公开(公告)号：US20140178861A1

公开(公告)日：2014-06-26

申请号：US14194437

申请日：2014-02-28

Applicant: Reuven DUER

Inventor： Reuven DUER

IPC: G01N21/64 ,  G01N33/543

CPC classification number: G01N33/54373 ,  B01L3/502715 ,  B01L2300/0636 ,  B01L2300/0654 ,  B01L2300/0816 ,  B01L2300/0819 ,  C12Q1/6825 ,  G01N21/6428 ,  G01N21/6454 ,  G01N21/648 ,  G01N33/56988 ,  G01N2021/6439 ,  G01N2201/0696 ,  G01N2201/08 ,  G01N2201/103 ,  G02B6/4226 ,  Y10T436/143333

Abstract: The invention provides methods and devices for generating optical pulses in one or more waveguides using a spatially scanning light source. A detection system, methods of use thereof and kits for detecting a biologically active analyte molecule are also provided. The system includes a scanning light source, a substrate comprising a plurality of waveguides and a plurality of optical sensing sites in optical communication with one or more waveguide of the substrate, a detector that is coupled to and in optical communication with the substrate, and means for spatially translating a light beam emitted from said scanning light source such that the light beam is coupled to and in optical communication with the waveguides of the substrate at some point along its scanning path. The use of a scanning light source allows the coupling of light into the waveguides of the substrate in a simple and cost-effective manner.

Abstract translation: 本发明提供了使用空间扫描光源在一个或多个波导中产生光脉冲的方法和装置。 还提供了检测系统，其使用方法和用于检测生物活性分析物分子的试剂盒。 该系统包括扫描光源，包括多个波导的基板和与基板的一个或多个波导光学通信的多个光学感测位置，耦合到基板并与光学连接的检测器，以及装置 用于空间地平移从所述扫描光源发射的光束，使得所述光束在沿其扫描路径的某点处耦合到所述衬底的波导并与所述衬底的波导光通信。 使用扫描光源允许以简单且成本有效的方式将光耦合到衬底的波导中。

公开(公告)号：US08493557B2

公开(公告)日：2013-07-23

申请号：US13202681

申请日：2010-01-22

Applicant: Shigeru Matsui

Inventor： Shigeru Matsui

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N2201/103

Abstract: A surface inspecting apparatus rotates a semiconductor wafer 100 (inspection object) as a main scan while translating the semiconductor wafer 100 as an auxiliary scan, illuminates the surface of the semiconductor wafer 100 with illuminating light 21, thereby forms an illumination spot 3 as the illumination area of the illuminating light 21, detects scattered or diffracted or reflected light from the illumination spot, and detects a foreign object existing on the surface of the semiconductor wafer 100 or in a part of the semiconductor wafer 100 in the vicinity of the surface based on the result of the detection. In the surface inspecting apparatus, the translation speed of the auxiliary scan is controlled according to the distance from the rotation center of the semiconductor wafer 100 in the main scan to the illumination spot. With this control, the inspection time can be shortened while the deterioration in the detection sensitivity and the increase in the thermal damage during the surface inspection are suppressed.

公开(公告)号：US08477302B2

公开(公告)日：2013-07-02

申请号：US12412776

申请日：2009-03-27

Applicant: Yuta Urano ,  Toshiyuki Nakao ,  Yoshimasa Oshima ,  Akira Hamamatsu

Inventor： Yuta Urano ,  Toshiyuki Nakao ,  Yoshimasa Oshima ,  Akira Hamamatsu

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N21/9505 ,  G01N2021/8854 ,  G01N2021/8874 ,  G01N2201/103 ,  G01N2201/1045

Abstract: A defect inspection apparatus for inspecting a surface of a sample includes a stage for holding the sample, an illumination optical system that irradiates a laser beam to form a linear illuminated area on the surface of the sample, a detection optical system, and a signal processing system. The detection optical system includes a detector device having a plurality of pixels for detecting light scattered from the linear illuminated area of the surface of the sample, and that outputs in parallel a plurality of detection signals having mutually different sensitivities acquired from the plurality of pixels of the detector device. The signal processing system selects an unsaturated detection signal from the plurality of detection signals and detects a defect in accordance with the selected detection signal.

Abstract translation: 用于检查样品表面的缺陷检查装置包括用于保持样品的载物台，照射光学系统，其照射激光束以在样品的表面上形成线性照射区域，检测光学系统和信号处理 系统。 检测光学系统包括具有多个像素的检测器装置，用于检测从样品表面的线性照射区域散射的光，并且并行地输出具有从多个像素获得的具有相互不同的灵敏度的多个检测信号 检测器装置。 信号处理系统从多个检测信号中选择不饱和检测信号，并根据所选择的检测信号检测缺陷。

公开(公告)号：US08268551B2

公开(公告)日：2012-09-18

申请号：US10540224

申请日：2004-01-27

Applicant: William G. Tong

Inventor： William G. Tong

IPC: C12Q1/68

CPC classification number: G01N21/636 ,  G01J3/42 ,  G01N21/253 ,  G01N30/74 ,  G01N2201/103 ,  G01N2201/12746

Abstract: Techniques and systems for using nonlinear four wave mixing to optically measure microarrays with sample cells of biological or chemical materials. Examples of suitable microarrays include but are not limited to DNA microchips and capillary electrophoresis microarrays.

