公开(公告)号：EP1639411B1

公开(公告)日：2010-08-04

申请号：EP04743806.4

申请日：2004-06-22

Applicant: Consiglio Nazionale delle Ricerche

Inventor： TORMEN, Massimo

IPC: G03F7/00 ,  B29C45/73 ,  B82B3/00

CPC classification number: G03F7/0002 ,  B29C33/02 ,  B81C99/0085 ,  B81C2201/0153 ,  B81C2201/036 ,  B82Y10/00 ,  B82Y40/00

Abstract: A lithographic process for forming a pattern in relief (20) on a mass (10) of polymeric material comprises the steps of: preparing the mass (10) of polymeric material and a die (12) having a surface region (14) facing towards the mass (10) of polymeric material and which reproduces in negative the pattern in relief (20); heating the die (12) and putting the mass (10) of polymeric material into contact with the die (12) in any temporal sequence, in such a way that the part of the mass (10) of polymeric material in contact with the surface zone (14) is subject to softening; and separating the die (12) from the mass (10) of polymeric material on the surface of which the pattern in relief (20) has been formed. The heating of at least one part of the die (12) is obtained by generation of thermal energy upon dissipation of another form of energy in at leats one region (16) of the die (12).

公开(公告)号：EP2132148A1

公开(公告)日：2009-12-16

申请号：EP08726163.2

申请日：2008-02-27

Applicant: Corning Inc.

Inventor： DANNOUX, Thierry, L. ,  MARQUES, Gaspar, P. ,  MORENA, Robert, M. ,  TANNER, Cameron, W.

IPC: C03B23/203 ,  C03B11/08

CPC classification number: C03B23/203 ,  B81B2201/051 ,  B81C99/0085 ,  B81C2201/019 ,  B81C2201/036 ,  C03B2215/412

Abstract: Described herein are methods for making microfluidic devices comprising glass or glass-containing materials, wherein the methods have decreased cost and/or improved dimensional properties over similar formed glass articles produced using current techniques.

Abstract translation: 本文描述了用于制造包含玻璃或含玻璃材料的微流体装置的方法，其中与使用现有技术生产的类似形成的玻璃制品相比，所述方法具有降低的成本和/或改善的尺寸性质。 特别地，提供第一块刚性非粘性材料，其具有图案化的模制表面; 提供第一量的含玻璃组合物; 第一数量的含玻璃组合物与图案化的模制表面接触并且在图案化的模制表面和第二表面之间被挤压; 该片刚性不粘材料和第一数量的含玻璃组合物被一起加热到足以软化一定量的含玻璃组合物，使得图案化模制表面在第一数量的含玻璃组合物中复制，形成成形 含玻璃制品; 至少一部分所形成的含玻璃制品被密封以产生具有至少一个流体通道的微流体装置。

公开(公告)号：EP2016462A1

公开(公告)日：2009-01-21

申请号：EP07736834.8

申请日：2007-05-04

Applicant: Scriba Nanotecnologie S.r.l.

Inventor： CAVALLINI, Massimiliano ,  MASSACCESI, Gianluca ,  MATACOTTA, Francesco Cino ,  BISCARINI, Fabio

IPC: G03F7/00

CPC classification number: G03F7/0002 ,  B29C59/022 ,  B29C2059/023 ,  B81C1/00111 ,  B81C2201/036 ,  B82Y10/00 ,  B82Y40/00 ,  Y10T428/24802

Abstract: A method for providing a locally rough surface which is spatially structured on micrometric and/or nanometric scale and is formed by a substrate, so as to obtain a product. The method comprises the steps of flattening and/or smoothing the rough substrate in preset regions.

公开(公告)号：EP1964817A1

公开(公告)日：2008-09-03

申请号：EP07300835.1

申请日：2007-02-28

Applicant: Corning Incorporated

Inventor： Dannoux, Thierry ,  Marques, Paulo ,  Morena, Robert ,  Tanner, Cameron

IPC: C03B23/203 ,  C03B11/08

CPC classification number: C03B23/203 ,  B81B2201/051 ,  B81C99/0085 ,  B81C2201/019 ,  B81C2201/036 ,  C03B2215/412

Abstract: Described herein are methods for making microfluidic devices comprising glass or glass-containing materials, wherein the methods have decreased cost and/or improved dimensional properties over similar formed glass articles produced using current techniques.

Abstract translation: 本文描述了用于制造包含玻璃或含玻璃材料的微流体装置的方法，其中相对于使用当前技术制备的相似的成形玻璃制品，该方法具有降低的成本和/或改善的尺寸性能。

公开(公告)号：EP1964816A1

公开(公告)日：2008-09-03

申请号：EP07300836.9

申请日：2007-02-28

Applicant: Corning Incorporated

Inventor： Dannoux, Thierry ,  Marques, Paulo ,  Morena, Robert ,  Tanner, Cameron

IPC: C03B11/08

CPC classification number: C03B11/084 ,  B81B2201/051 ,  B81C99/0085 ,  B81C2201/019 ,  B81C2201/036 ,  C03B2215/07

Abstract: Described herein are methods for molding sheets of glass, wherein the molded sheets have improved dimensional properties over molded glass sheets produced using current techniques.

Abstract translation: 这里描述的是用于模制玻璃板的方法，其中模制片材具有比使用当前技术制备的成型玻璃板更好的尺寸性能。

公开(公告)号：EP1387216B1

公开(公告)日：2007-05-09

申请号：EP03016539.3

申请日：2003-07-23

Applicant: Hitachi, Ltd.

Inventor： Hasegawa, Mitsuru, Hitachi, Ltd., Intell. Pr. Gr. ,  Miyauchi, Akihiro, Hitachi, Ltd., Intell. Pr. Gr.

