栅同步。 过滤轮被分成两个弧形段，这些弧段由分开大约180度的不透明段分开。 车轮的一个弧形段仅传送一级光。 另一个弧形段仅传送二阶光。 在用于检测一阶和二阶波长传输的样本的红外分析期间采用单独的光电检测器，并且使用电子解码器装置在检测器之间切换。

公开(公告)号：WO2019051602A1

公开(公告)日：2019-03-21

申请号：PCT/CA2018/051140

申请日：2018-09-14

Applicant: POLYVALOR, LIMITED PARTNERSHIP

Inventor： LEBLOND, Frédéric ,  ST-ARNAUD, Karl ,  DAOUST, François

IPC: G01J3/44 ,  G01N21/63

CPC classification number: G01N21/65 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0218 ,  G01J3/024 ,  G01J3/06 ,  G01J3/32 ,  G01J3/44 ,  G01J2003/064 ,  G01N2201/08

Abstract: A system and method for imaging a sample using Raman spectrometry. Optical fibers having opposite first ends and second ends are arranged with the first ends and second ends in respective two-dimensional arrays. The two-dimensional arrays maintain relative positions of the optical fibers to one another from the first ends to the second ends in a way that the first end of each optical fibers of the bundle can simultaneously collect a corresponding Raman signal portion scattered from specific spatial coordinates of the area of the sample. The so-collected Raman signal portions are propagated towards the corresponding second end, from which are outputted and detected simultaneously using an array of detectors.

公开(公告)号：WO2016115720A1

公开(公告)日：2016-07-28

申请号：PCT/CN2015/071392

申请日：2015-01-23

Applicant: 台湾超微光学股份有限公司

Inventor： 王梦华 ,  张癸五 ,  洪健翔 ,  周昌诚 ,  叶展良

IPC: G01J3/02

CPC classification number: G01J3/0243 ,  G01J3/0202 ,  G01J3/024 ,  G01J3/0256 ,  G01J3/0291 ,  G01J3/20

Abstract: 一种光谱仪（100）及其（100）光输入部（32）。光输入部（32）包括一组装结构（322），组装结构（322）形成于光输入部（32）的一贯通孔（3211）的孔壁（321），其中一光线（L1）在通过贯通孔（3211）后能沿着光路径（13）而入射至光谱仪（100）的一分光件（2），以使分光件（2）对光线（L1）分光，组装结构（322）用于可拆卸地组装一光学元件（200），当光学元件（200）组装于组装结构（322）时，光学元件（200）的一光轴衔接于光路径（13），以使通过光学元件（200）的一光线（L1）沿着光轴与光路径（13）而入射至分光件（2）。

公开(公告)号：WO2014109679A2

公开(公告)日：2014-07-17

申请号：PCT/RU2014/000094

申请日：2014-02-13

Applicant: ЧУЙКО, Григорий Владимирович

Inventor： ЧУЙКО, Григорий Владимирович ,  ШУЛЬГИН, Владимир Алексеевич ,  БАБИШОВ, Элнур Мегралиевич ,  ГОЛЬДФАРБ, Владимир Абрамович ,  МИНАКОВ, Дмитрий Анатольевич ,  ПАХОМОВ, Геннадий Владимирович ,  СОКОЛОВА, Ольга Владимировна ,  СТРЫГИН, Владимир Дмитриевич ,  ЧУРИКОВ, Анатолий Алексеевич

CPC classification number: B07C5/342 ,  G01J3/0218 ,  G01J3/024 ,  G01J3/10 ,  G01N21/85

Abstract: Оптоволоконный лазерный сортировщик содержит устройство транспортировки сортируемого материала, устройство лазерного освещения сортируемого материала, устройство развертки лазерного пучка, устройство считывания и обработки изображения, устройство для удаления дефектных материалов. В устройстве дополнительно содержится оптическое волокно, вход которого через фокусирующую оптику связан с оптическими выходами одного или нескольких лазеров, а выход оптического волокна связан с фокусирующей и цилиндрической оптикой развертки лазерного пучка. Высокая освещенность позволяет одновременно регистрировать разными устройствами считывания отраженное и прошедшее лазерное излучение, сохраняя при этом высокую производительность сортировки. При этом устройства считывания могут выполнять свои функции в разных спектральных диапазонах. Возможность управления мощностью нескольких лазеров позволяет формировать необходимый спектральный состав освещения рабочей области. Функциональные возможности сортировщика расширяются при коммутации источников лазерного освещения. Малая инерционность управления лазерным освещением позволяет по мере движения продукта отключать подсветку одного диапазона и подключать подсветку в другом диапазоне, синхронизируя этот процесс со строчной частотой видеокамеры, оснащенной линейным видеодатчиком.

Abstract translation: 一种光纤激光分选机，包括用于输送待分选材料的装置，用于激光照射待分选材料的装置，用于扫描激光束的装置，用于读取和处理图像的装置，以及装置 用于去除有缺陷的材料。 该装置还包括光纤，其输入通过聚焦光学器件连接到一个或多个激光器的光学输出，并且其光纤的输出连接到用于扫描激光束的聚焦和圆柱形光学器件 。 高水平的照明允许同时在多个装置上注册反射和透射的激光辐射的读数，同时保持分选中的高性能。 读取装置可以在不同的光谱范围内工作。 调整多个激光器的功率的能力允许在工作空间内产生必要的照明光谱组成。 切换激光照明的来源拓宽了分拣机的功能。 在激光照射控制中的快速响应允许在产品移动期间停用一个光范围并激活另一个光线，该过程与设置有线性视频传感器的摄像机的线路频率同步。

公开(公告)号：WO2011117565A3

公开(公告)日：2012-02-16

申请号：PCT/GB2011000326

申请日：2011-03-08

Applicant: AVALON INSTR LTD ,  DENNIS ANDREW COLM ,  THOMPSON DAVID MARK

Inventor： DENNIS ANDREW COLM ,  THOMPSON DAVID MARK

IPC: G01J3/02 ,  G02B6/24

CPC classification number: G01J3/02 ,  G01J3/0218 ,  G01J3/024 ,  G01J3/0289 ,  G01J3/44 ,  G01N21/65 ,  G01N2021/4742 ,  G01N2021/6484 ,  G01N2201/0833 ,  G02B6/403

Abstract: Certain embodiments are directed to devices and methods to facilitate alignment of a sampling region and an illumination region. In certain examples, a light emission signal can be positioned within an alignment signal to align a collection optical fiber (765) with a region of a sample illuminated by a light source (725).

Abstract translation: 某些实施例涉及便于对准采样区域和照明区域的装置和方法。 在某些示例中，发光信号可以位于对准信号内，以将收集光纤（765）与由光源（725）照射的样品的区域对准。