Abstract translation: 使用非线性四波混合的光学测量微阵列与生物或化学材料样品池的技术和系统。 合适的微阵列的实例包括但不限于DNA微芯片和毛细管电泳微阵列。

公开(公告)号：US20090279081A1

公开(公告)日：2009-11-12

申请号：US12412776

申请日：2009-03-27

Applicant: Yuta Urano ,  Toshiyuki Nakao ,  Yoshimasa Oshima ,  Akira Hamamatsu

Inventor： Yuta Urano ,  Toshiyuki Nakao ,  Yoshimasa Oshima ,  Akira Hamamatsu

IPC: G01N21/896

CPC classification number: G01N21/9501 ,  G01N21/9505 ,  G01N2021/8854 ,  G01N2021/8874 ,  G01N2201/103 ,  G01N2201/1045

Abstract: A defect inspection apparatus for inspecting a surface of a sample includes a stage for holding the sample, an illumination optical system that irradiates a laser beam to form a linear illuminated area on the surface of the sample, a detection optical system, and a signal processing system. The detection optical system includes a detector device having a plurality of pixels for detecting light scattered from the linear illuminated area of the surface of the sample, and that outputs in parallel a plurality of detection signals having mutually different sensitivities acquired from the plurality of pixels of the detector device. The signal processing system selects an unsaturated detection signal from the plurality of detection signals and detects a defect in accordance with the selected detection signal.

Abstract translation: 用于检查样品表面的缺陷检查装置包括用于保持样品的载物台，照射光学系统，其照射激光束以在样品的表面上形成线性照射区域，检测光学系统和信号处理 系统。 检测光学系统包括具有多个像素的检测器装置，用于检测从样品表面的线性照射区域散射的光，并且并行地输出具有从多个像素获得的具有相互不同的灵敏度的多个检测信号 检测器装置。 信号处理系统从多个检测信号中选择不饱和检测信号，并根据所选择的检测信号检测缺陷。

公开(公告)号：US07599582B2

公开(公告)日：2009-10-06

申请号：US10994862

申请日：2004-11-22

Applicant: Ronald E. Beselt ,  Frank M. Haran ,  John A. Harjula ,  Ulysse S. Dos Santos

Inventor： Ronald E. Beselt ,  Frank M. Haran ,  John A. Harjula ,  Ulysse S. Dos Santos

IPC: G02B6/00 ,  G01B11/16 ,  G01J3/00 ,  G01N21/84

CPC classification number: G01N21/89 ,  G01N21/3554 ,  G01N21/3559 ,  G01N21/8806 ,  G01N2201/103

Abstract: A scanning system includes a cable take-up mechanism that uses a series of pulleys that determine the bend diameters of a scanning system. The mechanism is particularly suited for a spectrometric, e.g., infrared, scanning system where moving scanner or sensor head essentially houses only the optical elements while essentially of all the other electronic and optical components associated with the measurement are housed in an easily accessible compartment that is remote from the moving scanner head. Light is transmitted through optical fiber cables. The cable take-up mechanism maintains the fiber optic cable at essentially constant total bend length and bend diameter thereby minimizing any dynamic changes to spectral bend losses as the optical head is scanned. The light weight construction of the sensor head further reduces vibrations associated with the moving scanner head.

Abstract translation: 扫描系统包括使用确定扫描系统的弯曲直径的一系列滑轮的电缆卷取机构。 该机制特别适用于光谱测量，例如红外线扫描系统，其中移动的扫描仪或传感器头基本上仅容纳光学元件，而基本上与测量相关联的所有其它电子和光学组件基本上容纳在易于访问的隔室中， 远离移动的扫描仪头。 光通过光缆传输。 电缆拾取机构将光纤电缆保持在基本上恒定的总弯曲长度和弯曲直径，从而最小化当光学头被扫描时光谱弯曲损耗的任何动态变化。 传感头的重量轻的构造进一步降低与移动的扫描头相关的振动。

公开(公告)号：US07190447B2

公开(公告)日：2007-03-13

申请号：US11372556

申请日：2006-03-11

Applicant: Steven W. Meeks

Inventor： Steven W. Meeks

IPC: G01N21/00

CPC classification number: G01N21/9506 ,  G01B11/0616 ,  G01B11/0641 ,  G01B11/065 ,  G01B11/303 ,  G01B11/306 ,  G01N21/21 ,  G01N21/47 ,  G01N21/9501 ,  G01N21/958 ,  G01N2021/8427 ,  G01N2021/8841 ,  G01N2201/103 ,  G01N2201/104 ,  G01N2201/1045 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A double-sided optical inspection system is presented which may detect and classify particles, pits and scratches on thin film disks or wafers in a single scan of the surface. In one embodiment, the invention uses a pair of orthogonally oriented laser beams, one in the radial and one in the circumferential direction on both surfaces of the wafer or thin film disk. The scattered light from radial and circumferential beams is separated via their polarization or by the use of a dichroic mirror together with two different laser wavelengths.