IPC: G03F7/00 ,  B29C43/00

CPC classification number: B82Y10/00 ,  B29C33/424 ,  B29C43/36 ,  B81C99/009 ,  B81C2201/036 ,  B82Y40/00 ,  G03F7/0002 ,  G03F7/0017 ,  H01L21/76817

公开(公告)号：EP1639411A1

公开(公告)日：2006-03-29

申请号：EP04743806.4

申请日：2004-06-22

Applicant: CONSIGLIO NAZIONALE DELLE RICERCHE INFM ISTITUTO NAZIONALE PER LA FISICA DELLA MATERIA

Inventor： TORMEN, Massimo

IPC: G03F7/00 ,  B29C45/73 ,  B82B3/00

CPC classification number: G03F7/0002 ,  B29C33/02 ,  B81C99/0085 ,  B81C2201/0153 ,  B81C2201/036 ,  B82Y10/00 ,  B82Y40/00

Abstract: A lithographic process for forming a pattern in relief (20) on a mass (10) of polymeric material comprises the steps of: preparing the mass (10) of polymeric material and a die (12) having a surface region (14) facing towards the mass (10) of polymeric material and which reproduces in negative the pattern in relief (20); heating the die (12) and putting the mass (10) of polymeric material into contact with the die (12) in any temporal sequence, in such a way that the part of the mass (10) of polymeric material in contact with the surface zone (14) is subject to softening; and separating the die (12) from the mass (10) of polymeric material on the surface of which the pattern in relief (20) has been formed. The heating of at least one part of the die (12) is obtained by generation of thermal energy upon dissipation of another form of energy in at leats one region (16) of the die (12).

公开(公告)号：EP1333324A3

公开(公告)日：2004-09-29

申请号：EP03250633.9

申请日：2003-01-31

Applicant: Hewlett-Packard Company

Inventor： Lee, Heon, Gyosu APT 6-602

IPC: G03F7/00 ,  B29C67/00

CPC classification number: B29C59/022 ,  B29C2059/023 ,  B81C99/009 ,  B81C2201/036 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  Y10T428/24479 ,  Y10T428/2457 ,  Y10T428/24579 ,  Y10T428/24595

Abstract: A wide-area nano-size imprinting stamp 10 is disclosed. The wide-area nano-size imprinting stamp 10 includes a substrate 11 having a base surface 13 upon which is formed a plurality of micro-features 21 . Each micro-feature 21 includes a plurality of spacers 23 disposed on opposed side surfaces ( 22a, 22b ) thereof. The spacers 23 extend laterally outward of the opposed side surfaces ( 22a, 22b ) and the micro-features 21 and the spacers 23 extend outward of the base surface 13. The micro-features 21 and the spacers 23 are selectively etched to differing heights ( h 1 , h 2 ) to define an imprint stamp 20 having an imprint profile 24. The imprint stamps 20 can be formed on substantially all of a useable area A U of the substrate 11 and can have complex shapes that vary among the imprint stamps 20 . The imprint stamps 20 can be used as a template for transferring the imprint profile 24 to a mask layer 65 in which the imprint profile 24 will be replicated.

公开(公告)号：EP1440308A1

公开(公告)日：2004-07-28

申请号：EP02800336.6

申请日：2002-09-13

Applicant: CORNING INCORPORATED

Inventor： GUZMAN, Guillaume ,  THEMONT, Jean-Pierre

IPC: G01N27/26 ,  B32B3/10

CPC classification number: B81C1/00119 ,  B01L3/5027 ,  B33Y70/00 ,  B33Y80/00 ,  B81B2201/058 ,  B81B2203/0353 ,  B81C1/00071 ,  B81C2201/019 ,  B81C2201/036 ,  C03B19/063 ,  C03B23/20 ,  Y10T137/0391 ,  Y10T137/0402 ,  Y10T137/2224 ,  Y10T137/6416

Abstract: The present invention relates to microfluidic devices and to their method of manufacture. The microfluidic devices are original by their specific structure (of sandwich type) and by the materials from which they are made (mainly glasses, glass ceramics, ceramics), and also by their specific method of manufacture, which is based on a vacuum-forming operation. The microfluidic device includes a first assembly including a microstructure and a first substrate, wherein the microstructure is constructed and arranged on the substrate under vacuum. A second assembly includes a second substrate positioned on the microstructure after the first assembly is presintered and adhered thereto by heat treatment to form a one-piece microstructure defining at least one recess between the first and second substrates.

公开(公告)号：EP1387216A2

公开(公告)日：2004-02-04

申请号：EP03016539.3

申请日：2003-07-23

Applicant: Hitachi, Ltd.

Inventor： Hasegawa, Mitsuru, Hitachi, Ltd., Intell. Pr. Gr. ,  Miyauchi, Akihiro, Hitachi, Ltd., Intell. Pr. Gr.

IPC: G03F7/00 ,  B29C43/00

CPC classification number: B82Y10/00 ,  B29C33/424 ,  B29C43/36 ,  B81C99/009 ,  B81C2201/036 ,  B82Y40/00 ,  G03F7/0002 ,  G03F7/0017 ,  H01L21/76817

Abstract: A stamper (101) includes a substrate (102) and a plurality of protrusions (105), (106), (107), (108) of different heights formed on one of the surfaces of the substrate, the protrusions of larger height having a stack structure formed of at least two layers of at least two types of materials, thereby transferring a plurality of patterns at the same time.

Abstract translation: 压模（101）包括基板（102）和形成在基板的一个表面上的不同高度的多个突起（105），（106），（107），（108）（108），较大高度的突起具有 由至少两层至少两种类型的材料形成的堆叠结构，从而同时传送多个图案。