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公开(公告)号：JP2002283299A
公开(公告)日：2002-10-03
申请号：JP2001081359
申请日：2001-03-21
Applicant: SEIKO EPSON CORP
Inventor： YAMAZAKI TETSURO , TAKEDA TAKASHI
IPC: G02B26/08 , B81B3/00 , B81C3/00 , H01L21/302 , H01L21/3065
Abstract: PROBLEM TO BE SOLVED: To provide a manufacturing method capable of manufacturing a microelectric machine such as an optical switching device with an excellent yield. SOLUTION: A movable layer is formed on a substrate 20 by a metallic movable upper electrode 7, a fixed lower electrode 8, and a silicon sacrifice layer 99, and a silicon oxide optical element layer is laminated. After forming a groove 90 by elementally separating the optical element layer, the substrate 20 is stuck to a package material 100 by a die attach agent 120, and is bonded by a wire. Afterwards, the sacrifice layer 99 is removed with XeF2 as an etchant. Thus, while performing wiring by being installed in the package material 100, an actuator 6 is protected by the sacrifice layer 99, and is put in a structurally stable state so as to prevent damage and intrusion of refuse as well as to improve the yield.
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公开(公告)号：JP2002257616A
公开(公告)日：2002-09-11
申请号：JP2001062522
申请日：2001-03-06
Applicant: SEIKO EPSON CORP
Inventor： TAKEDA TAKASHI
Abstract: PROBLEM TO BE SOLVED: To provide a small sensor with high sensitivity capable of detecting the presence or absence of ink in a tank. SOLUTION: The capacity type sensor 20, in which a wall section 28 is formed on a semiconductor substrate 50 so as to surrounds all sides, and a first electrode 21 is formed in a sensor region 26 inside the wall section 28, and a second electrode 22 is formed so as to seal the sensor region 26 and oscillates, is provided. A penetration 53 leading to the sensor region 26 is formed in the substrate 50 beforehand, and thereby a sacrificial layer for forming the second electrode 22 can be removed using an etchant even after installing the sensor 20 at the tank 10. Accordingly, the sensor 20 with high sensitivity can be provided by extraordinarily thinning the second electrode 22, and the damage of the thin second electrode 22 can be avoided by installing the sensor 20 at the tank 10 in such a condition that the second electrode 22 is supported by the sacrificial layer.
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公开(公告)号：JP2002117544A
公开(公告)日：2002-04-19
申请号：JP2001266362
申请日：2001-09-03
Applicant: SEIKO EPSON CORP
Inventor： TAKEDA TAKASHI
IPC: G11B7/0045 , G11B7/125
Abstract: PROBLEM TO BE SOLVED: To accurately detect the optimum recording power in a short time and also to realize the exact setting of the optimum recording power with respect to every radial position. SOLUTION: A fixed data slice level is obtained by dividing the data slice level by resistors 501 and 502 with respect to the envelope of a signal. By this data slice level, the optimum recording power is detected. Consequently, the optimum recording power having extremely small error is detected even under any environment, and also the optimum recording powers for all of the radial positions are set by only the detection of the inner/outer circumferential optimum recording powers.
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公开(公告)号：JP2002090881A
公开(公告)日：2002-03-27
申请号：JP2000285935
申请日：2000-09-20
Applicant: SEIKO EPSON CORP
Inventor： YONEKUBO MASATOSHI , TAKEDA TAKASHI
Abstract: PROBLEM TO BE SOLVED: To provide a projector device, capable of reducing speckled noise which being interference noise. SOLUTION: In the projector device 1 for modulating incident light 70 from a light source 20 by an LCD 28 and projecting the modulated light to a screen 5 through a lens system 30, an optical part 41 for providing a slight optical path difference to outgoing light 71 is arranged on the screen side of the system 30 and rotated by a driving means 45 using a motor 48. Since an image quality improving mechanism 40 is provided with the optical part 41 and the driving means 45, various speckled patterns are generated and are time-wise changed and the changed speckled patterns are time-wise mixed on a retina, so that the mixed pattern is whitened. Thereby speckled noise caused on the screen can be reduced.