Abstract translation: 提出了一种双面光学检测系统，其可以在表面的单次扫描中检测和分类薄膜盘或晶片上的颗粒，凹坑和划痕。 在一个实施例中，本发明使用一对正交取向的激光束，一个在径向上，一个在圆周方向上在晶片或薄膜盘的两个表面上。 来自径向和周向光束的散射光通过其偏振分离，或者通过使用二向色镜与两种不同的激光波长分离。

公开(公告)号：US20060263777A1

公开(公告)日：2006-11-23

申请号：US10540224

申请日：2004-01-27

Applicant: William Tong

Inventor： William Tong

IPC: C12Q1/68 ,  C12M1/34

CPC classification number: G01N21/636 ,  G01J3/42 ,  G01N21/253 ,  G01N30/74 ,  G01N2201/103 ,  G01N2201/12746

Abstract: Techniques and systems for using nonlinear four wave mixing to optically measure microarrays with sample cells of biological or chemical materials. Examples of suitable microarrays include but are not limited to DNA microchips and capillary electrophoresis microarrays.

Abstract translation: 使用非线性四波混合的光学测量微阵列与生物或化学材料样品池的技术和系统。 合适的微阵列的实例包括但不限于DNA微芯片和毛细管电泳微阵列。

公开(公告)号：US07057177B2

公开(公告)日：2006-06-06

申请号：US10427006

申请日：2003-04-29

Applicant: Bruce R. Davis ,  Paul H. Shelley

Inventor： Bruce R. Davis ,  Paul H. Shelley

IPC: G01N21/35

CPC classification number: G01N25/00 ,  G01N21/3563 ,  G01N21/55 ,  G01N33/20 ,  G01N2021/8887 ,  G01N2021/95615 ,  G01N2201/103

Abstract: A non-destructive method is provided for determining amount and distribution of a corrosion product on a metallic substrate. A value of infrared energy reflected from the metallic substrate without corrosion is determined. A value of infrared energy reflected from the metallic substrate with the corrosion product is determined. A value of infrared energy absorbed in the corrosion product is determined, and the value of the infrared energy absorbed in the corrosion product is correlated to an amount of the corrosion product.

Abstract translation: 提供了用于确定金属基底上的腐蚀产物的量和分布的非破坏性方法。 确定从没有腐蚀的金属基材反射的红外能量的值。 确定从具有腐蚀产物的金属基底反射的红外能量的值。 确定在腐蚀产物中吸收的红外能量的值，并且腐蚀产物中吸收的红外能量的值与腐蚀产物的量相关。

公开(公告)号：US20040223053A1

公开(公告)日：2004-11-11

申请号：US10435625

申请日：2003-05-07

Applicant: Mitutoyo Corporation

Inventor： Paul G. Gladnick ,  Richard M. Wasserman ,  Barry E. Saylor ,  Mark L. Delaney

IPC: H04N007/18

CPC classification number: G01N21/8806 ,  G01N2021/8835 ,  G01N2021/8838 ,  G01N2021/8887 ,  G01N2201/0694 ,  G01N2201/103 ,  G01N2201/117 ,  G06T1/0007 ,  G06T7/0004 ,  G06T2207/30164 ,  G06T2207/30241

Abstract: A precision machine vision inspection system and method for increased inspection throughput. The vision inspection system includes a movable stage for scanning and measuring selected workpiece features. In prior systems, conventional interspersing of image processing and inspection operations with image acquisition operations required stopping and starting the stage motion during image acquisition, necessitating associated delays or wait-states in various operations. Such delays are avoided in this invention by acquiring images continuously, with a timing that is independent of image inspection operations, so that delays and wait-states are avoided. In addition, continuous stage motion is combined with a strobe lighting feature during the image acquisition operations to acquire blur-free images at a high rate. Improved image acquisition and image analysis routines including these features are created and stored by the system.

Abstract translation: 精密机器视觉检测系统和方法，提高检测吞吐量。 视觉检查系统包括用于扫描和测量所选择的工件特征的可移动台。 在现有系统中，图像处理和检查操作与图像采集操作的传统散布需要在图像采集期间停止和启动阶段运动，从而在各种操作中需要相关的延迟或等待状态。 通过以独立于图像检查操作的定时连续获取图像，从而避免了延迟和等待状态，从而避免了这种延迟。 此外，在图像采集操作期间，连续舞台运动与闪光灯照明特征相结合，以高速率获得无模糊图像。 包括这些功能在内的改进的图像采集和图像分析程序由系统创建和存储。