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    MEMS DEVICE ANCHORING
    144.
    发明申请
    MEMS DEVICE ANCHORING 有权
    MEMS器件安装

    公开(公告)号：US20140300249A1

    公开(公告)日：2014-10-09

    申请号：US14342387

    申请日：2012-08-31

    Applicant: Robertus Petrus Van Kampen ,  Mickael Renault ,  Vikram Joshi ,  Richard L. Knipe ,  Anartz Unamuno

    Inventor： Robertus Petrus Van Kampen ,  Mickael Renault ,  Vikram Joshi ,  Richard L. Knipe ,  Anartz Unamuno

    IPC: B81B7/00

    CPC classification number: B81B7/00 ,  B81B2201/016 ,  B81B2203/0307 ,  B81C1/00039 ,  B81C2203/0136 ,  H01G5/16 ,  H01H59/0009 ,  Y10T29/49105

    Abstract: Embodiments of the present invention generally relate to a MEMS device that is anchored using the layer that is deposited to form the cavity sealing layer and/or with the layer that is deposited to form the pull-off electrode. The switching element of the MEMS device will have a flexible or movable portion and will also have a fixed or anchor portion that is electrically coupled to ground. The layer that is used to seal the cavity in which the switching element is disposed can also be coupled to the fixed or anchor portion of the switching element to anchor the fixed or anchor portion within the cavity. Additionally, the layer that is used to form one of the electrodes may be used to provide additional leverage for anchoring the fixed or anchor portion within the cavity. In either situation, the movement of the flexible or movable portion is not hindered.

    Abstract translation: 本发明的实施例通常涉及使用沉积以形成空腔密封层和/或沉积以形成拉出电极的层来锚定的MEMS器件。 MEMS器件的开关元件将具有柔性或可移动部分，并且还将具有电耦合到地的固定或锚定部分。 用于密封其中设置有开关元件的空腔的层也可以联接到开关元件的固定部分或锚固部分，以将固定部分或锚固部分锚固在腔体内。 另外，用于形成电极之一的层可以用于提供用于将固定或锚定部分锚定在腔内的额外的杠杆作用。 在这两种情况下，柔性或可移动部分的运动不受阻碍。

    MEMS DEVICE AND METHOD OF MANUFACTURING THE SAME
    145.
    发明申请
    MEMS DEVICE AND METHOD OF MANUFACTURING THE SAME 有权
    MEMS器件及其制造方法

    公开(公告)号：US20140284188A1

    公开(公告)日：2014-09-25

    申请号：US13966175

    申请日：2013-08-13

    Applicant: KABUSHIKI KAISHA TOSHIBA

    Inventor： Hiroaki YAMAZAKI ,  Haruka KUBO

    IPC: B81B3/00 ,  B81C1/00 ,  H01H59/00

    CPC classification number: B81B3/0086 ,  B81B2201/016 ,  H01G5/18 ,  H01H59/0009

    Abstract: According to one embodiment, a MEMS device comprises a first electrode provided on a support substrate, a second electrode opposed to the first electrode and movable in the direction it is opposed to the first electrode, and beam parts, each connected to those sides of the second electrode, which oppose to each other, and each supporting the second electrode. The second electrode has a slit extending parallel to the sides to which the beam parts are connected and opening at both the front and the back. Further, the second electrode has at least one bridge part extending over the slit, crossing the slit and made of a material different from that of the second electrode.

    Abstract translation: 根据一个实施例，MEMS器件包括设置在支撑衬底上的第一电极，与第一电极相对并且可在第一电极与第一电极相对的方向上移动的第二电极，以及每个连接到第一电极的那些侧的光束部分 第二电极彼此相对，并且每个支撑第二电极。 第二电极具有平行于侧面延伸的狭缝，梁部分连接到侧面并且在前后两者都开口。 此外，第二电极具有至少一个在狭缝上延伸的桥接部分，该桥部分与狭缝交叉并且由不同于第二电极的材料制成。

    MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) CAPACITIVE OHMIC SWITCH AND DESIGN STRUCTURES
    147.
    发明申请
    MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) CAPACITIVE OHMIC SWITCH AND DESIGN STRUCTURES 有权
    微电子机械系统（MEMS）电容式OHMIC开关和设计结构

    公开(公告)号：US20130168783A1

    公开(公告)日：2013-07-04

    申请号：US13342689

    申请日：2012-01-03

    Applicant: Hanyi DING ,  Qizhi LIU ,  Anthony K. STAMPER

    Inventor： Hanyi DING ,  Qizhi LIU ,  Anthony K. STAMPER

    IPC: H01L29/84 ,  G06F17/50 ,  H01L21/02

    CPC classification number: H01H1/0036 ,  B81B7/0006 ,  B81B2201/016 ,  G06F17/5063 ,  G06F17/5068 ,  H01P1/127

    Abstract: A micro-electro-mechanical system (MEMS), methods of forming the MEMS and design structures are provided. The method comprises forming a coplanar waveguide (CPW) comprising a signal electrode and a pair of electrodes on a substrate. The method comprises forming a first sacrificial material over the CPW, and a wiring layer over the first sacrificial material and above the CPW. The method comprises forming a second sacrificial material layer over the wiring layer, and forming insulator material about the first sacrificial material and the second sacrificial material. The method comprises forming at least one vent hole in the insulator material to expose portions of the second sacrificial material, and removing the first and second sacrificial material through the vent hole to form a cavity structure about the wiring layer and which exposes the signal line and pair of electrodes below the wiring layer. The vent hole is sealed with sealing material.