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公开(公告)号：JP2001318325A
公开(公告)日：2001-11-16
申请号：JP2000138765
申请日：2000-05-11
Applicant: SEIKO EPSON CORP
Inventor： TSUCHIYA YUTAKA , TAKEDA TAKASHI
Abstract: PROBLEM TO BE SOLVED: To provide an optical switching unit which can prevent adsorption while maintaining the extraction rate of evanescent light. SOLUTION: The optical switching unit 55 constituted by combining together a light guide 1 having a total reflecting surface 1a capable of totally reflecting and transmitting incident light 2 and a micro optical element 3 having an extraction surface 3a extracting light 2 from the light guide 1 is provided with multiple dome-shaped fine protrusions 70 of about 1 to 20 nm in height on the extraction surface 3a by irradiation with laser. The adsorbing force is made small by a fine gap formed by the fine protrusions 70 to prevent the adsorption, thereby providing the optical switching unit 55 which can be driven at a high speed with high reliability and small electric power, and can sufficiently extract evanescent light.
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Patent Agency Ranking
公开(公告)号：JP2001318324A
公开(公告)日：2001-11-16
申请号：JP2000138763
申请日：2000-05-11
Applicant: SEIKO EPSON CORP
Inventor： TSUCHIYA YUTAKA , TAKEDA TAKASHI
Abstract: PROBLEM TO BE SOLVED: To assure spacings of extremely good accuracy with light guides of an optical switching unit of an active type to move macrooptical elements and further to assure reliability and high-speediness. SOLUTION: This optical switching unit is provided with walls 30 so as to enclose spaces 15 where the optical switching elements 10 line up, by which the dimensions between the light guides 1 and a substrate 20 are assured and the sealing of the spaces 15 with the substrate 20 and the walls 30 is made possible. Resistance is eliminated and the driving of the optical switching elements at high speed is made possible by reducing the pressure in the spaces 15 and further, the problem, such as deterioration by adsorption and oxidation may be solved.
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公开(公告)号：JP2001117024A
公开(公告)日：2001-04-27
申请号：JP29283699
申请日：1999-10-14
Applicant: SEIKO EPSON CORP
Inventor： TAKEDA TAKASHI
IPC: G02B26/08
Abstract: PROBLEM TO BE SOLVED: To provide structure by which an optical switching element with resin structure on the upper part of its actuator can be manufactured by easy processes. SOLUTION: An electrode part 7 with high rigidity and an elastic part 15 with flexible structure are formed by reinforcing an A1 layer 33 to constitute an upper electrode 7 of an actuator part 6 using electrostatic force by supporting structure 5 of a switching part 3 to be driven by the actuator. The electrode part 7 and the elastic part 15 can be formed by one layer and the actuator 6 can be formed by two structural layers together with a lower electrode 8 to be formed on a substrate 20. Sacrificial layers 32 and 34 in the case of forming the actuator 6 or a resin optical element part 3 can be removed by fluorinated gas 48 without affecting the optical element part 3, the semiconductor substrate 20, etc., by forming the sacrificial layers by amorphous silicon.
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公开(公告)号：JPH11202222A
公开(公告)日：1999-07-30
申请号：JP914898
申请日：1998-01-20
Applicant: SEIKO EPSON CORP
Inventor： TAKEDA TAKASHI , YONEKUBO MASATOSHI , ITO HIROKAZU
Abstract: PROBLEM TO BE SOLVED: To provide an optical switching device by which the quantity of light is increased while capturing evanescent waves and the image display of high contrast is enabled. SOLUTION: A light transmission part 20 provided with a full reflecting plane 22 for fully reflecting light and transmitting it, an optical switching part 30 capable of capturing, reflecting and emitting evanescent light while making an extracting plane 32 close to the full reflecting plane 22 and a driving part 40 for driving the optical switching part 30 are laminated in this order in the emitting direction of light. Therefore, since the extracted light does not pass through the driving part 40, the loss of light is reduced. Besides, since the driving part 40 can be designed without optical consideration, the extracting plane 32 can be expanded, an opening ratio is increased, the quantity of light is increased and further, the optical switching element capable of forming the image reduced in the number of pixel boundary lines can be provided.
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公开(公告)号：JP2571034B2
公开(公告)日：1997-01-16
申请号：JP1255595
申请日：1995-01-30
Applicant: SEIKO EPSON CORP
Inventor： YONEKUBO MASATOSHI , TAKEDA TAKASHI , NISHIDA SHIGERU
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公开(公告)号：JP2554891B2
公开(公告)日：1996-11-20
申请号：JP22362287
申请日：1987-09-07
Applicant: SEIKO EPSON CORP
Inventor： MYAZAWA TAKAO , TAKEDA TAKASHI
IPC: G11B7/125 , G11B7/00 , G11B7/004 , G11B7/0055 , G11B7/30
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