公开(公告)号：US5621157A

公开(公告)日：1997-04-15

申请号：US480330

申请日：1995-06-07

Applicant: Yang Zhao ,  Richard S. Payne

Inventor： Yang Zhao ,  Richard S. Payne

IPC: G01P21/00 ,  G01L1/14

CPC classification number: G01P21/00

Abstract: To calibrate an accelerometer having a ground plane, two fixed beams, and a movable beam centered between the fixed beams, a force/acceleration reference is produced by providing a change in voltage on the ground plane. Circuit gain is adjusted so that the output response indicates the force reference. The calibration method can be used to self-calibrate in response to an event, such as a power-up state. The calibration can be performed without shaking and can be used with either open or closed loop circuits.

Abstract translation: 为了校准具有接地平面的加速度计，两个固定光束和以固定光束为中心的可移动光束，通过在接地平面上提供电压变化来产生力/加速度参考。 调整电路增益，使输出响应指示力参考。 校准方法可以用于响应于诸如上电状态的事件而自校准。 校准可以不摇动地进行，并且可以与开环或闭环电路一起使用。

公开(公告)号：US5517123A

公开(公告)日：1996-05-14

申请号：US296529

申请日：1994-08-26

Applicant: Yang Zhao ,  Richard S. Payne

Inventor： Yang Zhao ,  Richard S. Payne

IPC: G01R29/12

CPC classification number: G01R29/12

Abstract: The invention is a method and apparatus for electrostatic potential sensing by using electromechanical microstructures. The mechanical microstructure may be fabricated by either surface micromachining or bulk-micromachining. The sensor comprises a movable plate which is movable in the lateral dimension and which is suspended from and above a substrate bearing an isolated electrically conductive layer. The layer acts as the sensor electrode and is brought in contact with or near the object the electrostatic potential of which is to be sensed. The movable plate is suspended between two fixed, suspended and cantilevered plates. The three suspended plates collectively form two capacitors with the two fixed plates comprising the first plate of first and second capacitors and the movable plate comprising the second plate of both capacitors. A potential differential between the movable plate and the conductive layer causes lateral movement of the movable plate, resulting in a change in the capacitance of the two capacitors. Resolving circuitry converts the change in capacitance into an output signal indicative of the electrostatic difference between the movable plate and the conductive layer.

Abstract translation: 本发明是一种利用机电微结构进行静电势感测的方法和装置。 机械微结构可以通过表面微机械加工或体微加工制造。 传感器包括可移动的板，其可在横向尺寸上移动并且悬挂在承载隔离导电层的基板上方和上方。 该层用作传感器电极，并与被感测静电电位的物体接触或接近。 可移动板悬挂在两个固定，悬挂和悬臂板之间。 三个悬挂板共同形成两个电容器，两个固定板包括第一和第二电容器的第一板，并且可移动板包括两个电容器的第二板。 可移动板和导电层之间的电位差导致可动板的横向移动，导致两个电容器的电容变化。 分解电路将电容变化转换成表示可动板和导电层之间的静电差的输出信号。