    Abstract translation: 提供了微机电系统（MEMS），形成MEMS和设计结构的方法。 该方法包括在衬底上形成包括信号电极和一对电极的共面波导（CPW）。 该方法包括在CPW上形成第一牺牲材料，以及在第一牺牲材料上方和CPW上方的布线层。 该方法包括在布线层上形成第二牺牲材料层，以及围绕第一牺牲材料和第二牺牲材料形成绝缘体材料。 该方法包括在绝缘体材料中形成至少一个通气孔以暴露第二牺牲材料的部分，以及通过通气孔去除第一和第二牺牲材料，以形成围绕布线层的空腔结构，并使信号线和 一对电极在布线层下方。 通气孔用密封材料密封。

    Method for Integrating MEMS Microswitches on Gan Substrates Comprising Electronic Power Components
    148.
    发明申请
    Method for Integrating MEMS Microswitches on Gan Substrates Comprising Electronic Power Components 有权
    将MEMS微动开关集成在包含电子功率元件的赣基板上的方法

    公开(公告)号：US20130056751A1

    公开(公告)日：2013-03-07

    申请号：US13696569

    申请日：2010-05-07

    Applicant: Afshin Ziaei ,  Matthieu Le Baillif

    Inventor： Afshin Ziaei ,  Matthieu Le Baillif

    IPC: H01L29/20 ,  H01L21/02

    CPC classification number: B81C1/00246 ,  B81B2201/016 ,  B81C2203/0735 ,  H01H59/0009

    Abstract: Methods of fabrication of electronic modules comprise, on the one hand, power electronic components fabricated on a substrate made of gallium nitride (GaN) and, on the other hand, micro-switches using electrostatic activation of the MEMS (Micro Electro Mechanical System) type. The electronic components and the micro-switches are fabricated on a single gallium nitride substrate and the fabrication method comprises at least the following steps: fabrication of the power components on the gallium nitride substrate; deposition of a first common passivation layer on said components and on the substrate; fabrication of the micro-switches on said substrate.

    Abstract translation: 电子模块的制造方法一方面包括制造在由氮化镓（GaN）制成的衬底上的功率电子部件，另一方面，使用使用MEMS（微机电系统）型的静电激活的微型开关 。 电子部件和微型开关在单个氮化镓衬底上制造，并且制造方法至少包括以下步骤：在氮化镓衬底上制造功率部件; 在所述组件和衬底上沉积第一公共钝化层; 所述基板上的微型开关的制造。

    MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) AND RELATED ACTUATOR BUMPS, METHODS OF MANUFACTURE AND DESIGN STRUCTURES
    149.
    发明申请
    MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) AND RELATED ACTUATOR BUMPS, METHODS OF MANUFACTURE AND DESIGN STRUCTURES 有权
    微电子机械系统（MEMS）及相关执行机构的制造，制造和设计结构的方法

    公开(公告)号：US20120319528A1

    公开(公告)日：2012-12-20

    申请号：US13164331

    申请日：2011-06-20

    Applicant: Christopher V. JAHNES ,  Anthony K. STAMPER

    Inventor： Christopher V. JAHNES ,  Anthony K. STAMPER

    IPC: H02N1/00 ,  H05K13/00

    CPC classification number: H01H59/0009 ,  B81B3/001 ,  B81B7/0006 ,  B81B2201/016 ,  B81B2203/0118 ,  B81B2203/04 ,  B81C1/0015 ,  B81C1/00293 ,  B81C2203/0145 ,  G06F17/5045 ,  G06F17/5068 ,  H01H1/0036 ,  H01H2001/0057 ,  Y10T29/49121

    Abstract: Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are provided. The method of forming a MEMS structure includes forming fixed actuator electrodes and a contact point on a substrate. The method further includes forming a MEMS beam over the fixed actuator electrodes and the contact point. The method further includes forming an array of actuator electrodes in alignment with portions of the fixed actuator electrodes, which are sized and dimensioned to prevent the MEMS beam from collapsing on the fixed actuator electrodes after repeating cycling. The array of actuator electrodes are formed in direct contact with at least one of an underside of the MEMS beam and a surface of the fixed actuator electrodes.

    Abstract translation: 提供微机电系统（MEMS）结构，制造方法和设计结构。 形成MEMS结构的方法包括在基板上形成固定的致动器电极和接触点。 该方法还包括在固定的致动器电极和接触点上形成MEMS光束。 该方法还包括形成与固定致动器电极的部分对准的致动器电极阵列，其尺寸和尺寸被设计成防止MEMS光束在重复循环之后塌陷在固定的致动器电极上。 致动器电极阵列形成为与MEMS光束的下侧和固定的致动器电极的表面中的至少一个直接接触。

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